Related Manuals for Inficon Gemini MAG500
Summary of Contents for Inficon Gemini MAG500
- Page 1 Cold Cathode Gauge Gemini MAG500, MAG504 Cold Cathode Pirani Gauge Gemini MPG500, MPG504 Operating Manual Incl. EU Declaration of Conformity tina83e1-b (2016-02)
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Page 2: Product Identification
Product Identification In all communications with INFICON, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. INFICON AG, LI-9496 Balzers Model: tina83e1-b (2016-02) -
Page 3: Validity
Validity This document applies to products of the MAG50x and MPG50x series: 3Mxx-xxx-0x0x Measurement N 1.5 ... 8.5 V range P 1.398 ... 8.598 V Q 0.667 ... 10 V Receptacle 0 FCC, 8-pin 0 D-Sub, 9-pin Flange 6 ... -
Page 4: Intended Use
Intended Use Gemini MAG500, MAG504 The Cold Cathode Gauges Gemini MAG500 and MAG504 have been designed for vacuum measurement of gases in the pressure range of 1×10 … 1×10 mbar. Gauges with gauge identification can be operated in connection with an INFICON Vacuum Gauge Controller of the VGC40x / VGC50x series. -
Page 5: Scope Of Delivery
Gemini MPG500, MPG504 The gauge consists of two separate measuring systems (the Pirani and the cold cathode system according to the inverted magnetron principle). They are combined in such a way that for the user, they behave like one measuring system. Over the whole measurement range, the measuring signal is output as a logarithm of the pressure. -
Page 6: Table Of Contents
Contents Product Identification Validity Intended Use Functional Principle Scope of Delivery Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data 2.1 Measuring Signal vs. Pressure 2.2 Gas Type Dependence MAG50x 2.3 Gas Type Dependence MPG50x Installation 3.1 Vacuum Connection 3.2 Power Connection... - Page 7 Maintenance, Repair 6.1 Adjusting the Gauge 6.2 Cleaning the Gauge / Replacing Parts 6.2.1 Troubleshooting (measuring chamber) 6.2.2 Replacing Ionization Chamber and Ignition Aid 6.2.3 Replacing Measuring Chamber 6.3 Troubleshooting Returning the Product Disposal Options Accessories Spare Parts 11.1 Ignition aid for MAG50x and MPG50x 11.2 Ionization Chamber for MAG50x and MPG50x 11.3...
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Page 8: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Symbol printed on the product nameplate: Consultation of operating manual required Notice <…>... -
Page 9: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 10: Technical Data
Technical Data Measurement range (air, N 1×10 … 1×10 mbar 1×10 … 1000 mbar Accuracy MAG (N 1×10 … 1×10 mbar 30% of reading Accuracy MPG (N 1×10 … 100 mbar 30% of reading 100 … 1000 mbar 50% of reading Repeatability (N MAG, 1×10 …... - Page 11 (PELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused. Not suited for operation with a VGC40x / VGC50x controller. INFICON controllers fulfill this requirement. tina83e1-b (2016-02)
- Page 12 Supply voltage at the gauge +14.5 … +30 V (dc) Ripple ≤1 V Power consumption ≤2 W Fuse to be connected ≤1 AT High voltage in the measuring chamber Ignition voltage ≤4.5 kV Operating voltage ≤3.3 kV Current in the measuring chamber 3Mxx-x0x-0x0x high current 3Mxx-x1x-0x0x...
