Command And Reply Table Definitions; Power Limit Setting - Edwards nEXT nEXT85 Instruction Manual

Turbomolecular pumps
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The message protocol in multi‑drop mode is different. Refer to
page
52.

5.1.2 Command and reply table definitions

Explanation of the command and reply characters.
Table 20 Command abbreviations
*
Fields that have multiple d characters shows typical length. All data fields have a
maximum of 5 decimal characters (prefixed by a minus number for the negative
numbers).
§
Fields that have multiple X characters shows maximum length and does not show fixed
length.
Typical setting command:
Command
Typical setting reply:
Reply
Typical query command:
Command
Typical query reply:
Reply

5.1.3 Power limit setting

Table: Power limit setting on page 60
The pump is supplied with a default power limit. If the default power limit is not
applicable for the application, change the default power limit to a value between the
maximum and minimum setting.
B8G000880_D - Configuration
Abbreviation
cr
chars
d
h
r
sp
string
X
!
S
*
=
S
Meaning
Carriage return character
Characters
Decimal ASCII character
Hexadecimal ASCII character
Returned error code. Refer to
codes on page
89.
Space character
Can have some ASCII characters
Multi-drop decimal ASCII character
8
5
5
sp
S
8
5
?
S
8
8
5
5
show the power limit setting options for the pump.
Page 59
Multi-drop operation on
*
Command set error
§
d
d
d
5
sp
r
5
5
sp
d
d
d
cr
cr
cr
cr

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