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Inficon Transpector MPS Operating Manual

Gas analysis system
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Transpector MPS
®
Gas Analysis System
PN 074-603-P1B

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Summary of Contents for Inficon Transpector MPS

  • Page 1 Cover Page Transpector MPS ® Gas Analysis System PN 074-603-P1B...
  • Page 2 The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
  • Page 3 Declaration Of Conformity Page 1...
  • Page 4 Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer. This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.

  • Page 5: Table Of Contents

    1.3.1 Returning Your Transpector MPS to INFICON..... . . 1-3 Quick Start ..........1-4 Purpose of the Transpector MPS Gas Analysis System .
  • Page 6 Transpector MPS IP Address........2-3...
  • Page 7 Transpector MPS Filament........
  • Page 8 Tuning Transpector MPS ........
  • Page 9 Transpector MPS Operating Manual Chapter 6 Maintenance Introduction..........6-1 Safety Considerations .
  • Page 10 10.3 Transpector MPS Spare Parts ........10-1 10.3.1...
  • Page 11 Transpector MPS Operating Manual 12.1.2 Electronics Module ......... . . 12-2 12.1.3...

  • Page 12: Getting Started

    Transpector Web UI onboard web server. This chapter provides an overview of the Transpector MPS Gas Analysis System. Topics include: the purpose of Transpector MPS, its specifications, a list of supplied items, installation instructions and customer support contact information.

  • Page 13: Using This Manual

    Transpector MPS Operating Manual 1.2 Using This Manual Please read this Operating Manual before operating Transpector MPS. 1.2.1 Note and Hint Paragraphs NOTE: This is a note paragraph. Notes provide additional information about the current topic. HINT: This is a hint paragraph. Hints provide insight into product usage.

  • Page 14: How To Contact Customer Support

    Sales and Customer Service   Technical Support  Repair Service If you are experiencing a problem with Transpector MPS, please have the following information readily available:  the Transpector MPS serial number  a description of the problem ...

  • Page 15: Quick Start

    Transpector MPS Operating Manual 1.4 Quick Start Read this operating manual in full prior to operating Transpector MPS. Then, follow the steps below to quickly start using Transpector MPS. Ensure that all supplied items have been received. See Chapter Supplied Items.

  • Page 16: General Description Of The Transpector Mps

    Transpector MPS Operating Manual 1.6 General Description of the Transpector MPS Gas Analysis System The Transpector MPS Gas Analysis System is comprised of three parts: Sensor The sensor functions only in a high-vacuum environment with pressures below 5 x 10 Torr (6.7 x 10...

  • Page 17: Physical Requirements

    199 mm 50 mm 421.6 mm (7.83 in.) (1.98 in.) (16.60 in.) 1.9.2 Weight The Transpector MPS electronics module weighs 1.53 kg (3 lb. 6 oz.). The Transpector MPS systems complete weight depends on which sensors are used. 1 - 6...

  • Page 18: Mounting Requirements

    The electronics module attaches to and is supported by the sensor. Transpector MPS can be mounted in any position. 1.9.4 Ventilation Requirements At least 25.4 (1 in.) of open space around the Transpector MPS electronics module must be maintained for proper ventilation. 1.9.5 Maintenance Access Easy access to Transpector MPS should be maintained for installation and maintenance activities.

  • Page 19: Overvoltage Category

    Transpector MPS. 1.13.1 Use Transpector MPS is designed for indoor use only. 1.13.2 Altitude Range Transpector MPS can be used up to a maximum altitude range of 2000 m (6561 ft.). 1.13.3 Pollution Degree Pollution Degree 2 (per EN61010-1) 1.13.4 Operating Temperature...

  • Page 20: Hardware Installation

    Install the communications cables from the computer to the electronics module as explained in section 1.16.3 on page 1-15. If the optional extension tube heater was purchased with the Transpector MPS, see section 1.18, Installing the Heater Jacket (optional), on page 1-18 for installation instructions.
  • Page 21 Transpector MPS Operating Manual 1.16.1.1.1 Assembling ConFlat Flanges To assemble a pair of ConFlat flanges: Wipe the sealing areas of the flanges with a laboratory towel using a clean solvent, such as water free alcohol. These areas must be clean and free of particulate matter.
  • Page 22 Transpector MPS Operating Manual Install supplied silver-coated stainless steel bolts in the bolt holes of the flanges and finger-tighten only. NOTE: If the factory-supplied silver-coated stainless steel hardware is not used and the flanges are going to be baked, coat the bolt threads with an ®...
  • Page 23 Otherwise, there may be interference between the black INFICON Transpector mounting nut and the sensor mounting hardware. 1 - 12...
  • Page 24 300°C MPS100M/200M 150°C 300°C CAUTION The Transpector MPS electronics module must be removed prior to bakeout at temperatures greater than 200°C (FC). Do not turn on the electron multiplier at sensor temperatures above 150°C. Turning on the EM at elevated temperature could result in permanent damage to the detector.

