Inficon Transpector MPH Operating Manual page 124

Gas analysis system
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Transpector MPH Operating Manual
3
Using the 2.0 mm x 75 mm hex driver, unscrew the three screws (D - one is
hidden in the figure) holding the sensor assembly to the feedthrough. Gently
remove the sensor assembly from the feedthrough.
Figure 6-9 Removing the sensor assembly
D
6 - 12

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