Inficon Transpector SPS Operating Manual
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Inficon Transpector SPS Operating Manual

Gas analysis system
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Transpector SPS
Gas Analysis System
PN 074-691-P1A

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Summary of Contents for Inficon Transpector SPS

  • Page 1 Cover Page ® Transpector SPS Gas Analysis System PN 074-691-P1A...
  • Page 2 All other brand and product names are trademarks or registered trademarks of their respective companies. Disclaimer The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
  • Page 3 Declaration Of Conformity Page 1...
  • Page 4 Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer. This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.

  • Page 5: Table Of Contents

    Purpose of Transpector SPS ........
  • Page 6 Transpector SPS Operating Manual 1.10.3 Moisture Content of Compressed Air Supply ..... . . 1-10 1.10.4 Air Pressure Connections........1-10 1.11...
  • Page 7 Connecting Transpector SPS ........3-6...
  • Page 8 Transpector SPS Operating Manual 4.6.1 Achieving Good Base Pressure in the SPS ......4-10 Chapter 5 Theory and Application Guide Theory of Operation .
  • Page 9 Transpector SPS Operating Manual 6.3.1.1 Foreline Pirani Gauge......... . 6-6 6.3.2...
  • Page 10 Introduction..........10-1 10.3 Connecting to Transpector SPS....... . . 10-2 10.4 RGA Configuration—SPS Tab.
  • Page 11 Transpector SPS Operating Manual 10.6.2.2.5 Relay 1 ........... 10-18 10.6.2.3...

  • Page 12: Getting Started

    Transpector SPS Operating Manual Chapter 1 Getting Started 1.1 General Safety Information WARNING Transpector SPS is not for use in a manner not specified by INFICON. WARNING - Risk Of Electric Shock There are no user serviceable components within the Transpector SPS case.

  • Page 13: Purpose Of Transpector Sps

    1.3 Purpose of Transpector SPS Transpector SPS samples a representative fraction of a process environment and directs the gas sample to a Residual Gas Analyzer (RGA). Transpector SPS can detect levels of impurities in process gases at sub-ppm levels. 1.3.1 Description of the Transpector SPS Transpector SPS is comprised of: ®...

  • Page 14: How To Contact Inficon

    Authorization (RMA) number must be obtained from the Customer Support Representative. If a package is delivered to INFICON without an RMA number, the package will be held and customer contact will be made. This will result in delays in servicing Transpector SPS.

  • Page 15: Transpector Sps Performance Specifications

    Transpector SPS Operating Manual 1.5 Transpector SPS Performance Specifications 1.5.1 General Specifications Table 1-1 General specifications Mass Range (AMU) 1 – 100 1 – 200 1 – 300 Resolution <1 AMU wide @ 10% peak height over entire mass range...

  • Page 16: Orifice Sampling Inlet

    Transpector SPS Operating Manual 1.5.2 Orifice Sampling Inlet Table 1-2 Available inlets and orifices 3 mTorr (no orifice) 10 mTorr 15 mTorr 100 mTorr 360 mTorr 1 Torr (bypass) 3 Torr (bypass) 10 Torr (bypass) 30 Torr (bypass) 1.5.3 Atmospheric Pressure (Capillary) Sampling...

  • Page 17: Physical Requirements

    Transpector SPS Operating Manual 1.6 Physical Requirements 1.6.1 Physical Dimensions Figure 1-1 Pumping system dimensions 607 mm (23.9 in.) 152 mm (6.0 in.) Pumping System dimensions 588.7 x 152 x 383 mm (23.18 x 6.0 x 15.08 in.) when configured with CDG and...

  • Page 18: Weight

    Transpector electronics module, the Transpector SPS heater and the pumping system. If enclosing Transpector SPS, the enclosure must be large enough or ventilated to provide adequate cooling airflow to the fan on the Transpector SPS pumping system and the fan in the Transpector SPS controller.

  • Page 19: Fuse Rating

    The corrosive service turbo molecular pump requires 10 to 25 sccm nitrogen purge gas flow through its bearings to protect the bearings from corrosion and loss of lubricant by evaporation. The Transpector SPS nitrogen regulator range is 10–15 psi (gauge). It is set for 10 sccm flow at the factory.

  • Page 20: Exhaust Gas

    Transpector SPS Operating Manual Figure 1-2 Compressed air supply connection Dry Compressed Air 58–100 psi (gauge) Recommended Setting is 75-80 psi (gauge) Dry nitrogen 58–100 psi (gauge) Bearing Purge Corrosive System Only The pressure range is 58–100 psi (gauge) (4–6.9 bar) [400–690 kPa].

  • Page 21: Air Pressure Requirements

    Moisture condensation can cause corrosion. 1.10.4 Air Pressure Connections The compressed air supply connects to the Transpector SPS solenoid with 6.35 mm (1/4 in.) polymer hose. The 6.35 mm (1/4 in.) connector is a friction-lock, right-angle fitting to adapt the supply hose to the solenoid base.

  • Page 22: Vacuum Requirements

    CAUTION Do not exceed 10 Torr (13 mbar) foreline pump pressure. 1.11.2 Acceptable Range Of Vacuum The Transpector SPS manifold can achieve <1x10 Torr (1.33x10 mbar) of base pressure (no sample flow) after bakeout and cool down. This level of vacuum requires a foreline pressure of <10 Torr (13 mbar).

  • Page 23: Clean Room Requirements

    Transpector SPS Operating Manual 1.12.7 Clean Room Requirements The Transpector SPS is clean room compatible (including silicone rubber heater). 1.12.8 Anti-Static Conditions Transpector SPS passes standard EN 61326-1:2013. 1.13 Computer System Requirements The minimum system requirements for FabGuard Explorer Operating Software are...

  • Page 24: Installation

    Chapter 2 Installation 2.1 Installation Overview The Transpector SPS system is partially disassembled for shipping and must be re-assembled prior to operation. The Transpector sensor is shipped inside the Transpector SPS manifold tee, but the remaining components such as the...

  • Page 25: Attach Heat Guard

    Transpector SPS Operating Manual Note the recessed area on the sensor feedthrough and the ground tab on the Transpector electronics module. Match the recessed area of the feedthrough to the ground tab and carefully slide the Transpector electronics module fully onto the sensor.

  • Page 26: Attach Cable Box

    Transpector SPS Operating Manual Figure 2-2 Heat Guard and Calibration Reference Bracket Calibration Reference Mounting Nut Calibration Reference Standard Bracket Shipping Bracket Heat Guard Transpector Electronics Module WARNING - High Temperature Metal surfaces will be hot when heating jacket is on.