  • Page 25: Electronics Module Installation

    Transpector MPS Operating Manual 1.16.2 Electronics Module Installation The Transpector MPS electronics module should be mounted in an area where the ambient temperature does not exceed 50°C and there is free air circulation around the electronics module. Best performance will be achieved if the electronics module is not located close to major heat sources where it is subjected to wide temperature variations.

  • Page 26: Installing Ethernet Communications

    Ethernet communication is the default communication method for Transpector MPS. Ethernet communication uses standard RJ45, Cat5e Ethernet cables. To use Ethernet communications, attach the supplied Cat5e Ethernet cable to the LAN port on the back of the Transpector MPS electronics module. See Figure 1-6.

  • Page 27: Input/Output (I/O)

    Transpector MPS Operating Manual 1.17 Input/Output (I/O) This section describes the output and input for Transpector MPS. The Transpector MPS electronics module supports the following I/O functions through the AUX I/O connector located on the back panel. See Figure 1-7.
  • Page 28 Transpector MPS Operating Manual 1 - 17...

  • Page 29: One Analog Input

    NOTE: The analog input is supported through FabGuard software. 1.18 Installing the Heater Jacket (optional) The Transpector MPS Heater Jacket Mount Kit (961-433-G1) provided with Heating Jacket Kit (961-029) is intended to inhibit the movement of the Manifold Heater. This kit is only for system installations without calibration standards that are mounted in a vertical orientation.
  • Page 30 Transpector MPS Operating Manual Figure 1-8 Heater jacket installation Internal Heater Bracket provided in kit 961-433-G1 Sensor Flange Snap in Manifold Heater Transpector MPS Hex head fastener provided in kit 961-433-G1 Manifold Heater 961-416-P1 provided in kit 961-029 1 - 19...

  • Page 31: Connecting Transpector Mps

     Dynamic (automatic) IP addresses are automatically set by a Host INFICON recommends using Static IP addresses for Transpector MPS but allows for Dynamic IP addresses set through DHCP (Dynamic Host Communication Protocol). NOTE: When using Static IP addresses, a block of addresses should be reserved for Static use and prohibited from being assigned by the DHCP server (Host).
  • Page 32 Static IP addresses help protect Transpector MPS from losing communication and data. Transpector MPS uses IPv4 IP addresses. IPv4 IP addresses consist of 32 bits that are traditionally displayed in dot-decimal notation which consists of four decimal numbers each ranging from 0 to 255 separated by dots. An example of an IP address in dot-decimal notation would be 192.168.1.100.

  • Page 33: Subnetworking

    2.3 Transpector MPS IP Address By default, Transpector MPS ships with an IP address of 192.168.1.100 with a subnet mask of 255.255.0.0. NOTE: When connecting Transpector MPS to an existing local network, there must be a static IP address for each Transpector MPS being installed.

  • Page 34: Using The Inficon Mass Spectrometer Search Utility To Change The Ip Address

    Transpector MPS Operating Manual 2.3.1.1 Using the INFICON Mass Spectrometer Search Utility to Change the IP Address The alternative method of changing the Transpector MPS IP address employs the INFICON Mass Spectrometer Search Utility (IMSSU), a standalone executable found on the software installation disk and the RGA Manuals CD that ships with each Transpector MPS.
  • Page 35  the current Transpector MPS IP address  a Change To text box, to enter the new Transpector MPS IP address  a selection of either DHCP On or DHCP Off To change the IP address, type in the new IP address in the Change To box and click Apply.
  • Page 36 Find Device On. Show Settings Click Show Settings to open a display on the right-side of the IMSSU that will display multiple settings of Transpector MPS. This is an excellent tool for troubleshooting. The following settings are displayed:  Serial Number ...

