Related Manuals for Inficon PCG550
Summary of Contents for Inficon PCG550
- Page 1 Pirani Capacitance Diaphragm Gauge PCG550 PCG552 PCG554 Operating Manual Incl. EU Declaration of Conformity tina56e1-f (2015-09)
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Page 2: Product Identification
Product Identification In all communications with INFICON, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. INFICON AG, LI-9496 Balzers Model: W ; LPS tina56e1-f (2015-09) -
Page 3: Validity
Validity This document applies to products of the PCG55x series. Part numbers of standard products are indicated below. OEM products have other part numbers and different parameter settings (e.g. factory setting of setpoint) as defined in the corresponding ordering information. 3PCx-0xx-xxxx Flange 1 ... - Page 4 3PCx-0xx-xxxx Measuring 0 0.61 ... 10.23 V signal 1 1.2 ... 8.68 V 2 0.375 ... 5.659 3 1.57 ... 9.05 V Interface 0 None (analoge) 1 DeviceNet 2 Profibus 8 EtherCAT Receptacle 0 ...
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Page 5: Intended Use
It must not be used for measuring flammable or combustible gases which react in air. The gauge is intended for operation in connection with an INFICON Vacuum Gauge Controller VCG401, 402, 403 or with another suitable controller. Functional Principle The PCG gauge is a combination gauge consisting of a Pirani sensor and a diaphragm capacitive sensor. -
Page 6: Table Of Contents
Contents Product Identification Validity Intended Use Functional Principle Trademark Patents Scope of Delivery Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data 2.1 Output Signal vs. Pressure 2.2 Gas Type Dependence Installation 3.1 Vacuum Connection 3.2 Power Connection 3.2.1 FCC 68, 8-pin Connector... - Page 7 Deinstallation Maintenance, Repair 6.1 Adjusting the Gauge 6.2 Adjusting the Atmospheric Pressure Sensor 6.3 Troubleshooting 6.4 Replacing the Sensor Returning the Product Disposal Accessories Spare Parts Further Information ETL Certification EU Declaration of Conformity For cross-references within this document, the symbol (→ XY) is used, for cross-references to further documents, listed under "Further Information", the symbol (→...
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Page 8: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice <…> Labeling Personnel Qualifications Skilled personnel... -
Page 9: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 10: Technical Data
Technical Data For further technical data for gauges with DeviceNet and Profibus interface → [3], [4], [5], [6]. Measurement range 5×10 … 1500 mbar Measurement principle 10 mbar … 1500 mbar diaphragm capacitive sensor 1 … 10 mbar crossover range 5×10 …... - Page 11 Voltage vs. pressure 3PCx-0xx-xxx0 1.286 V/decade, logarithmic 3PCx-0xx-xxx1 1 V/decade, logarithmic 3PCx-0xx-xxx3 1 V/decade, logarithmic 3PCx-0xx-xxx2 → 21 Output impedance 2 × 4.7 Ω, short circuit-proof Load impedance >10 kΩ Response time <30 ms Gauge identification FCC 68 (+0.61 … +10.23 V) 71.5 kΩ...
- Page 12 Class 2 / LPS at the gauge +15 … +30 V (dc) Ripple ≤1 V Power consumption without fieldbus ≤2.5 W DeviceNet ≤3 W Profibus ≤3 W Fuse to be connected 1 AT INFICON controllers fulfill this requirement. tina56e1-f (2015-09)
- Page 13 Electrical connection 3PCx-0xx-x0xx FCC 68 3PCx-0xx-x1xx D-Sub 9-pin, male 3PCx-0xx-x2xx D-Sub HD 15-pin, male 3PCx-0xx-x4xx D-Sub HD 15-pin, RS485 INF, male Sensor cable shielded 0.14 mm /conductor Cable length ≤100 m RS232C operation ≤30 m Grounding concept → "Power Connection" Vacuum connection to signal common connected via 10 kΩ...
- Page 14 DeviceNet interface Specification, data format, communication protocol → [7] Interface, physical CAN bus Data rate (adjustable via 125 kBaud <RATE> switch) 250 kBaud 500 kBaud (default) <P> (125 kBaud, 250 kBaud, 500 kBaud programmable via DeviceNet, → [4]) Node address (MAC ID) 0 …...
