Cleaning; Inspecting The Deposit - Edwards STP-XF803 Series Instruction Manual

6.2

Cleaning

6
The method for cleaning the STP pump is as follows:
• Clean the outside of the STP pump with proper solvent as required. An alcohol solvent can be
used.
• Clean off with a pure gas when dust has accumulated in the connector.
• If the label of the STP pump has been damaged, contact Edwards.
The decontamination (overhaul) in the STP pump is executed in Service office. When an overhaul is
needed, contact Service office.
6.3

Inspecting the deposit

Deposit may have accumulated inside the STP pump depending upon the type of the vacuum
equipment installed in the STP pump. An increase in the amount of deposit may lead to a
Furthermore, if the STP pump is operated with a deposit accumulated in it, a serious pump failure,
For devices in which deposit accumulates, conduct daily inspection along with periodical overhaul.
Leaving the STP pump without removing the deposit may cause the STP pump to be corroded
beyond repair. After removing the pump, contact the service office and immediately send the
Note: As stated in the Disclaimer, the costs of troubleshooting problems resulting from deposit will
be at your own charge even during the warranty period.
In a periodic inspection, by watching the pump outlet port, inspect the inside of the outlet port and the
pump interior for adhesion of deposits. Although the setting needs to be made for periodic
inspections depending on the use conditions, conduct a periodic inspection once every three to six
months under normal conditions. If deposit has accumulated to some extent, an overhaul (cleaning)
is required. Contact Service office.
Contact with the atmosphere may cause a reaction of the deposit. Seal the inlet port, outlet port, and
purge port so as to prevent the deposits from being exposed to the atmosphere as much as possible.
For the transport method, see Section 6.5, "Transporting for repair or overhaul".
MT-00E-2A1-C
Page 48
STP Series Turbomolecular Pump
CAUTION
malfunction of the STP pump.
such as breakage of the rotor blade, may occur.
pump to the service office.