Inficon Transpector MPH Operating Manual page 132

Table 7-1 Symptom—Cause—Remedy chart (continued)
EMISSION error (Cold
Start, Warm Start)
ANODE error
RF error
Electron Multiplier
error
7 - 2
SYMPTOM
Defective sensor filament
open, shorted
Electronics failure
Insufficient vacuum
Sensor operating voltages
incorrect
Transpector MPH electronics
box not fully engaged on
sensor
Defective sensor, anode
shorted
Electronics failure
Defective sensor, RF leads
open RF/DC card fault
Electronics failure
Defective sensor, EM shorted
EM just replaced
Electronics failure
Transpector MPH Operating Manual
CAUSE
Check sensor with OHM
meter.
Replace sensor or filament.
Return to INFICON for repair.
Verify pressure is less than
5E-4 Torr.
Verify correct settings
Contact INFICON for
assistance.
Make sure that the
Transpector MPH electronics
module is pushed all the way
on sensor.
Check sensor with OHM
meter for shorts. See sensor
pin-out diagram.
Fix or replace sensor.
Return to INFICON for repair.
Fix or replace sensor.
Return to INFICON for repair.
Check sensor with Ohm
meter. See sensor pin-out
diagram.
Fix or replace sensor.
Verify that EM is plugged into
the HV pin properly.
Return to INFICON for repair.
REMEDY