- Page 15 Profibus interface Specification, data format, communication protocol → [9] Interface, physical RS485 Data rate ≤12 Mbaud (→ [5]) Node address Local (Adjustable via hexadecimal <ADDRESS>, <MSD>, <LSD> switches) 00 … 7D (0 … 125 Default setting Via Profibus (hexadecimal <ADDRESS>...
- Page 16 Internal volume DN 16 ISO-KF 4.7 cm DN 16 ISO-KF, long tube 14.5 cm DN 16 CF-F 8 cm DN 16 CF-R, long tube 14 cm DN 25 ISO-KF 5.5 cm ® 4 VCR female 5.5 cm ® 8 VCR female 7 cm 1/8"...
- Page 17 Dimensions [mm] DN 25 ISO-KF 1/8" NPT 4 VCR 8 VCR 29.2×29.2 mm 7/16-20 UNF 24.4 4-VCR 90° tina56e1-f (2015-09)
- Page 18 DeviceNet Profibus ADDRESS ADDRESS RATE STATUS NET MOD EtherCAT RS485 x100 ADDRESS RATE 3 2 1 ON tina56e1-f (2015-09)
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Page 19: Output Signal Vs. Pressure
Output Signal vs. Pressure Measurement range 0.61 … 10.23 V Pressure p 1E+06 1E+05 1E+04 mbar 1E+03 Torr 1E+02 1E+01 1E+00 1E–01 1E–02 1E–03 1E–04 1E–05 10.0 10.5 0.61 Output signal U [V] 0.778(U-c) p = 10 U = c +1.286log ⇔... - Page 20 Measurement range 1.2 … 8.68 V Pressure p 1E+05 1E+04 mbar 1E+03 Torr 1E+02 1E+01 1E+00 1E–01 1E–02 1E–03 1E–04 1E–05 0.0 0.5 1.0 1.5 8.68 Output signal U [V] (U-c) p = 10 ⇔ U = c + log valid in the range 5×10 mbar <p<...
- Page 21 Measurement range 0.375 … 5.659 V Signal U Pressure p [mbar] [Pa] [Torr] 0.375 <5×10 <6.65×10 <5×10 0.376 0.000133322 0.013332237 0.0001 0.377 0.000266645 0.026664474 0.0002 0.379 0.000666612 0.066661184 0.0005 0.384 0.001333224 0.133322368 0.0010 0.392 0.002666447 0.266644736 0.0020 0.417 0.006666118 0.66661184 0.0050 0.455 0.013332237...
- Page 22 Valid in the range 0.375 … 2.842 V p = a + bU + cU + dU + eU + fU –0.02585 0.04563 –0.04158 0.03767 0.1151 0.008737 where p pressure in Torr a, b, c, d, e, f constant U output signal Valid in the range 2.842 …...
- Page 23 Measurement range 1.57 … 9.05 V Pressure p 1E+05 1E+04 mbar 1E+03 Torr 1E+02 1E+01 1E+00 1E–01 1E–02 1E–03 1E–04 1E–05 0.0 0.5 1.0 1.5 1.57 9.05 Output signal U [V] (U-c) p = 10 ⇔ U = c + log valid in the range 5×10 mbar <p<...
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Page 24: Gas Type Dependence
Gas Type Dependence Indicated pressure (gauge calibrated for air) p [mbar] Capacitive Pirani Crossover diaphragm sensor range sensor Air, O , CO, N –1 –2 –3 –4 –4 –3 –2 –1 [mbar] Calibration factors valid for Pirani pressure range below 1 mbar = C ×... -
Page 25: Installation
Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. - Page 26 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 27 Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep conden- sates and particles from getting into the measuring chamber preferably choose a horizontal to upright posi- tion and consider using a seal with centering ring and filter.