  • Page 27: Pumping System Cover Installation

    Transpector SPS Operating Manual Figure 2-3 Transpector electronics module and cable box Screw Holes Extended I/O Aux I/O Transpector 24V Input Ethernet Connection WARNING - Risk Of Electric Shock DO NOT remove the cover from the Transpector 24 V input. 24 V is supplied to the Transpector electronics box from the controller.

  • Page 28: Install The Cover On Sps Housing

    090-019 090-045 070-1136 2.3.2 Install the Cover on Transpector SPS Housing Place the cover on both sides of the system. Place T-Nut M6 THD 8MM T-SLOT SS (070-1136) in the trench on both sides of the foreline block. Use screw M6 x 10mm LG SOC HD CAP (144-111) to attach cover to each T-Nut in the Transpector SPS foreline block.

  • Page 29: Sniffer Installation

    (6.35 mm) nut and vespel ferrule supplied with the sniffer. 2.5 Mounting the Pumping System The Transpector SPS system typically mounts directly to a process chamber via the CF or KF process connection at the end of the Hexblock inlet. Normally there is no need to use an additional isolation valve between the Hexblock and the process chamber.

  • Page 30: Installing The Support Kit

    Transpector SPS Operating Manual If an isolation valve is needed and the Transpector SPS does not have a CDG interlock for the Hexblock inlet, it is essential to pump down the volume between the Hexblock and isolation valve from the process side before the Transpector SPS is turned on.
  • Page 31 Transpector SPS Operating Manual Figure 2-4 Adjusting leg position Unscrew the adjustable foot until it supports Transpector SPS and relieves pressure from the flange. Tighten the lock nut on the adjustable foot against the support leg. 2 – 8...

  • Page 32: Atmospheric Support Frame

    Transpector SPS Operating Manual 2.5.2 Atmospheric Support Frame Atmospheric Transpector SPS systems do not need the standard support legs. An atmospheric system is mounted to a support frame, which also houses the Controller. (See Figure 2-5.) Figure 2-5 Transpector SPS configured with support frame for atmospheric sampling...

  • Page 33: Sps Controller Installation

    Cable connections on the Controller are:  Cable bundle that includes the Transpector SPS interface cable (connects to the cable box on the back of the Transpector electronics module), heater cable, and ground strap ...

  • Page 34: Transpector Cable Box Connections

    Transpector SPS Operating Manual 2.7 Transpector Cable Box Connections The cable box mounted on the back of the Transpector electronics module makes cable connections to most of the subcomponents of the Transpector SPS System. (See Figure 2-7. Cable connections for the entire Transpector SPS system are...
  • Page 35 Transpector SPS Operating Manual Figure 2-8 Transpector SPS cable connections CABLE BOX (BOTTOM VIEW) SPS SENSOR TRANSPECTOR SPS HEATER JACKET INLET 600-1474-P1 600-1475-P1 TURBO PRESSURE ETHERNET MOLECULAR SWITCH PUMP VALVE BLOCK 600-1476-P1 FORELINE BLOCK 600-1473-P1 1 m, 3 m, 5 m or 10 m...

  • Page 36: Sps Foreline Pump Installation

    Transpector SPS Operating Manual 2.8 Transpector SPS Foreline Pump Installation The 24 V (dc) dry foreline pump has the following connections:  Electrical connection to the Controller  Foreline hose connection from the UHV turbo molecular pump foreline block ...

  • Page 37: Connecting Transpector Sps

    IP address, which will result in a loss of communication and loss of data. Transpector SPS follows the IPv4 IP address convention. An example IP address 192.168.1.100 . Each of the four parts is referred to as an “octet.” The IP address consists of a Network Prefix and a Host Protocol.

  • Page 38: Subnetworking

    NOTE: When connecting to an existing local network, there must be a static IP address for each Transpector RGA. Contact the network administrator for IP address assignments. Two methods of changing the Transpector SPS IP address are available.  INFICON Mass Spectrometer Search Utility. (See section 3.3.1.)

  • Page 39: Using The Inficon Mass Spectrometer Search Utility To Change The Transpector Sps Ip Address

    3.3.1 Using the INFICON Mass Spectrometer Search Utility to Change the Transpector SPS IP Address The INFICON Mass Spectrometer Search Utility (IMSSU) is located on the software installation disk and the RGA Manuals CD. The IMSSU does not need to be installed.

  • Page 40: Change Ip Address

    Transpector SPS MAC Address  Transpector SPS IP address  Change To text box, to enter a new Transpector SPS IP address  DHCP On or DHCP Off selection CAUTION Set DHCP Off so the IP address cannot be automatically assigned.

  • Page 41: Launch Web Ui

    Transpector SPS Operating Manual 3.3.1.2 Launch Web UI Transpector Web UI can be launched from inside of the IMSSU. (Refer to the 074-581-P1 Transpector Web UI Operating Manual.) 3.3.1.3 Find Device Find Device On will flash the power indicator on the device. The indicator will flash for up to 60 seconds and then illuminate.

  • Page 42: Connecting Transpector Sps

    When installing a single Transpector SPS on a private network or directly connected to a computer, changing the IP address of Transpector SPS is necessary only if the computer being used to connect to Transpector SPS has a different network prefix than Transpector SPS.

  • Page 43: Installing Multiple Transpector Sps Sensors

    Each Transpector SPS is shipped with an identical default IP address. When installing multiple Transpector SPS, the IP address of each Transpector SPS must be changed one at a time so that each Transpector SPS has a unique IP address. (Refer to section 3.3.1, Using the INFICON Mass Spectrometer Search Utility to...

  • Page 44: Changing The Computer Ip Address

    Transpector SPS Operating Manual 3.5 Changing the Computer IP Address An alternative to changing the Transpector SPS IP address is to change the host computer’s IP address to allow for communication between the host computer and Transpector SPS. 3.5.1 Windows 7 NOTE: Changing the IP address of the host computer requires administrator rights.
  • Page 45 On the network status and tasks window, click Change adapter settings. (See Figure 3-6.) Figure 3-6 Change adapter settings If the host computer is connected directly to Transpector SPS through the Ethernet port of the computer, right-click Local Area Connection and select Properties. (See Figure 3-7.) Figure 3-7 Changing adapter settings 3 –...
  • Page 46 Transpector SPS Operating Manual Click Internet Protocol Version 4 (TCP/IPv4). Click Properties. (See Figure 3-8.) Figure 3-8 TCP/IPv4 On the TCP/IPv4 properties window, click Use the following IP address. (See Figure 3-9.) Figure 3-9 Use the following IP address 3 – 10...
  • Page 47 Transpector SPS Operating Manual In IP address, type 192.168.1.XXX . The last octet can be any number as long as it is unique to the network and is not the same as the Transpector SPS IP address. (See Figure 3-10.) In Subnet mask, type 2 55.255.0.0...

