Specification Of Tms Unit - Edwards STP-XF803 Series Instruction Manual

3.6

Specification of TMS unit

3
Temperature control method
Input channel 1 / Output channel 1
TMS heater temperature Setting
TMS heater voltage
TMS heater capacity
Display name on STC-U
Display name on control unit
Input channel 2 / Output channel 2
TMS valve temperature Setting
TMS valve voltage
Display name on STC-U
Display name on control unit
Input channel 3 / Output channel 3
Outlet port heater temperature
Setting
Outlet port heater voltage
Outlet port heater capacity
Display name on STC-U
Display name on control unit
Input channel 4 / Output channel 4
Alarm output
MT-92E-101-C
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STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
Item
ACV (Hz)
ACV (Hz)
BV
BV135 155
[A]
Control ON/OFF of the TMS heater and cooling water
135 145
°C
220±10% (50/60)
W 412
(at 200V)
85 75
°C
DCV
°C 150 170
W
Alarm outputs from the STP control unit
Specification
BV
Y1
155
BV155
[B]
150
500
(at 200V)
HEATER1
"Heat ring"
85 93
24
VALVE1
"Cooling"
170
220 (50/60)
86 (at 220V)
HEATER2
"Outlet"
Unused
Y2
CV155