Error Message Values (Continued) - Edwards STP-iS1607 Series Instruction Manual

Error message
5
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
Aberrant Brake
Aberrant Accel
[System reservation]
[System reservation]
Inordinate Current
[System reservation]
Serial Com. Fail
[System reservation]
[System reservation]
*1
CAUTION or WARNING message. It is not a state of failure. Refer to Section 7 for details. The STP pump will continue to
operate after one of these messages is displayed. It is recommended that an application be designed with this in
consideration.
*2
When the setting value of serial communication timeout is 0, the error 78 is disabled (not detected).
MT-94E-001-C
Page 100
STP-iS1607 Series Turbomolecular Pump
Value
66
67
68
69
70
71
72
73
74
75
76
77
78 *2
79
80
Table 25 - Error message values (continued)
Error message
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
[System reservation]
Overspeed 4
[System reservation]
[System reservation]
WARNING: Pump Run Time Over
WARNING: Pump Overload
[System reservation]
Other Warning 1 (C/U Restart)
Other Warning 2 (FAN Warning)
Value
81
82
83
84
85
86
87
88
89
90
*1
91
*1
92
93
*1
94
*1
95