  • Page 48: How The Sps System Works

    Chapter 4 How the Transpector SPS System Works 4.1 Transpector SPS Components A fully configured Transpector SPS corrosive pumping system is illustrated in Figure 4-1. (The Controller and foreline diaphragm pump are not shown.) Figure 4-1 Transpector SPS pumping system components 1 .

  • Page 49: Theory Of Operation

    Chemical Vapor Deposition (CVD), etch, vacuum furnace analysis, and laser gas analysis. Transpector SPS pressure is the pressure inside the closed ion source (CIS). The nominal operating pressure inside the closed ion source is approximately 2E-4 Torr. Since the conductance between the closed source and the sensor manifold is 0.7 L/s and given the effective pumping achieved using the turbo...

  • Page 50: Sps Aux I/O Connector

    Transpector SPS Operating Manual 4.3.1.1 Transpector SPS Aux I/O Connector User I/O is through a 15 pin DSUB connector on the cable box attached to the back of the Transpector electronics module. (See Figure 2-8 on page 2-12.) A mating DB15 Male connector is supplied in the ship kit for connecting to the Transpector SPS Aux I/O connections.

  • Page 51: One Analog Input

    PIN 9 ANALOG INPUT 1 PIN 10 NOTE: The analog input is supported through FabGuard software. Figure 4-2 Transpector SPS Aux I/O pinout diagram 4.3.2 Ultra-High Vacuum System The vacuum system provides low pressure to:  establish a sample flow from the process by pressure difference.

  • Page 52: Foreline Subsystem

    (50°C), and will cause burns if touched. 4.3.4 Transpector SPS Controller Subsystem The controller contains all of the AC components, the AC-DC converter which supplies the +24 V (dc) for the Transpector, the foreline pump, the turbo molecular pump controller, and valve solenoids.

  • Page 53: Solenoid Valves

    Transpector SPS Operating Manual 4.3.5 Solenoid Valves The solenoid-controlled valves are a group of valves joined together as one manifold assembly which is mounted to a bracket on the turbo molecular pump foreline block. The valves are controlled by the Valves Aux I/O connector.

  • Page 54: Sensor And Transpector Electronics Module Subsystem

    (Torr) x 0.7 (L/s) = 1.4x10 (T-L/s) = the pressure at the CIS ion source within the Transpector SPS tee region = the pumping speed of the closed ion source = throughput of the CIS ion source This flow rate produced by process gas flowing through the process gas orifice is:...

  • Page 55: Sample Inlet Systems And Examples Of Use

    Transpector SPS Operating Manual measurement of the base pressure of the process chamber (for leak detection and base vacuum analysis) with a high conductance port and two orifices for process pressures. Various inlet systems are described with their typical use in section 4.5.

  • Page 56: High Pressure Sampling: Orifice Bypass (V4)

    Transpector SPS Operating Manual Figure 4-4 Pressure Ranges for Sampling for Transpector SPS Inlet Orifices and Sniffers (some orifices shown may not be available) 4.5.2 High Pressure Sampling: Orifice Bypass When process pressures exceed 10 Torr, the process gas is dense enough that the gas molecules collide with each other more often than with the walls of the sampling system.

  • Page 57: Advice And Tips

    4.6 Advice and Tips 4.6.1 Achieving Good Base Pressure in the Transpector SPS The Transpector SPS vacuum manifold must be baked out after initial installation or whenever the RGA sensor is exposed to air. After an eight hour bakeout and cool ...

  • Page 58: Theory And Application Guide

    Transpector SPS detects levels of impurities in process gases that are significantly lower—at sub-ppm levels for many components—than those detected by open-ion source RGA analyzers.

  • Page 59: The Ion Source

    Inside the closed ion source, a heated filament emits electrons which bombard the incoming gas molecules giving them an electrical charge. While this charge may be either positive or negative, Transpector SPS detects only positive ions. Once a molecule is charged (ionized), electric fields can be used to manipulate the molecule.
  • Page 60 Transpector SPS Operating Manual The term emission current refers to the stream of electrons emitted by the filament. Emission current is controlled by the temperature of the filament. The filament is centered over a hole in the anode cylinder. The potential (voltage) on the anode is positive with respect to the filament.

  • Page 61: The Quadrupole Mass Filter

    Transpector SPS Operating Manual 5.2.2 The Quadrupole Mass Filter The ions produced in the ion source are injected into the mass filter, which rejects all ions except those with a specific mass-to-charge ratio. Most ions contain only one unit of charge. The mass filter is a quadrupole, to which is applied a combination of RF and DC potentials.
  • Page 62 Transpector SPS Operating Manual The following equations summarize the potentials applied to the rods:   2ft    2ft – = RF amplitude = RF frequency = time = DC potential = pole zero. The RF component removes the low-mass ions from the beam. Ions of sufficiently low mass have their motions remain in phase with the applied RF.

  • Page 63: Scanning Characteristics

    Transpector SPS Operating Manual The mass of ions transmitted (M) is directly proportional to the RF amplitude (provided f is constant). As the RF amplitude is increased, progressively higher mass ions will be made to oscillate in phase with the RF field and thus gain sufficient energy to strike the poles.

  • Page 64: The Zero Blast

    Transpector SPS Operating Manual 5.2.2.2 The Zero Blast When the RGA scans over the very low end of the mass spectrum, the RF and DC voltages applied to the rods approach zero. The quadrupole then ceases to act as a filter and a large current of unseparated ions is detected, called the zero blast.

  • Page 65: The Ion Detector

    Transpector SPS Operating Manual 5.2.3 The Ion Detector The ion detector region of the sensor consists of the quadrupole exit lens, the electron multiplier and the detector itself. The quadrupole exit aperture is biased negatively with respect to the anode, focusing ions that have been transmitted through the quadrupole into the electron multiplier and detector.

  • Page 66: The Continuous Dynode Electron Multiplier/Faraday Cup Detector

    The CDEM/FC detector is operated at high voltages between -0.6 and -2.0 kV. A new CDEM/FC detector will typically have a gain between 10 and 1,000 at -0.8 kV. The gain at -3.0 kV typically exceeds 1 x 10 . The Transpector SPS default EM voltage is -0.8 kV. 5 – 9...
  • Page 67 Transpector SPS Operating Manual CAUTION Do not operate the CDEM/FC detector at temperatures above 150°C. Permanent damage may result. CAUTION Avoid output currents in excess of 1 x 10 amps. Either decrease the high voltage or decrease the pressure. Use the minimum CDEM/FC detector voltage required to obtain the necessary peak amplitudes and/or signal-to-noise ratio.

