How To Secure The Stp Pump; Tightening Torque Of Bolt - Edwards STP-XF803 Series Instruction Manual

STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
2

HOW TO SECURE THE STP PUMP

When connecting the wire to the protective earth terminal, use AWG 14 wire with
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
Secure the STP pump to the vacuum equipment according to the method specified in this manual.
The generated torque during a pump failure is called "Destructive torque". Design and secure the
mounting for the STP pump so that it can withstand the maximum rotational torque. Refer to Table 2
for destructive torque in pump abnormality.
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600 N/mm
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
Note: When using any securing method other than that specified in this manual, contact Edwards.
WARNING
yellow/green.
WARNING
equipment damage.
Bolt size Tightening torque (Nm)
M8
M10
M12
Table 1 - Tightening torque of bolt
12
24
42
2 or more.
2
MT-92E-101-C
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