Indication Of "Failure" Led (Green); No Indication Of The "Failure" Led - Edwards STP-iS1607 Series Instruction Manual

7.6.2

Indication of "FAILURE" LED (green)

7
If an abnormality/error is detected by self test during the power ON operation, "FAILURE" LED
flashes in green. This is the indication of STP pump or control unit failure. Contact Service Office.
7.6.3

No Indication of the "FAILURE" LED

No. Symptom
1 The "POWER"
LED does not
illuminate.
2 The
"ROTATION"
LED does not
flash after
performing the
start operation.
3 Insufficient
ultimate
pressure.
4 Abnormal noise
is generated
while the pump
is rotating
MT-94E-001-C
Page 148
STP-iS1607 Series Turbomolecular Pump
Probable cause
Incorrect connection of
power cable
Abnormal power voltage Set the input voltage to the rated
Power failure
Insufficient cooling
Failure of the "Input
Operation Port" setting.
Failure of the backing-
pump.
Leakage of the piping
system.
Residual molecules.
External vibration or
impact
Table 43 - Troubleshooting with no indication of the "FAILURE" LED
Countermeasures
Connect the power cable correctly.
voltage ±10 %.
Check whether or not a power failure
has occurred.
Make sure that the STP pump is cooled. 2.3
Set the input operation port correctly.
Check the capacity and starting state
(use a backing-pump having more
capacity that we specified).
Check the piping system for leakage.
If the main composition is H
perform baking; if it is other gases,
clean the inside of the vacuum
equipment (If gases remain inside the
STP pump, contact Service office when
it is needed to be cleaned).
Remove external vibration so as not to
transmit it to the STP pump.
Referred
Section
3.4.5
3.4.6
2.4
7.1.1
4.9
3.5
3.5
or H O, 4.3
2 2
3.1.1