Abnormal State Of Magnetic Bearing (Disturbance); Excessive Vibration (Disturbance); Motor Driver Overload (Drv Overload); Overheating Inside The Stp Pump (Motor Overheat) - Edwards STP-iS1607 Series Instruction Manual

7.1.3

Abnormal state of magnetic bearing (Disturbance)

When an abnormality/error occurs in the magnetic bearing, check the STP pump.
If "FAILURE" cannot be released after reset operation, contact Service office.
When the magnetic bearing does not function normally due to a breakage of the STP connection
cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor lands
on the touch down bearing and stops. The "FAILURE" LED (red) flashes, and a failure signal is
output from the "X2 REMOTE" connector.
7.1.4

Excessive vibration (Disturbance)

When serious vibration or mechanical shock causes the rotor to come in contact with the touch down
bearing (due to external vibration/impact, intrusion of atmosphere, foreign matter into the STP pump,
or rotor imbalance), and the state lasts for a certain period of time, the STP pump decelerates and
stops.
The "FAILURE" LED (red) flashes, and a failure signal is output from the "X2 REMOTE" connector.
Note: When the rotor contacts the touch down bearing, contact noise and rotational noise of the
touch down bearing are generated from the STP pump.
7.1.5

Motor driver overload (DRV Overload)

When the STP pump does not attain the rated speed within approx. 30 minutes after starting or when
the ACCELERATION state remains unchanged during operation for approx. 30 minutes, the STP
pump decelerates and stops.
The "FAILURE" LED (red) flashes, and a failure signal is output from the "X2 REMOTE" connector.
7.1.6

Overheating inside the STP pump (MOTOR Overheat)

When the temperature of the motor inside the STP pump is overheated due to an overload, the STP
pump decelerates and stops.
The "FAILURE" LED (red) flashes, and a failure signal is output from the "X2 REMOTE" connector.
7.1.7

Overheating inside the control unit (CNT Overheat)

When the temperature inside the control unit rises due to abnormal cooling water flow rate or water
temperature, external heat source, or other event, the STP pump decelerates and stops.
The "FAILURE" LED (red) flashes, and a failure signal is output from the "X2 REMOTE" connector.
STP-iS1607 Series Turbomolecular Pump
CAUTION
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MT-94E-001-C
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