Tms Heater - Edwards STP-XF803 Series Instruction Manual

STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
No. Item
1 Inlet port flange
2 Height of the purge port
3 TMS sensor
4

TMS heater

5 TMS heater cover
6 Outlet port heater
7 Middle stage cooling water port
8 Lower stage cooling water port
9 Outlet port flange
10 Purge port
11 TMS heater connector
12 Blade temperature sensor connector
13 STP connector
14 Outlet port heater connector
15 Screw hole for legs
*1
ISO
Description
2-3/8 inch
*1
2-Rc 1/4
KF40
KF10
8-M12 depth 20
1
MT-92E-101-C
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