  • Page 37: Changing The Computer Ip Address

    Transpector MPS Operating Manual 2.3.1.2 Changing the Computer IP Address An alternative to changing the Transpector MPS IP address is to change the host computer’s IP address to allow for communication between the host computer and Transpector MPS. To change the computer’s IP address, follow these instructions: 2.3.1.2.1 Windows 7 Instructions...
  • Page 38 On the network status and tasks window, click Change adapter settings. Figure 2-6 Change adapter settings If the host computer is connected to Transpector MPS through the Ethernet port of the computer, right-click Local Area Connection and select Properties. See Figure 2-7.
  • Page 39 Transpector MPS Operating Manual Select Internet Protocol Version 4 (TCP/IPv4), then click Properties. Figure 2-8. Figure 2-8 TCP/IPv4 In the TCP/IPv4 properties menu, select Use the following IP address. Figure 2-9. Figure 2-9 Use the following IP address 2 - 9...
  • Page 40 The IP address will now be set to the manual IP address chosen in step 7. Exit all of the menus and then connect to Transpector MPS. To change the IP address back to its default settings, follow steps 1 through 6 and return the IPv4 properties to their original settings.

  • Page 41: Windows Xp Instructions

    Transpector MPS Operating Manual 2.3.1.2.2 Windows XP Instructions Click Start to display the Start menu, then click Control Panel. Start is located on the taskbar on the Windows XP desktop. See Figure 2-11. Figure 2-11 XP Start Menu On the Control Panel, click Network and Internet Connections.
  • Page 42 Transpector MPS Operating Manual In the Network and Internet Connections window, click Network Connections. See Figure 2-13. Figure 2-13 Network and Internet Connections Double-click the Local Area Connection icon. See Figure 2-14. NOTE: The icon may have a number after it if more than one connection has been installed.
  • Page 43 Transpector MPS Operating Manual Click Properties. See Figure 2-15. Figure 2-15 Local Area Connection Status Select Internet Protocol (TCP/IP), then click Properties. See Figure 2-16. Figure 2-16 Local Area Connection Properties Select Use the Following IP Address and enter in the desired IP address.

  • Page 44: Connecting Transpector Mps

    Transpector MPS has a different network prefix than Transpector MPS. The network prefix of Transpector MPS is 192.168.x.x. The IP address of the host computer used to control Transpector MPS must have a subnet mask of 255.255.0.0 and a network prefix of 192.168.x.x.

  • Page 45: Installing Multiple Transpector Mps Sensors

    2.4.2 Installing Multiple Transpector MPS Sensors Since each Transpector MPS is shipped with the same default IP address, the IP address of each Transpector MPS must be changed one at a time so that each sensor has a unique IP address. See section 2.3.1, Changing Transpector MPS...

  • Page 46: How The Instrument Works

    Chapter 4, Applications Guide. 3.2 Overview The Transpector MPS Gas Analysis System is a quadrupole based Residual Gas Analyzer which analyzes the presence and relative abundance of gases in a mixture. The Transpector MPS Gas Analysis System consists of three parts: ...

  • Page 47: The Ion Source

    3.3 The Ion Source The ion source of Transpector MPS is optimized for detecting residual gases in a vacuum system. The sensor has an open construction that facilitates the flow of gas species into the ionization region.
  • Page 48 Transpector MPS Operating Manual Figure 3-2 Sensor’s ion source Electron Repeller Filament (Cathode) Anode (with Cage) Focus Lens Source Exit Lens 3 - 3...
  • Page 49 Transpector MPS Operating Manual The Transpector MPS filament is Dual Yttria-coated Iridium. See section 3.3.1. Emission current refers to the stream of electrons emitted by the filament. The filament is heated with a DC current from the emission regulator circuit, with the resulting temperature of the filament used as the means of controlling the emission current.

  • Page 50: Transpector Mps Filament

    Transpector MPS Operating Manual 3.3.1 Transpector MPS Filament Dual Yttria-coated Iridium is the only available filament for Transpector MPS. Yttria-coated iridium filaments have a coating of yttrium oxide over an iridium core. Yttria is a rare-earth element that, in its oxide form, is fully oxidized. This means that the surface of the yttria-coated iridium filament is inert with respect to oxygen damage.

  • Page 51: The Quadrupole Mass Filter

    Most ions contain only one unit of charge. In Transpector MPS, the mass filter is a quadrupole type, to which a combination of RF and DC potentials is applied. The RF frequency and amplitude determine the mass/charge ratio, and the RF/DC ratio determines the filter sensitivity.
  • Page 52 Transpector MPS Operating Manual the same magnitude but negative. The DC and RF potentials are referenced to a center voltage (sometimes called the pole zero). The following equations summarize the potentials applied to the rods:   2ft  ...

  • Page 53: Scanning Characteristics

    Transpector MPS Operating Manual The mass of ions transmitted ( ) is directly proportional to the RF amplitude (provided is constant). As the RF amplitude is increased, progressively higher mass ions will be made to oscillate in phase with the RF field and thus gain sufficient energy to strike the poles.