  • Page 68: How To Interpret The Result

    For a discussion of how the Transpector produces its measurements, see Chapter 4, How the Transpector SPS System Works. 5.3.1 Qualitative Interpretation Of Mass Spectra The graphical output of a partial pressure analyzer is a mass spectrum. A mass spectrum is a pattern of peaks on a plot of ion intensity as a function of ion mass-to-charge ratio.
  • Page 69 Transpector SPS Operating Manual Figure 5-6 Air mass spectrum 5 – 12...

  • Page 70: Ionization Process

    Transpector SPS Operating Manual 5.3.1.1 Ionization Process When a sufficiently energetic electron strikes a gas molecule, there are many processes that can occur, some of which are summarized in Table 5-1. Table 5-1 Electron Impact Ionization Processes  XYZ + e...
  • Page 71 Transpector SPS Operating Manual Figure 5-7 A nitrogen fragmentation pattern This nitrogen fragmentation pattern shows (14 AMU), (28 AMU), and (29 AMU). In general, peaks from multiple charged species will be less intense than those for the corresponding singly charged ion. For example, the doubly charged peak for argon is typically less than one fifth as intense as the singly charged peak (this intensity ratio is sensitive to the incident electron energy).

  • Page 72: Isotope Ratios

    Transpector SPS Operating Manual 5.3.1.2 Isotope Ratios An additional cause of multiple peaks in the mass spectrum of a pure substance is that most elements are comprised of more than one isotope. For example, 99.63% of all nitrogen atoms in nature have a mass of 14 AMU; only 0.37% have a mass of 15 AMU.
  • Page 73 Transpector SPS Operating Manual Table 5-2 Isotope ratios (continued) Isotope Ratios Element Mass No. Relative Abundance 99.759 0.0374 0.2039 100.0 90.92 0.257 8.82 100.0 100.0 92.27 4.68 3.05 100.0 95.06 0.74 4.18 0.016 75.4 24.6 0.337 0.063 99.600 5 – 16...

  • Page 74: Electron Energy Effects

    Transpector SPS Operating Manual 5.3.1.3 Electron Energy Effects The exact fragmentation pattern will depend on the energy of the bombarding electrons. Figure 5-8 graphs the number of argon ions (of different charge states) produced per incident electron per Torr of gas pressure as a function of electron energy.
  • Page 75 Transpector SPS Operating Manual in argon, as is often desired when monitoring a PVD process. Normally, water vapor is monitored at 18 AMU (H ). Overlap from the doubly charged argon isotope also shows up at mass-to-charge ratio 18 (most mass filters, including quadrupoles, are really mass-to-charge ratio filters and not true mass filters).

  • Page 76: A Qualitative Interpretation Guide

    70 eV, with reduced electron emission (200 μA, max.). When monitoring PVD processes, the Transpector SPS should be operated at 40 eV with an electron emission current of 200 μA to reduce power to the filament. The software has the capability to switch the Transpector SPS between 70 eV, 2.0 mA (CIS high) for...
  • Page 77 Transpector SPS Operating Manual Table 5-4 Spectrum interpretation guide AMU # Chemical Symbol Sources water F or hydrogen F hydrogen, deuterium ( hydrogen-deuterium, tritium ( helium No known elements Doubly Ionized C (Rare) N (Rare) O (Rare) No known elements...
  • Page 78 Transpector SPS Operating Manual Table 5-4 Spectrum interpretation guide (continued) AMU # Chemical Symbol Sources ethane F or ethanol F or isopropyl alcohol , NO ethane P, nitric oxide P, CH phosphorus, methanol F, oxygen, sulfur, methanol P hydrogen sulfide F...

  • Page 79: Dry Etching Chemistries

    Transpector SPS Operating Manual 5.3.1.5 Dry Etching Chemistries Table 5-5 lists materials to be etched, the typical chemistries used, the chemical species that are important, and a list of masses used to monitor each specie. Many different chemistries exist for etching any given film. Only a few of the more...
  • Page 80 Transpector SPS Operating Manual Table 5-5 Dry etching chemistries (continued) Etched Typical Important Monitored Material Reagents Species Masses W (and alloys) 127, 89, 108 279, 281 18, 17 32, 16 28, 14 257, 259 (TiN liner) 86, 67, 105, 48...

  • Page 81: Tungsten Cvd

    Transpector SPS Operating Manual Table 5-5 Dry etching chemistries (continued) Etched Typical Important Monitored Material Reagents Species Masses 69, 50, 31 32, 16 85, 66, 47 52, 33, 71 18, 17 47, 66 28, 14 28, 12 Poly-Si 81, 83, 116, 118, 46, 48...

  • Page 82: Copper Mocvd

    Transpector SPS Operating Manual Table 5-6 Tungsten CVD materials of interest Chemical Type Monitoring Mass reagent reagent reagent 30, 31, 32 reagent reagent (interference from SiH4) product 20 (at 35 eV) contaminant (interference from SiH4) contaminant 18 (at 35 eV) by-product 5.3.1.7 Copper MOCVD...

  • Page 83: Quantitative Interpretation Of Mass Spectra

    Transpector SPS Operating Manual 5.3.2 Quantitative Interpretation of Mass Spectra (Calculating Partial Pressures) Partial pressure is defined as the pressure of a designated component in a gas mixture. By Dalton’s Law, the sum of all the partial pressures is the total pressure.
  • Page 84 Transpector SPS Operating Manual Fragmentation factors can be calculated from fragmentation patterns given in the general references cited in Chapter 12, Bibliography. Other valuable references include the Index of Mass Spectral Data from ASTM, and EPA/NIH Mass Spectral Data Base by Heller and Milne and an extensive library of spectra is available from the National Institute of Standards and Technology.
  • Page 85 Transpector SPS Operating Manual Table 5-8 Typical fragmentation factors for the major peaks of some common substances (at 70eV electron energy) Mass Mass Mass acetone: (CH helium: He oxygen: O 1.00 hydrogen: H 1.00 toulene: C argon: Ar krypton: Kr...
  • Page 86 Transpector SPS Operating Manual Ionization probability factors can be approximated by substituting the relative ion gauge sensitivities for various gases. Table 5-9 lists relative ion gauge sensitivities for some common gases. NOTE: Table 5-9 lists relative ionization gauge sensitivities for selected molecules.
  • Page 87 Transpector SPS Operating Manual Table 5-9 Ionization Probabilities For Some Common Substances (continued) Substance Formula Relative Substance Formula Relative Ionization Ionization Gauge Gauge Sensitivity Sensitivity cyclohexane propane deuterium 0.35 silver perchlorate AgClO dichlorodifluormethane stannic iodide dichloromethane sulfur dioxide dintrobenzene sulfur hexafluoride...
  • Page 88 Transpector SPS Operating Manual The overall relation between partial pressure and ion current, given in equation [8], is quite general. The constants for this equation can be obtained from various tables, but for the best accuracy, they should be measured for each instrument.