- Page 13 Materials exposed to vacuum Vacuum connection stainless steel (1.4435) Measuring chamber stainless steel (1.4435) Pirani filament ( MPG50x) Feedthrough, MAG/MPG500 Isolation glass, ceramic (Al Ring stainless steel (1.4435) Anode molybdenum Ni alloy Feedthrough, ceramic coated MAG/MPG504 Ionization chamber stainless steel (1.4301, 1.4016) Ignition aid stainless steel (1.4310)
- Page 14 Weight DN 25 ISO-KF <280 g DN 40 ISO-KF <320 g DN 40 CF-F und CF-R <570 g Dimensions [mm] FCC 68 D-Sub 8-pin 9-pin HV-ST HV-ST DN 25 ISO-KF DN 40 CF-R DN 40 ISO-KF DN 40 CF-F tina83e1-b (2016-02)
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Page 15: Measuring Signal Vs. Pressure
Measuring Signal vs. Pressure Measurement range 1.5 … 8.5 V (3MAx-xxx-0x0N) Pressure p 1E+00 1E–01 mbar 1E–02 torr 1E–03 1E–04 1E–05 1E–06 1E–07 1E–08 1E–09 1E–10 0.0 0.5 1.0 1.5 10.0 Measurement signal U [V] (U-c) p = 10 ⇔ U = c + log valid in the range 1×10... - Page 16 Measurement range 0.667 … 10 V (3MAx-xxx-0x0Q) Pressure p 1E+00 1E–01 mbar 1E–02 torr 1E–03 1E–04 1E–05 1E–06 1E–07 1E–08 1E–09 1E–10 0.0 0.5 1.0 1.5 10.0 10.5 0.667 Measurement signal U [V] 0.75(U-c) p = 10 ⇔ U = c + 1.33 log p valid in the range 1×10 mbar <...
- Page 17 Measurement range 1.398 … 8.6 V (3MBx-xxx-0x0P) Pressure p 1E+04 mbar torr 1E+02 1E+00 1E–02 1E–04 1E–06 1E–08 1E–09 0.0 0.5 10.5 1.217 1.397 Measurement signal U [V] 1.667U-d p = 10 U = c + 0.6 log p ⇔ valid in the range 1×10 mbar <...
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Page 18: Gas Type Dependence Mag50X
Gas Type Dependence MAG50x Indicated pressure (gauge calibrated for air) p [mbar] Xe Kr Ne He –3 –4 –5 –6 –7 –7 –6 –5 –4 –3 –2 [mbar] Indication range below 10 mbar In the range below 10 the pressure indication is linear. For gases other than air, the pressure can be determined by means of a simple conversion formula: = K ×... - Page 19 where: Gas type Air (N , CO) These conversion factors are average values. A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer. tina83e1-b (2016-02)
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Page 20: Gas Type Dependence Mpg50X
Gas Type Dependence MPG50x Indication range from 10 … 10 mbar (Pirani-only operation) Indicated pressure (gauge calibrated for air) p [mbar] Indication range above 10 mbar Freon 12 –1 Water vapor –2 –3 –2 –1 4 6 8 4 6 8 4 6 8 4 6 8 [mbar]... - Page 21 Indication range 10 … 0.1 mbar Indicated pressure (gauge calibrated for air) p (mbar) –1 Indication range ... 10 mbar –2 –3 –4 –5 –6 –6 –5 –4 –3 –2 –1 4 6 8 (mbar) Indication range below 10 mbar In the range below 10 the pressure indication is linear.
- Page 22 where: Gas type Air (N , CO) These conversion factors are average values. A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer. tina83e1-b (2016-02)
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Page 23: Installation
Installation Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. - Page 24 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 25 Mount the gauge so that no vibrations occur. Vibrations at the gauge cause a deviation of the measured values. The gauge may be mounted in any orientation. To keep conden- sates and particles from getting into the measuring chamber preferably choose a horizontal to upright position. For potentially contaminating applications and to protect the measurement system against contamination, installation of the optional seal with centering ring and filter is recommended...
- Page 26 When making a CF flange connection, it may be ad- vantageous to temporarily remove the electronics unit. Hexagon socket AF 2 Protective lid Keep the protective lid. WARNING WARNING: electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the pro- duct out of operation and remove the electronics unit.