  • Page 54: The Zero Blast

    1 and 2 when significant quantities of higher-mass ions are present. In some instruments, the magnitude of the zero blast is concealed by preventing the voltages from reaching zero. With Transpector MPS, the zero blast only produces parts-per-million interference to masses 1 and 2.

  • Page 55: The Ion Detector

    Ions strike the detector and are neutralized, thus drawing a current from the circuitry connected to the electrode. Usually, the current flow that results is exactly equal to the incident ion current. In Transpector MPS instruments, the Faraday Cup is at ground potential.

  • Page 56: The Electron Multiplier (Em) Detector

    500 amps/Torr), thus making it possible to measure partial pressures as low as 1.5 x 10 Torr for Transpector MPS sensors. A typical Faraday Cup sensor would have a sensitivity of only 3 x 10 amps/Torr, resulting in a minimum detectable partial pressure of 2.6 x 10...

  • Page 57: The Continuous Dynode Electron Multiplier/Faraday Cup Detector

    In CDEM/FC detectors, the EM cone amplifies the electron pulse, significantly increasing the analyzer’s sensitivity. The Transpector MPS CDEM/FC detector uses a continuous dynode element made of a special type of glass, rather than discrete dynode EMs, which are made from a copper-beryllium alloy.
  • Page 58 Transpector MPS Operating Manual CAUTION Do not operate the CDEM at temperatures above 150°C. Permanent damage may result. Also, avoid output currents in excess of 1 x 10 amps; either decrease the high voltage or, if possible, decrease the pressure.

  • Page 59: Applications Guide

    Works. 4.1.1 Qualitative Interpretation of Mass Spectra The basic graphical output of a Transpector MPS is the mass spectrum. A mass spectrum is a plot of ion intensity as a function of ion mass-to-charge ratio. Each chemical substance has a characteristic mass spectrum. Different instruments will give slightly different spectra for the same substance.

  • Page 60: Ionization Process

    Transpector MPS Operating Manual Figure 4-1 Example mass spectrum The bottom graph is a trend analysis showing the most important masses versus time. The top graph shows the data taken during the scan and shows the air spectra over a six decade y-axis. The prominent peaks for air are mass 28 from Nitrogen, mass 32 from Oxygen, mass 40 from Argon and mass 18 from water vapor.

  • Page 61: Isotope Ratios

    There are some situations when it is difficult to determine whether the ion is singly or multiply charged. When a molecule is composed of two atoms of the same element, Transpector MPS has difficulty distinguishing between the singly charged one-atom fragment ion and the doubly charged two-atom molecular ion; which will both have the same mass-to-charge ratio.
  • Page 62 Transpector MPS Operating Manual Some elements have many intense isotopes (e.g., xenon is 0.096% mass 124, 0.090% mass 126, 1.92% mass 128, 26.44% mass 129, 4.08% mass 130, 21.18% mass 131, 26.89% mass 132, 10.44% mass 134, and 8.87% mass 136).

  • Page 63: Electron Energy Effects

    Transpector MPS Operating Manual Table 4-2 Isotope ratios (continued) Isotope Ratios Relative Element Mass No. Abundance 4.18 0.016 75.4 24.6 0.337 0.063 99.600 4.1.1.3 Electron Energy Effects As previously discussed, the exact fragmentation pattern observed will depend on the energy of the bombarding electrons.

  • Page 64: A Qualitative Interpretation Guide

    Transpector MPS Operating Manual 4.1.1.4 A Qualitative Interpretation Guide To use Transpector MPS to identify unknown substances, three characteristics must be recognized:  fragmentation patterns  multiply charged ions  isotope ratios Simple spectra are, in general, relatively easy to interpret and will yield useful identifications.
  • Page 65 Transpector MPS Operating Manual Table 4-3 Spectrum Interpretation Guide (continued) Spectrum Interpretation Guide AMU # Chemical Symbol Sources water fluorine or freon F , Ne, HF argon Dl, neon, hydrofluoric acid Ne, CO neon, DI CO See Note 1 See Note 1...