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Page 28: Power Connection
• Connect the supply common with protective ground directly at the power supply. • Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤18 V (overvoltage protection). INFICON controllers fulfill these requirements. tina56e1-f (2015-09) -
Page 29: Fcc 68, 8-Pin Connector
3.2.1 FCC 68, 8-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. Ident Supply Measurement 4.7Ω signal – 4.7Ω +24V – Electrical connection Pin 1 Supply Pin 2 Supply common, GND Pin 3 Measurement signal or thresholds SP1, SP2... -
Page 30: D-Sub, 9-Pin Connector
3.2.2 D-Sub, 9-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. Measurement 4.7Ω signal – 4.7Ω +24V – Electrical connection Pin 1 Relay SP1, closing contact Pin 2 n.c. Pin 3 Supply Pin 4 Supply common, GND Pin 5 Measurement signal or thresholds SP1, SP2... -
Page 31: D-Sub Hd, 15-Pin Connector
3.2.3 D-Sub HD, 15-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. Measurement 4.7Ω signal – 4.7Ω +24V – Electrical connection Pin 1, 2 n.c. Pin 3 Supply Pin 4 Supply common, GND Pin 5 Measurement signal... -
Page 32: D-Sub Hd, 15-Pin, Rs485 Inf Connector
3.2.4 D-Sub HD, 15-pin, RS485 INF Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. 10Ω 1 Fail safe bias 2 Termination 120Ω Measurement signal 3 Fail safe 4.7Ω bias – 4.7Ω... -
Page 33: Devicenet Connector
3.2.5 DeviceNet Connector If no DeviceNet cable is available, make one according to the following diagram. Connect the DeviceNet cable. Micro-Style, 5-pin, (DeviceNet), female, soldering side Pin 1 Drain Pin 2 Supply +15 … +30 V (dc) Pin 3 Supply common Pin 4 CAN_H Pin 5... -
Page 34: Profibus Connector
3.2.6 Profibus Connector If no Profibus cable is available, make one according to the following diagram. Connect the Profibus cable. D-Sub, 9-pin, male, soldering side Pin 1, 2 Do not connect Pin 6 Pin 3 RxD/TxD-P Pin 7, 9 Not connected Pin 4 CNTR-P Pin 8... -
Page 35: Ethercat Connector
3.2.7 EtherCAT Connector If no EtherCAT cables are available, make them according to the following diagram. Connect the EtherCAT cables. FCC68, 8-pin, soldering side Pin 1 Transmission data + Pin 2 Transmission data - Pin 3 Receive data + Receive data - Pin 6 Pin 4, 5, 7 and 8: Not connected FCC68 cable... -
Page 36: Operation
Operation When the supply voltage is applied, the measurement signal is available at the connector (→ "Power Connection"). Allow a stabilization period of at least 10 minutes. It is advisable to operate the gauge continuously, irrespective of the pressure. The gauge is factory calibrated. Due to long time operation or contamination, a zero drift could occur. - Page 37 Liquid crystal display (LCD) Meaning no supply voltage lit green measurement / parameter mode lit red error The display can be rotated by 180 ° via the diagnostic port. Put the gauge into operation When the supply voltage is applied the software version is briefly dis- played.
- Page 38 Measurement mode Relay 2 Setpoint ATM setpoint Status of Relay 2 open closed Relay 1 ATM setpoint Setpoint Status of Relay 1 open closed Measurement Pirani principle Capacitive Crossover range Output signal Unit Millibar Torr Pascal Micron (no display) Counts Underrange Overrange (no display) Within range...
- Page 39 Parameter mode Switching functions <S> When the <SP1> or <SP2> button is pushed, the corresponding threshold is displayed and the corresponding relay flashes. Threshold Error display (trouble shooting → 59) Pirani sensor error Diaphragm sensor error Atmosphere pressure sensor error tina56e1-f (2015-09)
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Page 40: Gas Type Dependence
EEPROM error Sensor error Gas Type Dependence Pressure range Measurement Gas type dependence principle diaphragm independent of gas 10 … 1500 mbar capacitive sensor type, no correction required diaphragm capacitive sensor crossover range 1 … 10 mbar and Pirani sensor 5×10 …... - Page 41 The current threshold setting • can be read / written via the diagnostic port • is output at the measurement signal output instead of the pressure signal, can be measured with a voltmeter, and is displayed on the LCD display after the <SP1> or <SP2> button is pressed •...
- Page 42 High Trip Point If the pressure in the vacuum system is higher than the setpoint, the corresponding LED (<SP1> or <SP2>) is lit solid and the corresponding relay is closed. Measurement signal (Pressure p) Threshold value Hysteresis Setpoint (10% of threshold) Threshold value Time t tina56e1-f...
- Page 43 High & Low Trip Point Both a High Trip Point and a Low Trip Point are assigned to each setpoint. If the pressure in the vacuum system is higher than the defined High Trip Point threshold, the corresponding LED (<SP1> or <SP2>) is lit and the corresponding relay is closed.
