External Appearance Of The Stp Pump; Stp-Xf803 / Xf1303 / Xf813 / Xf1313 Series - Edwards STP-XF803 Series Instruction Manual

1.2

External appearance of the STP pump

1
MT-92E-101-C
Page 14
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
Figure 1 - STP-XF803 / XF1303 / XF813 / XF1313 series
Inlet port
VG150 VG200
flange
φA
235 300
φB
237 237
C 12 16
D 387 349
E 145 107
φF
210 270
G 45° 22.5°
H
8-φ12 8-φ15
I
235 197
J 267 229
K 264 226
L 343 305
M 342 304
N 338 300
O 320 282
ISO160F ISO200F ICF203
225 285 203
237 237 237
16 16 22
387 349 389
145 107 147
200 260 181
15° 15° 9°
8-φ11 12-φ11 20-φ8.4 24-φ8.4
235 197 237
267 229 269
264 226 266
343 305 345
342 304 344
338 300 340
320 282 322
ICF253
253
237
25
349
107
231.8
7.5°
197
229
226
305
304
300
282