  • Page 66: Quantitative Interpretation Of Mass Spectra

    By Dalton’s Law, the sum of all the partial pressures is the total pressure. Transpector MPS is designed so that the height of a peak in a mass spectrum is proportional to the number of ions giving rise to that peak. Also by design, the number of ions is more or less proportional to the partial pressure of the substance giving rise to that peak (over some specified operating pressure range).
  • Page 67 Transpector MPS Operating Manual The material factor, M , depends on the fragmentation pattern for the particular substance, the fragmentation pattern for a reference gas (usually nitrogen), and the ease with which the substance can be ionized relative to the same reference gas.
  • Page 68 Transpector MPS Operating Manual Table 4-4 Typical fragmentation factors for the major peaks of some common substances Mass Mass Mass Acetone (CH Helium He Oxygen O 1.00 Hydrogen H 1.00 Toulene C Argon Ar Krypton Kr Benzene C Trichlorethylene C...
  • Page 69 Transpector MPS Operating Manual Ionization probability factors can be approximated by substituting the relative ion gauge sensitivities for various gases. Table 4-5 gives relative ion gauge sensitivities for some common gases. NOTE: Table 4-5 lists relative ionization gauge sensitivities for selected molecules.
  • Page 70 Transpector MPS Operating Manual Table 4-5 Ionization Probabilities for some Common Substances (continued) Relative Relative Ionization Ionization Substance Formula substance Formula Gauge Gauge Sensitivity Sensitivity cyclohexane propane deuterium 0.35 silver perchlorate AgClO dichlorodifluormethane stannic iodide dichloromethane sulfur dioxide dintrobenzene sulfur hexafluoride...
  • Page 71 Transpector MPS Operating Manual The overall relation between partial pressure and ion current, given in equation [5], is quite general. The constants for this equation can be obtained from various tables, but for the best accuracy, they should be measured for each instrument.

  • Page 72: Additional Information For Interpreting Mass Spectra

    4.1.3 Additional Information for Interpreting Mass Spectra 4.1.3.1 Ion Source Characteristics It is important to recognize that Transpector MPS (especially the ion source) and the vacuum system configuration can both have an effect on the relative concentrations of the gases detected. In order to minimize these effects, have the right type of ionizer, the right type of filament, and the right configuration of the vacuum system.

  • Page 73: Scanning Characteristics

    Pressure Analyzers and Analysis by Drinkwine and Lichtman for more information on EID/ESD. Transpector MPS is also characterized by varying degrees of mass discrimination; that is, the sensitivity of the instrument is a function of mass. Ion sources show mass discrimination because various substances offer different degrees of difficulty of ionization.

  • Page 74: Fragmentation Factors

    Transpector MPS Operating Manual characteristic provides a good degree of peak separation throughout the mass spectrum, but results in an ion transmission efficiency (i.e., the fraction of all ions of the selected mass entering the mass filter which are transmitted through it) that decreases as mass increases.

  • Page 75: Using Transpector Web Ui

    Using Transpector Web UI 5.1 Introduction Transpector MPS includes Transpector Web UI, an onboard, browser-based user interface (UI) that provides remote Transpector MPS control and monitoring from network connected devices. This chapter will discuss the purpose of, the requirements for running, and instructions for operating Transpector Web UI.

  • Page 76: System Requirements

    **Windows XP does not support Internet Explorer 9. Firefox or Chrome are recommended for use with Windows XP. † To use Wi-Fi, Transpector MPS must be connected to a Wi-Fi equipped router. 5.2.2 Using Transpector Web UI on Mobile Devices Transpector Web UI is optimized for 10.1 in.

  • Page 77: Connecting To Transpector Web Ui

    To connect to Transpector Web UI, the device that is being used for operating Transpector Web UI must be connected to the same network as Transpector MPS. If the device is not connected to the same network as Transpector MPS, Transpector Web UI will not work.
  • Page 78 Transpector MPS Operating Manual Figure 5-2 STATUS webpage If the Transpector Web UI STATUS webpage does not display, refresh the browser. If Transpector Web UI STATUS webpage still does not display, verify that the IP address was not changed from the factory default IP address. If the IP address...

  • Page 79: Connecting To Transpector Web Ui With A User-Defined Ip Address

    If the IP address has been changed from the default factory IP address, the new user-defined IP address must be entered into the browser. If the IP address was changed and the new address has been lost, contact INFICON. 5.4 Navigating Transpector Web UI Transpector Web UI functionality is split between several different windows.
  • Page 80 The STATUS window allows for changing IP address, Port Number, Sensor ID and Description. For more information, see section 5.5.2.4, Changing the Transpector MPS IP Address and Port Number, on page 5-22 section 5.5.2.5, Changing the Sensor ID and Description, on page 5-24.

  • Page 81: Monitor

    Figure 5-5 MONITOR window 5.4.3 LEAKCHECK The LEAKCHECK window, see Figure 5-6, is used for leak checking with Transpector MPS. For instructions on how to use the LEAKCHECK window, section 5.5.2.2, Leak Checking, on page 5-13. Figure 5-6 LEAKCHECK window 5 - 7...

  • Page 82: Diagnostics

    Transpector MPS Operating Manual 5.4.4 DIAGNOSTICS The DIAGNOSTICS window, see Figure 5-7, includes System Status and other diagnostic tools useful when contacting INFICON for assistance. Figure 5-7 DIAGNOSTICS window 5 - 8...