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Page 27: Power Connection
• Connect the supply common with protective ground directly at the power. • Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤6 V (overvoltage protection). INFICON controllers fulfill these requirements. tina83e1-b (2016-02) -
Page 28: Fcc 68, 8-Pin Connector
3.2.1 FCC 68, 8-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. HV on High active Low active – HV on Signal – Ident – Electrical connection Pin 1 Supply (14.5 … 30 V (dc)) Pin 2 Supply common GND Pin 3... -
Page 29: D-Sub, 9-Pin Connector
3.2.2 D-Sub, 9-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. HV on Low active – Signal – – Electrical connection Pin 1 High voltage on/off (low active) Pin 2 Supply common GND Pin 3 Signal output (measuring signal) -
Page 30: Operation
Operation Status Indication MAG Supply voltage Error High voltage HV-ST cold cathode Calibration For factory value setting only Meaning <ST> <HV-ST> No supply voltage lit solid Supply voltage = ok, green no high voltage in the measuring chamber lit solid blinking Supply voltage = ok, green... -
Page 31: Status Indication Mpg
Status Indication MPG Supply voltage Error High voltage HV-ST cold cathode Calibration For factory value setting only Meaning <ST> <HV-ST> No supply voltage lit solid Supply voltage = ok, Pirani active, no green high voltage in the measuring chamber lit solid blinking Supply voltage = ok, green... -
Page 32: Put Mag50X Into Operation
Turn on the gauge/high voltage only at pressures <10 mbar to prevent excessive contamination. If you are using an INFICON measurement unit for Compact Gauges with at least two gauge connec- tions, the cold cathode gauge can be controlled, for example, by a Pirani gauge. -
Page 33: Gas Type Dependence
. For other gases, it has to be corrected: • (MAG50x → 18) • (MPG50x → 20). If the gauge is operated with an INFICON controller, a calibration factor for correction of the actual reading can be applied (→ the corresponding controller). -
Page 34: Contamination
The ignition is a statistical process. Already a small amount of depositions on the inner surfaces can have a strong influence on MPG50x only As long as the cold cathode measuring circuit has not ignited, the measuring value of the Pirani is output as measuring signal. The status output (= 0 V) indicates the Pirani-only operation. - Page 35 • In the low pressure range (p < 1×10 mbar), the pressure in- dication is usually too low (as a consequence of the contami- nation of the cold cathode system). In case of severe contami- nation, instabilities can occur (layers of the measuring cham- ber peel off).
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Page 36: Deinstallation
Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vac- uum component. - Page 37 Remove gauge from the vacuum system and install the protective lid. When deinstalling the CF flange connection, it may be advantageous to temporarily remove the elec- tronics unit (→ 26). Seal with centering ring Protective lid Clamp tina83e1-b (2016-02)
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Page 38: Maintenance, Repair
(e.g. ionization chamber, ignition aid, Pirani filament (MPG50x)), are not covered by the warranty. INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. - Page 39 For adjusting the zero, operate the gauge under the same con- stant ambient conditions and in the same mounting orientation as normally. If you are using a seal with centering ring and filter, check that they are clean or replace them if necessary (→...
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Page 40: Cleaning The Gauge / Replacing Parts
Press the <ADJ> button with a pin and the HV adjustment is carried out (duration ≈5 s). If the pressure value 1×10 mbar is output at the measurement value output, the adjustment has been successful. Otherwise, repeat the adjustment proce- dure. -
Page 41: Troubleshooting (Measuring Chamber)
Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. DANGER DANGER: cleaning agents Cleaning agents can be detrimental to health and environment. - Page 42 Unfasten the hexagon socket set screw (4) and remove the complete measuring chamber (3) from the electronics unit (5). Remove the retaining ring (1) as well as the ionization chamber (2) from the measuring chamber (3). Check the ionization chamber and the measuring chamber for contamination: •...
