Maintenance And Inspection - Edwards STP-iS1607 Series Instruction Manual

MAINTENANCE AND INSPECTION

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Installation, operation and maintenance must only be executed by personnel who read through this
Manual carefully and have the specific skills to perform installation, operation and maintenance of the
STP pump. Confirm that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 - type
1).
8.1 Maintenance and inspection
When performing maintenance and inspections of the STP pump, exhaust gases
inside the STP pump thoroughly. Residual gases may cause an accident when
removing the STP pump. To prevent an accident, confirm the characteristics of
gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain
from the gas supplier. Wear personal protective clothing if necessary.
Before carrying out any maintenance or inspections on the STP pump, confirm that
the STP pump has stopped, power off the primary power (switch the MAIN POWER
to "OFF") and isolate (Lockout/Tagout) the electrical energy source, water and gas,
and other energy sources on the vacuum equipment. Failure to do so may result in
the inadvertent rotation of the STP pump which may result in an accident, an
electric shock or damage to equipment. Moreover, an accident caused by water
The wipes used for clean and decontamination might become hazardous waste
depending upon the solvent (alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local government.
DO NOT touch any place other those specified when performing maintenance or inspecting the
pump and NEVER open any panel because it could cause shock, malfunction, or short circuit.
Power OFF the peripheral equipments before performing maintenance and inspections.
Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact
Service office.
STP-iS1607 Series Turbomolecular Pump
WARNING
WARNING
leaks or gas leak may occur.
WARNING
CAUTION
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MT-94E-001-C
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