  • Page 83: Tune

    Transpector MPS Operating Manual 5.4.5 TUNE The TUNE window, see Figure 5-8, is password locked. It allows for tuning Transpector MPS. For tuning instructions, see section 5.5.2.3, Tune Mode, on page 5-16. Figure 5-8 TUNE window 5.4.6 HELP Click HELP to display the Transpector Web UI Operating Manual in a separate browser tab.

  • Page 84: Using Transpector Web Ui

    FabGuard Explorer is the primary software package for the Transpector MPS sensor, but there are instances when using Transpector Web UI is appropriate. FabGuard Explorer will give control of the Transpector MPS sensor to the Web UI if the RGA is idle.

  • Page 85: Editable Parameters

    100 AMU and 200 up to 200 AMU. Dwell ..... The amount of time that Transpector MPS averages data for each collected point.

  • Page 86: How To Change Scan Parameters

    Transpector MPS Operating Manual 5.5.2.1.2 How To Change Scan Parameters On the right side of the MONITOR window is a group for controlling EMISSION and EM. See Figure 5-9. In this group are editable boxes that change the scan parameters described in section 5.5.2.1.1.

  • Page 87: Leak Checking

    EM Voltage displays the voltage of the Electron Multiplier. 5.5.2.2 Leak Checking Transpector MPS is commonly used as a leak check tool by:  determining leaks while detecting helium that is sprayed by an operator and then monitoring the change in helium concentration ...

  • Page 88: Leak Check Components

    To manually set alarm levels, highlight the alarm level of interest, type the desired alarm level, then click SET. Transpector MPS Scan Parameters—Transpector MPS can use any mass for leak detection. To change the mass, highlight the mass shown in the MASS box, type the new desired mass, then click SET.
  • Page 89 Transpector MPS Operating Manual NOTE: ALARM/WARNING SETTINGS and Transpector MPS Scan Parameters each have a SET button next to the changeable parameters. The SET buttons are not interchangeable.  To change alarm and warning settings, click SET next to the ALARM and WARNING group.

  • Page 90: Using The Leak Check Mode

    5.5.2.3 Tune Mode Transpector Web UI allows for mass-scale tuning of Transpector MPS. Since tuning can alter the quality of data recorded by Transpector MPS, the TUNE window is password locked. To enter the TUNE window, click TUNE and type the password: Admin.

  • Page 91: Tune Mode Components

    Figure 5-14 Tune Mode components CHANGE TUNE MASSES—Click CHANGE TUNE MASSES to change the masses used for Transpector MPS tuning. The Tune Table Editor will display, which allows for editing the tune masses. See Figure 5-15.
  • Page 92 Transpector MPS scan. Click SET to send the parameters to Transpector MPS. DWELL....The amount of time that Transpector MPS averages data for each collected point.
  • Page 93 Transpector MPS to produce optimum tune quality. Do not alter this setting unless directed by INFICON. FILAMENT NUMBER..Transpector MPS has dual filaments. This allows for switching from one filament to the other.

  • Page 94: Default Tune Mode Parameters

    This tuning guide will only discuss fine tuning of the sensor. If the tune has been altered significantly, contact INFICON. In general, tuning Transpector MPS involves mass alignment (ensuring that the peak is aligned with the proper AMU) and width adjustment.
  • Page 95 0.9 ±0.05 Ensure that the emission has been on and the RGA has been scanning for 30 minutes prior to tuning. Transpector MPS can be tuned either with the EM on or off. Select the mass to tune using the TUNE MASSES drop-down.

  • Page 96: Changing The Transpector Mps Ip Address And Port Number

    The Transpector MPS IP address and Port Number are set on the STATUS window. NOTE: If you change the IP address of Transpector MPS, Transpector Web UI will no longer be accessible by the default IP address. You will need to reenter Transpector Web UI by entering the new IP address into the address box of the browser after the Transpector MPS has been turned off then on.

  • Page 97: Using Dhcp To Allow The Network To Assign An Ip Address

    Transpector MPS. 5.5.2.4.3 Changing the Port Number of Transpector MPS Transpector MPS is set with a default port number of 80. If this port is blocked by the network that Transpector MPS is installed on, the port number must be changed.

  • Page 98: Changing The Subnet Mask Of Transpector Mps

    5.5.2.4.5 Changing the Gateway of Transpector MPS Transpector MPS is set with a default gateway of 0.0.0.0. If the network on which Transpector MPS is connected requires a gateway: Connect Transpector MPS to a computer with a gateway of 0.0.0.0.

