Resolution; Temperature Coefficient; Sensitivity; Minimum Detectable Partial Pressure - Inficon Transpector MPH Operating Manual

11.5 Resolution

MPH100F

11.6 Temperature Coefficient

MPH100F

11.7 Sensitivity

FC

11.8 Minimum Detectable Partial Pressure

FC
EM
11.9 Zero Blast Interference at Mass 2
MPH100F
Peak Width (AMU) at 10% of peak height
MPH100M
During an eight hour period, after thirty minutes of warm up
MPH100M
For FC Only—Less than 1% of peak height per °C
MPH100F MPH100M
-4 -4
6x10 6x10
-4 -4
[4.5x10 ] [4.5x10 ]
-6 -6
(4.5x10 ) (4.5x10 )
MPH100F MPH100M
-13
3x10 N/A
-13
[4x10 ]
-11
(4x10 )
-15
N/A 2x10
-15
[2.7x10 ]
-13
(2.6x10 )
MPH100M
<5 ppm
MPH200F MPH200M
0.9 AMU
MPH200F MPH200M
Amps/Torr [mbar] (Pa)
MPH200F MPH200M
-4
5x10 5x10
-4
[3.8x10 ] [3.8x10
-6
(3.7x10 ) (3.7x10
Torr [mbar] (Pa)
MPH200F MPH200M
-13
4x10 N/A
-13
[5.3x10 ]
-11
(5.3x10 )
N/A 3x10
[4x10
(5.3x10
ppm
MPH200F MPH200M
<65 ppm
Transpector MPH Operating Manual
MPH300F MPH300M
MPH300F MPH300M
MPH300F MPH300M
-4 -4
4x10
-4 -5
] [3x10 ]
-6 -6
) (3x10 )
MPH300F MPH300M
-13
5x10
-13
[6.7x10 ]
-11
(6.6x10 )
-15
N/A
-15
] [5.3x10
-13
) (5.3x10
MPH300F MPH300M
<100 ppm
-4
4x10
-5
[3x10 ]
-6
(3x10 )
N/A
-15
4x10
-15
]
-13
)
11 - 2