- Page 44 4.3.1 Adjusting the Setpoints SP1, SP2 The switching characteristics and the hysteresis can only be programmed via • the diagnostic port (→ [3]) • the DeviceNet, Profibus, EtherCAT and RS485 interface (→ [3], [4], [5], [6]). The thresholds of the setpoints can be adjusted via •...
- Page 45 Adjusting setpoint SP1 with button on the gauge Push the <SP1> button with a pin (max. ø1.1 mm) and keep it depressed. The gauge changes to the switching function mode and outputs the current threshold value at the measurement value output or on the LCD for about 5 s and the corresponding <S>...
- Page 46 If after programming of the hysteresis the corresponding button <SP1> or <SP2> is pushed, the factory setting of the corresponding hysteresis (10%) is reactivated. Programming setpoint SP1 Programmable parameters: Low Trip Point Low Trip Enable (→ [3], [4], [5], [6]) Low Trip Point Hysteresis High Trip Point High Trip Enable...
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Page 47: Atm Setpoint
ATM Setpoint The setpoints SP1 and SP2 of gauges with separate atmos- pheric pressure sensor can be programmed to atmospheric pressure setpoint (ATM setpoint) via the diagnostic port or serial interface. The ATM setpoint is defined as a factor of the current atmos- pheric pressure and can be set to any pressure within the meas- urement range of the gauge. - Page 48 The current ATM threshold setting • can be read / written via the diagnostic port • is output at the measurement signal output instead of the pressure signal, can be measured with a voltmeter, and is displayed on the LCD display after the <SP1> or <SP2> button is pressed •...
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Page 49: Diagnostic Port (Rs232C Interface)
Diagnostic Port (RS232C Interface) The diagnostic port <DIA> permits to output the pressure read- ing and all status information and to enter all settings at the same time (→ [3]). → "Accessories" tina56e1-f (2015-09) -
Page 50: Devicenet Operation
DeviceNet Operation Caution Caution: data transmission errors The attempt to operate the DeviceNet gauge with the RS232C interface causes data transmission errors. This DeviceNet gauge must not be operated with the RS232C interface. Before the gauge is put into operation, it has to be configured for the DeviceNet. - Page 51 Data Rate Setting By means of the <RATE> switch, the data rate can be set to 125 (<1>), 250 (<2>) or 500 kBaud (<5>) (default 500 kBaud). If the switch is in the <P> position, the data rate is programmable via the DeviceNet (→ [4]). RATE Example: Data rate = 250 kBaud: Transmitting measurement values...
- Page 52 <STATUS MOD> (gauge status): Meaning No supply blinking green-red Selftest lit solid green Normal operation lit solid red Non recoverable error blinking red Recoverable error (e.g. missing DeviceNet power supply) <STATUS NET> (network status): Meaning Gauge not online: • Selftest not yet concluded •...
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Page 53: Profibus Operation
Profibus Operation Caution Caution: data transmission errors The attempt to operate the gauge with the RS232C interface causes data transmission errors. This gauge must not be operated with the RS232C interface. For operating the gauge via Profibus, prior installation of the device specific GSD file is required on the bus master side. -
Page 54: Ethercat Operation
The values of the nude address and the attribute are stored non- volatile. To change these stored values, start the gauge with a node address <126 . The stored values of the nude address and the attribute are deleted. Transmitting measurement values Depending on the Fieldbus standard used, the gauge can only transmit measurement values when it is authorized by the master. -
Page 55: Deinstallation
Explicit Device Address Setting (default During device initialization, the device address switches are read by the device firmware. This device address is supported to the master as Explicit Device Identification. The explicit device address is set in hexa- decimal form (00 … FFF ) via the <x100>, <x10>... - Page 56 DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vac- uum component.
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Page 57: Maintenance, Repair
Gauge failures due to contamination and wear and tear, as well as expendable parts (e.g. filament), are not covered by the warranty. INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. - Page 58 For adjusting the zero, operate the gauge under the same con- stant ambient conditions and in the same mounting orientation as normally. The gauge is adjusted to default values. However, it can also be adjusted to other pressure values, if the exact pressure value is known (reference measurement).