  • Page 99: Transpector Web Ui Best Known Methods

    To perform vacuum diagnostics, enter the MONITOR window of Transpector Web UI. After choosing the settings that are appropriate for the application, Transpector MPS will scan through the indicated mass range. A quick qualitative analysis can then be performed to determine what is present inside of the system.

  • Page 100: Generating Shortcuts For Quick Access

    Since Transpector Web UI is browser based, shortcuts can be generated that will open a browser and direct it to the attached webpage address. In this manner, remembering the IP address for one (or multiple) Transpector MPS sensors is not necessary. Creating shortcuts also allows for differentiating between different Transpector MPS when more than one is present on the network.
  • Page 101 Transpector MPS Operating Manual In the Create Shortcut window, paste the webpage address of Transpector Web UI. See Figure 5-20. Figure 5-20 Paste webpage address Click NEXT. See Figure 5-21. Figure 5-21 Next 5 - 27...

  • Page 102: Creating Bookmarks

    Figure 5-24. Figure 5-24 Shortcut icon CAUTION If you change the IP address of Transpector MPS, the shortcuts will no longer work. 5.6.3 Creating Bookmarks In addition to creating shortcuts on the computer Desktop, bookmarks can also be generated inside of the internet browser. To set a bookmark, click CTRL + d when at the intended webpage address.

  • Page 103: Using Wi-Fi

    If Transpector Web UI starts working, it is likely that Transpector MPS has a conflict with its IP address (another device on the network has the same IP address) or the port that Transpector MPS is using is being blocked by the network/router. See section 5.5.2.4, Changing the Transpector MPS...

  • Page 104: Introduction

    Transpector MPS Operating Manual Chapter 6 Maintenance 6.1 Introduction The Transpector MPS sensor is subject to aging in normal use and some of its components will eventually require repair or replacement. The Transpector MPS electronics module does not normally require repair or maintenance.

  • Page 105: Electrical Voltages

    Transpector MPS Operating Manual 6.2.3 Electrical Voltages Transpector MPS does not present electrical hazards when enclosed and grounded according to the specifications given in the installation instructions. WARNING - Risk Of Electric Shock If the Transpector MPS electronics module is operated while open, hazardous electrical voltages may be present.

  • Page 106: Maintenance Procedures

    6.4.2 Spare Heating Jacket Part Numbers INFICON offers several heating jackets to help in baking a sensor. These heating  jackets operate at a maximum temperature of 150 Heating jacket part numbers are shown in Table 10-1 on page 10-1.

  • Page 107: Repair Procedures

    Transpector MPS Operating Manual 6.5 Repair Procedures The sensor repair procedures are discussed in the following sections. 6.5.1 Tools Required for Filament Kit Replacement, Ion Source Replacement and EM Replacement 6.5.1.1 Tools for Replacing the Filament Kit  3 mm Nut Driver ...

  • Page 108: How To Determine If A Filament Kit Replacement Is Required

    6.5.2 How to Determine if a Filament Kit Replacement is Required Follow these steps to determine if a filament replacement is required. Remember that Transpector MPS has dual filaments, so if one filament is blown, but the second filament is intact, Transpector MPS can still be used with the second filament.

  • Page 109: Filament Kit Replacement

    6.5.3 Filament Kit Replacement A filament replacement kit can be purchased from INFICON. This kit contains a new filament assembly mounted on a shipping fixture and a small Allen wrench. Perform the following steps to replace the filament.
  • Page 110 Transpector MPS Operating Manual While holding the clamps with the pliers, use the flat blade screwdriver to loosen the clamps holding the filament leads (B). Gently pull the leads away from the filament assembly. See Figure 6-3. Figure 6-3 Remove the leads Carefully pull the filament assembly from the ion source.
  • Page 111 Transpector MPS Operating Manual Carefully remove the new filament assembly from its packaging and place it on the ion source standoffs. CAUTION The new filament assembly must be carefully placed onto the ion source. Excessive horizontal movement will cause the damage to the anode.

  • Page 112: Ion Source Removal

    Transpector MPS Operating Manual 6.5.4 Ion Source Removal The following steps should be performed to remove the ion source: NOTE: See section 6.5.1.2, Tools for Replacing the Ion Source, on page 6-4 before continuing. While holding the clamps with the pliers, use the flat blade screwdriver to loosen the clamps holding the filament leads (A) and ion source leads (B - one is hidden in the figure).
  • Page 113 Transpector MPS Operating Manual Using the Phillips head screwdriver, remove the gold screws (C - one is hidden in the figure) that hold the ion source onto the quadrupole. There are three screws in total. See Figure 6-7. Figure 6-7 Remove screws holding ion source Remove the ion source by lifting it off the quadrupole assembly.

