Inficon Transpector MPH Operating Manual page 120

4
Carefully remove the new filament assembly from its packaging and place it on
the ion source standoffs.
5
Replace the three washers and locknuts, and ensure that the anode (C) aligns
with the mating bore (D).
Figure 6-5 Align anode to mating bore
6 - 8
CAUTION
The new filament assembly must be carefully placed onto
the ion source. Excessive horizontal movement will
cause the damage to the anode.
C
Transpector MPH Operating Manual
D