Scu-800/801 - Edwards STP-XF803 Series Instruction Manual

STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
Installation position
Cooling method
Recommended backing-pump
*9
Mass
Ambient temperature range
Storage temperature range
Applicable Control unit
Maximum backing pressure indicates the outlet pressure at which the inlet pressure suddenly increases without gas flow.
*1
Allowable flow backing pressure indicates the outlet pressure when the maximum gas flow rate of nitrogen is continuously
*2
exhausted using the back pump (maximum exhaust speed 10,000 L / min).
*2
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*3
Critical operating backing pressure indicates the outlet pressure that can be operated continuously without gas flow.
*4
If the flow rate of N purge gas is out of the specification, the rotor temperature sensor may not function properly. In order to
2
prevent deposition of product on the magnetic bearing parts, be sure to introduce a purge gas while process gas is present
inside the pump.
*5
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*6
The accuracy of the rotor temperature sensor is that at rated speed.
*7
The function is enabled when the rotation speed is in normal mode (rated speed to 90% of the rated speed). Refer to
Section 1.1.3 , "Safety function of blade temperature sensor" for the safety function of the rotor temperature sensor.
Refer to Section 2.3.2, "STP pump installation positions" on the STP Series Turbomolecular Pumps Generic Instruction
*8
Manual.
*9
Mass is a value of state that the only standard accessory was installed (except the optional accessory).
*10
Maximum gas flow-rate
Backing
pressure
Gas
[Pa] [Torr]
N
109 0.82
2
Ar
59 0.44
*10
The maximum gas flow-rate is applicable under conditions that N
backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is
exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.
L/min
kg
°C
°C
TMS TMS Inlet
Heater Valve port
set set flange
point point temp.
145 C 75 C 117 C
*8
Vertical
Water cooling
>10,000
52
0 to 40
-25 to 55

SCU-800/801

Purge gas N
2
gas flow rate
3
[Pa･m /s] [SCCM]
-1
5.91×10
350±50
-2
±8.45×10
or Ar gas is vacuumed continuously and the
2
51
Maximum gas
flow-rate
3
[Pa･m /s] [SCCM]
5.07 3,000
1.35 800
MT-92E-101-C
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