General Description Of The Transpector Mph; Gas Analysis System; Specifications For The Transpector Mph Gas Analysis System; Supplied Items - Inficon Transpector MPH Operating Manual

1.6 General Description of the Transpector MPH

Gas Analysis System

The Transpector MPH Gas Analysis System is comprised of three parts:
Sensor
The sensor functions only in a high-vacuum environment with pressures below
5 x 10
The sensor itself is comprised of three components:



The sensor is mounted on an electrical feedthrough flange, which is bolted to
the vacuum space where the gas analysis measurements are made.
Electronics Module
The electronics module controls the sensor and communicates to the operating
computer. The electronics module and sensor are sold in sets.
The electronics module attaches to and is supported by the sensor.
Software
The software controls the electronics module and displays the data
from the sensor.

1.7 Specifications for the Transpector MPH Gas Analysis System

See Chapter 11

1.8 Supplied Items

See Chapter 12
Gas Analysis System.
1 - 5
-4 -4
Torr (6.7 x 10 mbar) [6.7 x 10
the ion source (ionizer)
the quadrupole mass filter
the ion detector
for the Transpector MPH Gas Analysis System specifications.
for items that are packaged with a Transpector MPH
Transpector MPH Operating Manual
-2
Pascals].