  • Page 89: Additional Information For Interpreting Mass Spectra

    Transpector SPS Operating Manual 5.3.3 Additional Information For Interpreting Mass Spectra 5.3.3.1 Ion Source Characteristics A closed ion source, and the particular inlet system selected, can have an effect on the mass spectrum obtained. The analyzer itself is a source of gas molecules because of outgassing from its surfaces.

  • Page 90: Scanning Characteristics

    Transpector SPS Operating Manual remain even after the fluorine containing substance has been removed. When operating in the UHV region, ESD/EID of H , and CO (and other ions) is not uncommon. The clue to diagnosing this problem is that the observed fragmentation patterns do not match known gas phase patterns.

  • Page 91: Operation

    (capillary) inlet options for sampling the process The orifice mounted within the Single Inlet is replaceable. CAUTION The tool and the Transpector SPS must be vented before changing the orifice, except when a tool isolation valve is installed.

  • Page 92: Single Inlet Process Connections

    Transpector SPS Operating Manual The Calibration Valve refers to the option of adding a Calibration Reference to system. The Calibration Reference is located near the ion Transpector SPS source. NOTE: The Transpector emission and EM are turned off prior to opening Calibration Valve (V5).

  • Page 93: High Mass Fc5311 Tuning Reference

    The FC5311 Tuning Reference Gas option is available for adjusting peak position for 300 AMU Transpector SPS. It is controlled via a manual valve. FC5311 Tuning Reference Gas is a volatile liquid. It is located at the inlet of the high vacuum pump.

  • Page 94: Process Gauge (Cdg)

    Transpector SPS Operating Manual Table 6-3 Mix 2: FC5311 reference mass spectrum 70 eV, peak intensity ranging 1–100% Mass Intensity Mass Intensity 1.83 2.66 1.09 4.06 2.97 7.66 2.09 1.17 2.55 5.97 2.09 1.27 7.65 11.09 1.14 1.50 2.27 16.80 1.12...

  • Page 95: Heaters

    1000 Torr range 964-208-G14 6.2 Heater A Transpector SPS software interlock will turn on the heater only when the turbo molecular pump is at normal speed (72,000 RPM). There are two temperature settings: low (90°C); high (150°C). 6.3 Pumping System The pumping system is preconfigured at the factory.

  • Page 96: Foreline Pirani Gauge

    Transpector SPS Operating Manual 6.3.1.1 Foreline Pirani Gauge A Pirani gauge mounted to the Transpector SPS foreline block monitors the pressure in the foreline. In the event of a pumping system malfunction, the foreline Pirani gauge can be used to verify the foreline pressure is <10 Torr. For optimal pumping system performance, the foreline pressure should be <2.25 Torr.

  • Page 97: Turbo Molecular Pump Status

    72,000 RPM. 6.5.2 Total Pressure Calibration To protect the filament, Transpector SPS has a factory-calibrated total pressure lens that measures the total pressure in the closed ion source. The filament will turn off (within 50 ms) after the pressure in the ion source rises above the total pressure setpoint, typically 1E-3 Torr @ 40 eV 200 A for a CVD closed ion source.

  • Page 98: Filament Lifetime

    Process Table 6-5 lists the values for the exit conductance for CIS and for different orifices used in Transpector SPS sampling systems. Equation [1] can be used to infer the target gas pressure in the CIS that produces the total pressure measurement.
  • Page 99 At 1 Torr at the filament, the pressure inside the anode cylinder will be approximately five times higher (assuming the bulk of the gas load is entering the Transpector SPS manifold through the closed ion source). At 5 Torr, the collisional mean-free-path for ions will be less than 0.01 mm. The distance from the ion creation region to the total pressure collector electrode is about 4 mm, or approximately 400 mean-free-paths away.

  • Page 100: Pneumatic Digital Pressure Switch And Pressure Gauge

     ensure proper pressure for the Transpector SPS to function. If the pressure has decreased below 58 psi (3.999 bar) [399.9 kPa] or exceeds 100 psi (6.895 bar) [689.5 kPa], the Transpector SPS system will shut itself down...

  • Page 101: Setup Procedure

    Transpector SPS Operating Manual Figure 6-3 Location of pneumatic digital pressure switch and gauge Pneumatic Digital Pressure Switch and Gauge 6.6.1 Setup Procedure This setup procedure assumes:  no pressure is applied  psi is the pressure unit Figure 6-4 depicts the location of the display and controls.
  • Page 102 Press to display UnL (unlock). Press . The Transpector SPS will return to Measure Mode. Press and hold for 2 seconds. The display will show the current Pressure Unit. The default is psi. Change to the desired Pressure Unit by pressing...

  • Page 103: How To Test For Proper Settings

    In normal operating conditions, the display is red when the pressure is below 58 psi or above 100 psi. Interlocks ensure that the system will not be damaged by an air pressure failure and the Transpector SPS will shut itself safely down after ten seconds. 6 – 13...

  • Page 104: How To Lock And Unlock The Settings

    Transpector SPS Operating Manual 6.6.3 How to Lock and Unlock the Settings To lock the settings to protect them from accidental change. In Measurement Mode, press for five seconds. UnL (unlocked) is displayed. Press to change UnL to LoC. Press to return to Measurement Mode.

  • Page 105: Maintenance

    1.4, How to Contact INFICON, on page 1-3.) 7.2 Safety Considerations WARNING If Transpector SPS is used in a manner not specified by the manufacturer, the protection provided by Transpector SPS may be impaired. WARNING Transpector SPS maintenance should only be performed by qualified personnel.

  • Page 106: Toxic Material

    7.2.2 Radiation Transpector SPS does not produce harmful radiation. 7.2.3 Electrical Voltages Transpector SPS does not present electrical hazards when enclosed and grounded according to the specifications given in the installation instructions. WARNING - Risk Of Electric Shock The Transpector electronics and controller modules should never be operated with their covers removed.

  • Page 107: Maintenance Procedures

    7.3.2 Spare Heating Jacket INFICON offers a heating jackets to help in baking a sensor. This heating jacket  operate at a maximum temperature of 150 C. (Refer to section 1.4 on page...

  • Page 108: General Instructions For All Repair Procedures

    Transpector SPS Operating Manual 7.4 General Instructions For All Repair Procedures CAUTION Do servicing in a clean, well illuminated area. WARNING Obey all cautions and warnings. CAUTION Wear clean nylon, lint free lab gloves or finger cots. Do not touch the vacuum side of any component with unprotected fingers.

