Related Manuals for Inficon Porter CDG020D
Summary of Contents for Inficon Porter CDG020D
- Page 1 Capacitance Diaphragm Gauge Porter™ CDG020D Operating Manual Incl. EC Declaration of Conformity tina80e1 (2012-06)
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Page 2: Product Identification
Product Identification In all communications with INFICON, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. Model: tina80e1 (2012-06) -
Page 3: Validity
Validity This document applies to products of the CDG020D series. Part numbers of standard products are indicated below. OEM products have other part numbers and different parameter settings (e.g. customized measurement range) as defined in the corresponding ordering information. 3CAx-xxx-0x00 Receptacle 0 ... -
Page 4: Intended Use
The Capacitance Diaphragm Gauges of the CDG020D series are intended for absolute pressure measurement of gases in their respective pressure ranges (→ 3). The gauges can be operated in connection with an INFICON Vacuum Gauge Controller (VGC series) or another appropriate measuring unit. -
Page 5: Table Of Contents
Contents Product Identification Validity Intended Use Function Trademarks Patents Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data Installation 3.1 Vacuum Connection 3.2 Power Connection 3.2.1 FCC68, 8-pin Connector 3.2.2 D-Sub, 9-pin Connector 3.2.3 Binder M12, 8-pin Operation 4.2 Zeroing the Gauge... -
Page 6: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces-... -
Page 7: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 8: Technical Data
Technical Data Measurement range → "Validity" Accuracy ≤1% of reading 3CA3-xxx-xxxx 3CA4-xxx-xxxx ≤0.5% of reading 0.02% F.S./ °C Temperature effect on zero Temperature effect on span 0.02% of reading/ °C 0.05% F.S. Resolution Gas type dependence none Output signal analog (measuring signal) Voltage range –0.2 …... - Page 9 ≤100 m (0.14 mm² conductor) For longer cables, larger conductor cross-sections are required. Grounding concept Vacuum flange - signal common → "Power Connection" Supply common - signal common conducted separately; for dif- ferential measurement (10 Ω) INFICON controllers fulfill this requirement. tina80e1 (2012-06)
- Page 10 Materials exposed to vacuum Flange, tube stainless steel AISI 316L Sensor, feedthrough ceramics (Al ≥99.5%) Internal volume DN 16 ISO-KF ≤3.7 cm 4 VCR male ≤6.1 cm 4 VCR female ≤5.6 cm 8 VCR female ≤5.1 cm Admissible pressure (absolute) ≥500 Torr/mbar (F.S.) 4 bar 50 …...
- Page 11 Dimensions [mm] 28.3 39.15 23.8 23.8 DN 16 ISO-KF 8 VCR female 4 VCR female 4 VCR male Weight ≤159 g tina80e1 (2012-06)
- Page 12 Analog Measuring Signal vs. Pressure Pressure p 1.1×F.S. 1.0×F.S. 0.9×F.S. 0.8×F.S. 0.7×F.S. 0.6×F.S. 0.5×F.S. 0.4×F.S. 0.3×F.S. 0.2×F.S. 0.1×F.S. 0.0×F.S. Measuring signal U p = (U / 10 V) × p (F.S.) Conversion Torr ↔ Pascal Torr mbar 1013.25 / 760 = 101325 / 760 = 1.00 1.3332…...
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Page 13: Installation
Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. - Page 14 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 15 Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep conden- sates and particles from getting into the measuring chamber preferably choose a horizontal to upright posi- tion and possibly use a seal with a centering ring and filter.
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Page 16: Power Connection
• Connect the supply common with protective ground directly at the power supply. • Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤16 V (overvoltage protection). INFICON controllers fulfill this requirement. tina80e1 (2012-06) -
Page 17: Fcc68, 8-Pin Connector
3.2.1 FCC68, 8-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable (cable → 9). Ident Remote Zero Measurement Adjust signal 10Ω case Electrical connection Pin 1 Supply Pin 2 Supply common GND Pin 3 Signal output (measurement signal) -
Page 18: D-Sub, 9-Pin Connector
3.2.2 D-Sub, 9-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable (cable → 9). Ident Remote Zero Measurement Adjust signal 10Ω case Electrical connection Pin 1 Signal output (measurement signal) Pin 2 N.C. -
Page 19: Binder M12, 8-Pin
3.2.3 Binder M12, 8-pin If no sensor cable is available, make one according to the following diagram. Connect the sensor cable (cable → 9). Ident Remote Zero Measurement Adjust signal 10Ω case Electrical connection Pin 1 Supply Pin 2 Supply common GND Pin 3 Signal output (measurement signal) -
Page 20: Operation
Operation Put the gauge into operation. If you are using an INFICON con- troller, define the measurement range ( [2], [3], [4]). → Warm-up time: approx. 1 minute. Zeroing the Gauge The gauge is factory calibrated while "standing upright". It re- quires no maintenance. - Page 21 Evacuate the gauge to a pressure according to the table below: Recommended final pressure for F.S. zero adjustment − <6.65×10 <5×10 mbar 1100 mbar <5×10 Torr <6.65×10 <5×10 mbar 1000 Torr/mbar <10 Torr <1.33×10 <10 mbar 200 Torr/mbar <5×10 Torr <6.65×10 <5×10...
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Page 22: Deinstallation
Deinstallation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. -
Page 23: Maintenance, Repair
Gauge failures due to contamination or wear and tear are not covered by the warranty. We recommend checking the zero at regular intervals. INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. -
Page 24: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to INFICON should preferably be free of harmful substances. Adhere to the forward- ing regulations of all involved countries and for-... -
Page 25: Disposal
Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment... -
Page 26: Further Information
Further Information www.porter-inficon.com Product Information Porter™ CDG020D INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com Operating Manual Vacuum Gauge Controller VGC032 tinb02e1 INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com Operating Manual Single-Channel Controller VGC401 tinb01e1 INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com... -
Page 27: Ec Declaration Of Conformity
EC Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2004/108/EC and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. - Page 28 LI–9496 Balzers Liechtenstein +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina80d1 (2012-06) www.inficon.com t i na80e1...