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Page 59: Adjusting The Atmospheric Pressure Sensor
If the pressure value 4.99×10 mbar is output at the measurement value output or on the LCD display, the adjustment has been successful. Otherwise, repeat the adjustment procedure. Adjusting the Atmospheric Pressure Sensor The ambient pressure of the gauge is measured by a separate atmospheric pressure sensor built into the electronics unit of the gauge. - Page 60 Trouble shooting gauge The output signal is available at the sensor cable connector. In case of an error, it may be helpful to just turn off the mains supply and turn it on again after 5 s. Problem Possible cause Correction Output signal per- Sensor cable defective or not...
- Page 61 Separate the sensor from the electronics unit (→ 62). Using an ohmmeter, make the following measurements on the contact pins. Ω Sensor Possible cause PCG550 (W) 40 ± 1 [Ω] Contamination > >40 Ω PCG554 (W) Contamination < <40 Ω...
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Page 62: Replacing The Sensor
Replacing the Sensor In case of severe contamination or a malfunction, the sensor can be replaced. Precondition Gauge deinstalled (→ 55). Unscrew the hexagon socket screws and remove the sensor without twisting it. 2 mm Place the new sensor without twisting it and lock it with the screws. -
Page 63: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to INFICON should preferably be free of harmful substances. Adhere to the forward- ing regulations of all involved countries and for-... -
Page 64: Disposal
Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment... -
Page 65: Accessories
Accessories Ordering No. Centering ring with fine filter DN 16 ISO-KF 211-097 Communication adapter (2 m) 303-333 The diagnostic software (Windows NT, XP) can be downloaded from our website. tina56e1-f (2015-09) -
Page 66: Spare Parts
Spare Parts When ordering spare parts, always indicate: • all information on the product nameplate • description and ordering number Sensor for gauge with tungsten (W) filament Ordering 3PC1-0x1-xxxx 357-925 DN 16 ISO-KF 3PC6-0x1-xxxx 3PC1-0x2-xxxx 357-926 DN 16 ISO-KF, long tube 3PC6-0x2-xxxx 3PC1-0x4-xxxx 357-927... - Page 67 Sensor for gauge with nickel (Ni) filament Ordering 3PC2-0x1-xxxx 357-936 DN 16 ISO-KF 3PC7-0x1-xxxx 3PC2-0x2-xxxx 357-937 DN 16 ISO-KF, long tube 3PC7-0x2-xxxx 3PC2-0x4-xxxx 357-938 DN 16 CF-F 3PC7-0x4-xxxx 3PC2-0x5-xxxx 357-939 DN 16 CF-R, long tube 3PC7-0x5-xxxx 3PC2-0x6-xxxx 357-940 DN 25 ISO-KF 3PC7-0x6-xxxx 3PC2-0xD-xxxx 357-943...
- Page 68 Sensor for gauge with Al coated filament Ordering 3PC3-0x1-xxxx 357-947 DN 16 ISO-KF 3PC8-0x1-xxxx 3PC3-0x2-xxxx 357-948 DN 16 ISO-KF, long tube 3PC8-0x2-xxxx 3PC3-0x4-xxxx 357-949 DN 16 CF-F 3PC8-0x4-xxxx 3PC3-0x5-xxxx 357-950 DN 16 CF-R long tube 3PC8-0x5-xxxx 3PC3-0x6-xxxx 357-951 DN 25 ISO-KF 3PC8-0x6-xxxx 3PC3-0xD-xxxx 357-954...
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Page 69: Further Information
Further Information www.inficon.com Operating Manual Single-Channel Controller VGC401 tinb01d1 German tinb01e1 English INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com Operating Manual Two and Three Channel Measurement and Control Unit VGC402, VGC403 tinb07d1 German tinb07e1 English INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com... -
Page 70: Etl Certification
Common Industrial Protocol (CIP™) Ed. 3.5 and DeviceNet™ Adaption of CIP Ed. 1.6 (Open DeviceNet Vendor Association) www.odva.org Open DeviceNet Vendor Association, Inc. DeviceNet™ Specifications IEC 61158 Type 3 elements: Industrial communication networks – Fieldbus specifications IEC 61784: Industrial communication networks – Fieldbus profiles [10] www.profibus.com ... -
Page 71: Eu Declaration Of Conformity
EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. - Page 72 LI–9496 Balzers Liechtenstein +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina56d1-f (2015-09) t i na56e1- f www.inficon.com...