  • Page 109: Parts Required For Maintenance

    Transpector SPS Operating Manual 7.5.4 Parts Required For Maintenance  Filament kit Ion source kit   Diaphragm kit  VCR gaskets  Copper gaskets 7.6 Changing Diaphragms in the Foreline Pump 7.6.1 Replacement Interval The foreline pump diaphragm disks, valve seals, valve disks, and O-rings must be replaced every 8000 hours of operation.

  • Page 110: Procedure

    Transpector SPS Operating Manual 7.6.3 Procedure CAUTION Wear safety glasses and latex gloves during this procedure. Using two 9/16 in. open-end wrenches, remove the interstage tubing between the two pump heads. (See Figure 7-2.) Figure 7-2 Removing the interstage tubing...
  • Page 111 Transpector SPS Operating Manual Inspect the inside of the pump for cleanliness. A buildup of a black, powdery substance indicates bearing wear requiring pump replacement. The diaphragm disks are screwed into the cams. (See Figure 7-4.) Figure 7-4 Foreline pump cams...
  • Page 112 Transpector SPS Operating Manual Remove the foreline pump head cover and diaphragm plate. (See Figure 7-6.) Figure 7-6 Diaphragm and diaphragm plate Diaphragm Thin O-ring Diaphragm Plate Head Cover 7 – 8...
  • Page 113 Transpector SPS Operating Manual Separate the diaphragm plate from the head cover. (See Figure 7-7.) NOTE: Take note of the orientation of the valves in the head cover and diaphragm plate. They must be reassembled in exactly the same orientation.
  • Page 114 Transpector SPS Operating Manual Remove the old valve disks, valve seals and O-rings from both sides of the diaphragm plate. (See Figure 7-8.) Figure 7-8 Removed valve seals, valve disks, and O-rings Diaphragm Plate (Valve Side) Diaphragm Plate (Diaphragm Side) Clean both sides of the diaphragm plate and the foreline pump head cover with methanol and lint free wipes.
  • Page 115 Transpector SPS Operating Manual Rotate the diaphragm disk counterclockwise to unscrew the diaphragm disk from the cam. If necessary, carefully use a flat head screwdriver to pry up the diaphragm disk. (See Figure 7-9.) Figure 7-9 Unscrew diaphragm disk Rotate Counterclockwise 7 –...
  • Page 116 Transpector SPS Operating Manual There are spacers between the diaphragm disks and the cam. Note the position of the spacers when removing the diaphragm disks. The spacers must be reassembled on the new diaphragm disks in exactly the same position. (See Figure 7-10.)
  • Page 117 Transpector SPS Operating Manual Figure 7-11 Placing original spacers on new diaphragm Clean the channel that the diaphragm disk is seated in with methanol and lint free wipes. (See Figure 7-12.) Screw the diaphragm disk, with original spacers, into the cam screw hole. (See Figure 7-12.)
  • Page 118 Transpector SPS Operating Manual Figure 7-12 Installing the new diaphragm disk Clean Channel Cam Screw Hole Diaphragm Disk with Spacers Place the thin O-ring into the groove on the diaphragm side of the diaphragm plate. (See Figure 7-13.) Figure 7-13 Thin O-ring...

  • Page 119: Transpector Sensor Maintenance

    Sensors must be cleaned by qualified factory personnel only. Refer to section 1.4, How to Contact INFICON, on page 1-3 for assistance. Maintenance of the Transpector SPS sensor is limited to filament, ion source and electron multiplier replacement. 7 – 15...

  • Page 120: How To Determine If A Filament Kit Replacement Is Required

    Transpector SPS Operating Manual 7.7.1 How to Determine if a Filament Kit Replacement is Required Do these steps to determine if a filament replacement is required. Measure the resistance of the filament while the sensor is under vacuum by measuring the resistance between pins 3 and 10. (See Figure 7-16).

  • Page 121: Transpector Sensor Filament Replacement

    Transpector SPS Operating Manual Measure the resistance of each of the pins with respect to ground (pin 7 and 8). These measurements must be above 30 M. Measure the resistance of each of the pins with respect to each other. All of these measurements must be above 30 M, with the exception of the...
  • Page 122 Transpector SPS Operating Manual Remove three nuts and the washers holding the filament assembly in place. Be careful; do not to lose the two ceramic sealing disk wire hold downs. (See Figure 7-18.) Figure 7-18 Removing sensor filament assembly Nuts Carefully remove the filament assembly.

  • Page 123: Transpector Sensor Ion Source Replacement

    Transpector SPS Operating Manual Remove the three screws holding the filament assembly on the shipping fixture. Carefully remove the new filament from its fixture and place it on the ion source posts. Replace the three filament assembly nuts and washers. Be sure to install the wire hold downs.
  • Page 124 Transpector SPS Operating Manual Pull the electrical leads away from the sensor. Remove the three ion source retaining screws around the bottom of the ion source assembly. (See Figure 7-21; one screw is not visible in the figure). They hold the ion source onto the quadrupole assembly.
  • Page 125 Transpector SPS Operating Manual The ion source can now be removed by lifting it off the quadrupole assembly. Install a new ion source by reversing the above steps. (See Figure 7-22.) Figure 7-22 Ion Source and quadrupole assembly Using an ohm meter, check that the filament is not shorted to ground or to any of the ion source plates and that the two filament leads show a filament resistance of approximately 1 at the feedthrough (approximately 0.5 ...

  • Page 126: Electron Multiplier Replacement

    Transpector SPS Operating Manual 7.7.4 Electron Multiplier Replacement NOTE: Refer to section 7.5.3, Tools for Replacing the Electron Multiplier, on page before continuing. Remove filament lead screw (A1), loosen filament lead screw (A2), and loosen the three screws (B) in the ion source lead connectors. Using the 1.5 x 50 mm hex driver, unscrew the screws (C) that secure the two RF leads.
  • Page 127 Transpector SPS Operating Manual Using the 2.0 x 75 mm hex driver, unscrew three screws (one is hidden in the figure) holding the sensor assembly to the feedthrough. Gently remove the sensor assembly from the feedthrough. (See Figure 7-24.) Figure 7-24 Removing the sensor assembly Screws 7 –...
  • Page 128 Transpector SPS Operating Manual Using the Phillips head screwdriver, remove the three gold screws (one is hidden in the figure) holding the EM assembly inside of the sensor assembly. (See Figure 7-25) Figure 7-25 Removing the screws holding the EM...
  • Page 129 Transpector SPS Operating Manual Remove the ceramic shield on the bottom of the old detector assembly. (See Figure 7-27.) Figure 7-27 Removing the ceramic shield Ceramic Shield Install the ceramic shield removed in step 6 onto the new Electron Multiplier assembly.
  • Page 130 When installing the sensor back into the feedthrough, ensure that the two pins on the bottom of the detector align with the two pins on the feedthrough. (See Figure 7-28.) Figure 7-28 Pin location Detector Pins Reverse steps 1-4 to reassemble the Transpector SPS sensor. 7 – 26...

