How To Introduce A Purge Gas; Cooling The Stp Pump; Water-Cooling Method - Edwards STP-XF803 Series Instruction Manual

4.3.2

How to introduce a purge gas

4
When pumping reactive or corrosive gas, gas including hydrogen, introduce a purge gas to protect
Connect a needle valve or a similar part to the purge port and introduce a dry N
perform a gas purge (see Section 2.3.6, "Connecting the purge port").
Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B) for the specification of each
The allowable purge gas pressure is from 1.0×10
High-pressure at the inlet port may result in a noise. This is no abnormality/error.
4.4

Cooling the STP pump

When pumping gases or performing baking, always cool the STP pump.
Also, when performing baking, always cool the STP pump.
If the TMS unit is used, cool the STP pump with the method specified for the TMS unit.
4.4.1

Water-cooling method

The following precautionary procedures will need to be addressed:
• Use clean water as much as possible.
• Cooling water containing foreign materials may corrode or clog the cooling water pipe. Should
this occur, remove obstructions by feeding cooling water in the reverse direction.
• To prevent corrosion, connect a joint which is made of the same metallic materials as the joint
for water-cooling unit.
• When the STP pump is not to be used for a long period of time or it is to be moved after use,
introduce compressed air from one side of the cooling water port so that no water will remain
inside.
• When the STP pump is overheated due to shortage or suspension of water, the protective
function detects the overheated condition in the STP pump and stops the STP pump. As a
further safety procedure, attach a flow switch (not supplied) to the cooling water exit so that the
STP pump stops if abnormal cooling water flow occurs.
Note: The water-cooling unit is not available depending on the STP pump model. Refer to the STP
Pump Instruction Manual (B) and confirm whether the water-cooling unit can be used for the
STP pump.
Note: Refer to the STP Pump Instruction Manual (B) for the condition for the water-cooling unit.
MT-00E-2A1-C
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STP Series Turbomolecular Pump
the inside of the STP pump. Not to do so may result in product damage.
pump for the proper amount of the gas purge to introduce.
kgf/cm
CAUTION
CAUTION
5 Pa (atmospheric pressure) to 4.9×10
2 ) on the introduction side.
gas or other gas to
2
4 Pa (0.5