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To connect 4284A/
E4980A to AUX
NOTE
Perform the following procedure to connect the Keysight 4284A/E4980A. See
Figure 3-4
and
Figure
3-5.
Prepare a shorting bar furnished with the ASU. The shorting bar is effective for
reducing the offset capacitance caused by connecting a measurement terminal to the
chuck of a wafer prober.
1. Turn the instrument off.
2. Prepare two ASUs (#1 and #2) and two shorting bar. And perform the following
procedure for each ASU.
a. Disconnect the triaxial cable from the ASU if it is connected to the ASU
Force terminal.
b. Face the concave side of the shorting bar to front.
c. Slide the shorting bar from the right side of the connectors.
3. Connect the 16048D/E test leads to the 4284A/E4980A.
4. Connect the high potential (Hp) cable of the test leads to the ASU #1 CMU-pot
terminal.
5. Connect the high current (Hc) cable to the ASU #1 CMU-cur/AUX In terminal.
The shorting bar is fixed to the ASU #1 by the step 5 and 6.
6. Connect the triaxial cable from the HRSMU #1 Force terminal to the ASU #1
Force terminal.
7. Connect the low potential (Lp) cable to the ASU #2 CMU-pot terminal.
8. Connect the low current (Lc) cable to the ASU #2 CMU-cur/AUX In terminal.
The shorting bar is fixed to the ASU #2 by the step 8 and 9.
9. Connect the triaxial cable from the HRSMU #2 Force terminal to the ASU #2
Force terminal.
10. Prepare the connection wire (both pin terminals) furnished with the ASU and
connect it between the CMU Return terminals of the ASU #1 and ASU #2
together.
About ASU output cables
To perform capacitance measurements accurately, the cable length between DUT
and the ASU output must be as short as possible.
Keysight E5260/E5270 User's Guide, Edition 6
Installation
Installing Accessories
3-21
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