  • Page 131: Diagnosing Problems

    Is Port 80 open on the host computer?  Is there an IP address conflict between the Transpector sensor and another network device? NOTE: Refer to Chapter 3, Connecting Transpector SPS for more information on communications problems. 8 – 1...

  • Page 132: Sps Symptom-Cause-Remedy Chart

    Transpector SPS Operating Manual 8.3 Transpector SPS Symptom—Cause—Remedy Chart Before proceeding, make sure that the insulation on all cables is intact. There must be no damage to the insulating material. If there is, replace the cable Table 8-1 Symptom—Cause—Remedy Chart...
  • Page 133 Transpector SPS Operating Manual Table 8-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY Process valve(s) do not Low air pressure Check air pressure open Leaks in air lines Listen/check for leaks Water vapor high in Exposure to air or water in...
  • Page 134 Transpector SPS Operating Manual Table 8-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY EMISSION error (Cold Defective sensor filament Check sensor with Ohm Start, Warm Start) open, or shorted meter Replace sensor or filament Electronics failure Return to INFICON for repair...
  • Page 135 Transpector SPS Operating Manual Table 8-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY Electron Multiplier error Defective sensor, EM Check sensor with Ohm shorted meter. See sensor pin-out diagram Fix or replace sensor EM just replaced Verify that EM is plugged...
  • Page 136 Transpector SPS Operating Manual Table 8-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY Mass filter error Bad tune file Retune RGA Contaminated quadrupole Return to INFICON for repair Ion source error Incorrect ion source Load original configuration settings file Ion source contaminated...
  • Page 137 Transpector SPS Operating Manual Table 8-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY Filament current error Insufficient vacuum Verify pressure is less than 5E-4 Torr at the ion source Filament broken Verify integrity of filament Filament shorted Verify that filament is not...
  • Page 138 Transpector SPS Operating Manual Table 8-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY Poor Sensor contaminated Degas sensor sensitivity Bake-out sensor Replace ion source Ion source pressure too low Increase process pressure, if possible Verify orifice is not blocked and replace orifice if...

  • Page 139: If You Cannot Resolve Your Problem

    Transpector SPS Operating Manual Table 8-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY High noise System grounding Verify that vacuum system level is grounded Electronics failure Return to INFICON for repair Transpector SPS Ensure Transpector SPS electronics module not electronics module is fully...

  • Page 140: Recommended Parts List

    Transpector SPS Operating Manual Chapter 9 Recommended Parts List 9.1 Ordering Information To contact INFICON order services regarding Transpector , please use the following contact information: INFICON, Inc. Two Technology Place East Syracuse, NY 13057 Tel: +315.434.1100 E-mail: reachus@inficon.com 9.2 Transpector SPS Consumable Parts The following consumable parts should be readily available.

  • Page 141: Preventative Maintenance Parts

    Transpector SPS Operating Manual 9.3 Preventative Maintenance Parts The following preventative maintenance kits should be readily available. Table 9-2 Preventative maintenance kits INFICON Part Number Description 923-712-G1 Spare Orifice Gaskets (pack of five) 923-710-G1 Orifice Replacement Tools 964-710-G1 SPS Tungsten Filament Kit...

  • Page 142: Fabguard Explorer Operation

    NOTE: Additional information concerning FabGuard Explorer is located in the FabGuard Explorer Operating Manual, PN 074-528-P1. This chapter assumes that the Transpector SPS Gas Analysis System is properly installed by INFICON personnel, and FabGuard Explorer software is installed and running on the computer intended to control the Transpector SPS Gas Analysis System.

  • Page 143: Connecting To Transpector Sps

    Transpector SPS Operating Manual 10.3 Connecting to Transpector SPS Click Start and select FabGuard Explorer. When FabGuard Explorer is opened for the first time, the message shown in Figure 10-1 will display. Figure 10-1 Transpector connection prompt Click Yes. The Connection Type message is displayed. Select MP RGA HTTP as the connection type and Click OK.
  • Page 144 NOTE: Transpector MP sensors ship with a default IP address of 192.168.1.100 and a default Port of . If this IP address is not compatible with your network, the IP address can be changed using the INFICON Mass Spectrometer Search Utility. Click Add OK. 10 – 3...

  • Page 145: Valves And Orifices Pane

    (PN 074-528-P1). 10.4.1 Valves and Orifices Pane The orifice in the inlet system is replaceable. Transpector SPS is set up in the factory with the correct orifice value. However, if an orifice is changed, the new configuration must be entered in the RGA Configuration.

  • Page 146: Sps Configuration Monitor

    Data acquisition parameters can be changed and the effect of the change is displayed. NOTE: The Transpector SPS Configuration Monitor window is different from the open ion source instruments’ Sensor window because of the pumping and inlet systems on the Transpector SPS.
  • Page 147 Bake out the Transpector SPS. Click Start Timed Bakeout. Select a bakeout time. A normal bakeout is eight hours. Click Configure to change Transpector SPS Hardware Configuration settings if desired. Click Emission. The sensor filament is off the first time Configuration Monitor is run.
  • Page 148 Choose which (if any) inlets to open to monitor the sensor configuration.  Do not open an inlet when monitoring the residual gas inside of the Transpector SPS to obtain a background scan of the Transpector SPS sensor.  The illustration in the bottom pane of the Configuration Monitor window is representative of the Transpector SPS.

  • Page 149: Sps Sensor Acquisition Defaults

    10.6 Transpector SPS Sensor Acquisition Defaults 10.6.1 What to Acquire (RGAs) The What to Acquire parameters decide the data that the Transpector SPS will collect. This menu is very similar for both Transpector SPS and Open Ion Source RGAs. 10.6.1.1 Acquisition Modes There are two different acquisition modes: Spectrum (Scans) and Selected Masses (Bins).
  • Page 150 Transpector SPS Operating Manual Figure 10-13 What to Acquire—Spectrum Selected Masses (Bins) mode allows data collection of specific masses. Figure 10-14 What to Acquire—Selected Masses 10 – 9...

  • Page 151: Spectrum Mode Acquisition Parameters

    Transpector SPS Operating Manual 10.6.1.1.1 Spectrum Mode Acquisition Parameters Figure 10-15 Spectrum mode acquisition parameters Start Mass (amu) ....The amu at which the RGA will begin scanning.