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Page 43: Replacing Ionization Chamber And Ignition Aid
Using an ohmmeter, make following measurements on the contact pins. Measurement Possible cause between pins 1 + 4 39.5 … 40.5 Ω Values Pirani filament (at 20 °C) outside of rupture the range 1 + 2 1000 … 1100 Ω Values Pirani tempera- (at 20 °C) - Page 44 We recommend to rub the inside walls of the measuring chamber up to the groove for the retaining ring to a bright finish using a polishing cloth. • The sealing surfaces must only be worked concentrically. • Do not bend the anode. ...
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Page 45: Replacing Measuring Chamber
Carefully slide the measuring chamber cpl. (3) (clean or new) into the electronics unit (5) until the mechanical stop is reached. Pins aligned straight. Fasten the measuring chamber (3) by means of the hexagon socket set screw (4). 6.2.3 Replacing Measuring Chamber Precondition... - Page 46 Set the calibration value of the spare sensor with the <CAL> switch on the electronics unit (5). HV-ST Calibration value spare sensor (measuring chamber cpl.) Carefully slide the measuring chamber cpl. (3) into the electronics unit (5) until the mechanical stop is reached. Pins aligned straight.
- Page 47 Fasten the measuring chamber (3) by means of the hexagon socket set screw (4). MPG50x gauge only: Perform an ATM and HV adjustment of the Pirani measuring circuit via the <ADJ> button (→ 39). A recalibration of the MAG50x gauge is not necessary.
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Page 48: Troubleshooting
Troubleshooting In case of an error, it may be helpful to just turn off the mains supply and turn it on again after 5 s. tina83e1-b (2016-02) - Page 49 tina83e1-b (2016-02)
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Page 51: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to INFICON should preferably be free of harmful substances. Adhere to the forward- ing regulations of all involved countries and for-... -
Page 52: Disposal
Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment... -
Page 53: Options
Options Ordering No. Seal with centering ring and fine filter, 211-098 DN 25 ISO-KF (stainless steel) Accessories Ordering No. Mounting / removing tool for ignition aid 351-550 Spare Parts When ordering spare parts, always indicate: • all information on the product nameplate •... -
Page 54: Ionization Chamber For Mag50X And Mpg50X
11.2 Ionization Chamber for MAG50x and MPG50x Ordering No. Ionization chamber (stainless steel) 351-555 11.3 Measuring Chamber Cpl. (Spare Sensor) Measuring chamber Ionization chamber Retaining ring 11.3.1 Measuring Chamber Cpl. for MAG500 Ionization chamber made of stainless steel Ordering No. 3MA0-0x6-xxxx 351-500 DN 25 ISO-KF... -
Page 55: 11.3.2 Measuring Chamber Cpl. For Mag504
11.3.2 Measuring Chamber Cpl. for MAG504 Ionization chamber made of stainless steel, Ordering No. coated 3MA3-0x6-xxxx 351-501 DN 25 ISO-KF 3MA3-0x7-xxxx 351-513 DN 40 ISO-KF 3MA3-0x8-xxxx 351-537 DN 40 CF-R 3MA3-0xQ-xxxx 351-525 DN 40 CF-F 11.3.3 Measuring Chamber Cpl. for MPG500 Ionization chamber made of stainless steel Ordering No. -
Page 56: Literature
Literature www.inficon.com Communication Protocol RS232C / RS485C tira83e1 INFICON AG, LI–9496 Balzers, Liechtenstein ETL Certification ETL LISTED RECOGNIZED COMPONENT The products MAG500, MAG504, MPG500 and MPG504 • conform to the UL Standard UL 61010-1 • are certified to the CAN/CSA Standard C22.2 No. -
Page 57: Eu Declaration Of Conformity
EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. - Page 58 Notes tina83e1-b (2016-02)
- Page 59 Notes tina83e1-b (2016-02)
- Page 60 LI–9496 Balzers Liechtenstein +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina83d1-b (2016-02) www.inficon.com t i na83e1- b...