  • Page 152: Selected Masses Mode

    Transpector SPS Operating Manual 10.6.1.2 Selected Masses Mode It is possible to define specific masses of interest in Selected Masses Mode. Transpector SPS advanced sensor functions can be tracked as individual bins in this data acquisition mode. (See Figure 10-16.) Figure 10-16 Selected masses mode 10 –...

  • Page 153: Existing Masses

    Transpector SPS Operating Manual 10.6.1.2.1 Existing Masses Editing Masses If a mass has already been added but the mass has the wrong identity for the process, click Edit to open the Mass Properties window and change the identity. (See Figure 10-17.)

  • Page 154: Adding Masses

    Transpector SPS Operating Manual Figure 10-18 Editing special bins not allowed Removing Masses Click Remove to remove an individual mass. (See Figure 10-19.) Click Remove All to remove all of the masses. (See Figure 10-20.) Figure 10-19 Remove Figure 10-20 Remove All 10.6.1.2.2 Adding Masses...
  • Page 155 Transpector SPS Operating Manual Add Mass Adds a mass to monitor by identifying a specific mass in amu, either defining it manually or using the auto select function to name the mass. After entering the mass value in the Mass: box and selecting the Identity, click Add.
  • Page 156 Transpector SPS Operating Manual Add Masses from Chemistry Library Allows the selection of peaks based on chemicals that are present in a process. A compound is selected to monitor. The mass spectrum for the specific compound will be displayed in the graph. After clicking Add, the masses in the spectrum will be added to the active bin list.

  • Page 157: How To Acquire (Sps)

    Transpector SPS Operating Manual 10.6.2 How to Acquire (SPS) The How to Acquire menu for the SPS (see Figure 10-26) is similar to the Open Ion Source RGAs. However, there are a number of differences due to the additional valve assembly and pumping system of the SPS.

  • Page 158: Ionizer Presets

    Transpector SPS Operating Manual 10.6.2.1 Ionizer Presets Determines the ionization energy with which the sensor collects data. Figure 10-27 Ionizer presets  Low selects the sensor’s low ionization energy for the run.  High selects the sensor’s high ionization energy for the run.

  • Page 159: Data Threshold

    Transpector SPS Operating Manual 10.6.2.2.2 Data Threshold Defines the threshold that the Start Mode Type utilizes to determine when the run will start. The Data Threshold is set in units corresponding to the Start Mode Type selected. Maximum Signal is in units of current, Pressure Above/Below is in units of pressure, and Analog 1 Above/Below is in units of volts.

  • Page 160: Stop Parameters

    Transpector SPS Operating Manual 10.6.2.3 Stop Parameters Defines how and when the data acquisition stops. 10.6.2.3.1 Stop Mode Type Defines when the data acquisition stops. (See Figure 10-32.) Figure 10-32 Stop mode SPS  Time (s) stops the acquisition after a set period of time.

  • Page 161: Maximum Duration

    Transpector SPS Operating Manual 10.6.2.3.3 Maximum Duration Defines the length of time in seconds that the RGA will collect data if using Time as a stop mode. If using a different stop mode, Maximum Duration defines the maximum amount of time that the RGA will collect data. (See Figure 10-34.)

  • Page 162: Relay 1

    Transpector SPS Operating Manual 10.6.2.3.6 Relay 1 Defines the state of Relay 1 when the run stops.  As Is leaves the relay in its current state at the end of the run.  Open opens the relay at the end of the run.

  • Page 163: Dwell Mode

    Transpector SPS Operating Manual 10.6.2.4.2 Dwell Time Defines the amount of time in milliseconds (ms) that FabGuard Explorer will collect data at every data point. In general, the longer the dwell time, the lower the noise of the signal. Longer dwell times at each point will result in longer overall scan times.

  • Page 164: Time Between Scans

    Transpector SPS Operating Manual 10.6.2.5.2 Time Between Scans Time Between Scans can be set to a value greater than the minimum scan time if additional wait time is desired. This field can only be set if Manual is chosen as the Delay Mode.

  • Page 165: Peak Lock

     None does not open any valves for the data acquisition. This would give data that is only representative of the background of the Transpector SPS.  Cal Gas opens the V5, calibration gas valve. With this valve open, the sensor will only monitor the calibration gas.

  • Page 166: Duty Cycle

    10.6.2.7.2 Duty Cycle When sampling aggressive gases, do not expose Transpector SPS to the aggressive gas for long periods of time. The Transpector SPS Inlet can be automatically opened and closed in a duty cycle. To use the duty cycle feature, the Open time and Close time must be defined.
  • Page 167 Transpector SPS Operating Manual Chapter 11 Glossary Anode The anode is the structure in the ion source in which ions are created by electron impact. It can be formed from a mesh, such as in the open ion source, or from a solid tube, such as in the closed ion source. Its electrical potential is positive with respect to the filament, focus lens, total pressure plate, pole zero, exit aperture and Faraday cup.
  • Page 168 Transpector SPS Operating Manual Detection Factor The detection factor is the ratio of the detected signal for a given ion current from a certain substance to the detected signal for the same ion current of nitrogen ions as measured at mass 28. For Faraday cup detectors, the detection factor is usually 1.
  • Page 169 Transpector SPS Operating Manual Focus Lens The focus lens is a conductive aperture located next to, and usually biased negatively with respect to, the anode. Its purpose is to draw the ions out of the anode, form them into a beam, and focus them into the next lens element.
  • Page 170 Transpector SPS Operating Manual Ionization Probability The ionization probability for a chemical substance is the ratio of the total ion current (at all masses) produced from a given partial pressure of that substance, to the total ion current produced from nitrogen at the same partial pressure.
  • Page 171 Transpector SPS Operating Manual Material Factor The material factor for a chemical substance is that part of the proportionality constant between the partial pressure of that substance and the resulting mass filtered ion current which depends on the chemical nature of that substance but not the particular instrument used for that measurement.
  • Page 172 Transpector SPS Operating Manual Partial Pressure The partial pressure is the pressure of a specific chemical component of a gas mixture. The sum of all the partial pressures is the total pressure. Pole Zero See Center Voltage. Quadrupole A quadrupole is a mass filter consisting of four parallel electrodes or poles (hence quadrupole) arranged in a square array.
  • Page 173 Transpector SPS Operating Manual Total Pressure Plate The total pressure plate, or collector, is an electrode in the ion source on which at least a part of the ion beam impinges. The current striking this plate is a function of the total pressure in the ion source.
  • Page 174 Transpector SPS Operating Manual Chapter 12 Bibliography For further information on partial pressure analyzers, see Partial Pressure Analyzers and Analysis, M. J. Drinkwine and D. Lichtman, American Vacuum Society Monograph Series, or A User’s Guide to Vacuum Technology, J. F.

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