  • Page 114: Electron Multiplier Replacement

    Transpector MPS Operating Manual 6.5.5 Electron Multiplier Replacement The following steps should be performed to remove the ion source: NOTE: See section 6.5.1.3, Tools for Replacing the Electron Multiplier, on page before continuing. While holding the clamps with the pliers, use the flat blade screwdriver to loosen the clamps holding the filament leads (A) and ion source leads (B - one is hidden in the figure).
  • Page 115 Transpector MPS Operating Manual Using the 2.0 mm x 75 mm hex driver, unscrew the three screws (D - one is hidden in the figure) holding the sensor assembly to the feedthrough. Gently remove the sensor assembly from the feedthrough. See Figure 6-9.
  • Page 116 Transpector MPS Operating Manual Using the Phillips head screwdriver, remove the three gold screws (E - one is hidden in the figure) holding the EM assembly inside of the sensor assembly. Figure 6-10. Figure 6-10 Removing the screws holding the EM Gripping the bottom of the EM assembly, gently remove the EM from the sensor assembly.
  • Page 117 When installing the sensor back into the feedthrough, ensure that the two pins on the bottom of the detector align with the two pins shown in Figure 6-13. Figure 6-13 Pin location Detector Pins Reverse steps 1-4 to reassemble the Transpector MPS sensor. 6 - 14...

  • Page 118: Calibration

    6.6 Calibration 6.6.1 Mass Alignment Transpector MPS is tuned such that it generates a known RF/DC ratio that allows one mass to exit the quadrupole at a time. When tuning the mass scale of Transpector MPS, the RF/DC ratio is fine tuned to each tune mass.

  • Page 119: Selecting Tune Masses

    In some applications, it can be useful to have a test mix manufactured by a gas supplier. The ideal mix would include the factory tune masses for the mass range of Transpector MPS to be tuned. The factory tune masses can be found in section 6.6.1.1 on page...

  • Page 120: Tuning With Background Gases

    Transpector MPS Operating Manual 6.6.1.2.3 Tuning with Background Gases Mass 4 must be calibrated for proper leak detection. If Transpector MPS is used as a leak detector, make sure that Helium is available for tuning. If Transpector MPS is only used for leak checking, mass 4 is the only mass to tune. To tune mass 4, find a way to introduce Helium into the vacuum chamber.

  • Page 121: Diagnosing Problems

    Diagnosing Problems 7.1 Introduction If you are experiencing trouble with Transpector MPS, first look at Table 7-1 see if the problem is listed there. If not, contact INFICON (refer to section 1.3, How To Contact Customer Support, on page 1-3).
  • Page 122 Transpector MPS Operating Manual Table 7-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY EMISSION error (Cold Defective sensor filament Check sensor with OHM Start, Warm Start) open, shorted meter. Replace sensor or filament. Electronics failure Return to INFICON for repair. Insufficient vacuum Verify pressure is less than 5E-4 Torr.
  • Page 123 Transpector MPS Operating Manual Table 7-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY Temperature error Transpector MPS internal Verify unit is installed ambient temp >70°C properly, ambient temp <50°C. Verify that there are no heat sources in local proximity. Verify that internal fan is running.
  • Page 124 Transpector MPS Operating Manual Table 7-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY Peakfind Error No Peak at target mass Upload original configuration file. Return Electronics box to INFICON for repair. Filament Potential Insufficient vacuum Verify pressure is less than Error 5E-4 Torr.
  • Page 125 Transpector MPS Operating Manual Table 7-1 Symptom—Cause—Remedy Chart (continued) SYMPTOM CAUSE REMEDY Poor Sensor contaminated Degas sensor. sensitivity Bake-out sensor. Service sensor. System pressure too low Increase sample pressure, if possible. Mass calibration (resolution) Adjust Mass Calibration, increase peak width.

  • Page 126: Communication Problems

    Is the Ethernet cable connected to Transpector MPS and the host computer (either directly or through a router/switch)?  Does the Transpector MPS IP address have the same network prefix as the host computer?  Is Port 80 open on the host computer? Is there an IP address conflict between Transpector MPS and another network ...
  • Page 127 Transpector MPS Operating Manual Chapter 8 Bibliography For further information on partial pressure analyzers, see Partial Pressure Analyzers and Analysis, M. J. Drinkwine and D. Lichtman, American Vacuum Society Monograph Series, or A User’s Guide to Vacuum Technology, J. F.

  • Page 128: Glossary

    Transpector MPS Operating Manual Chapter 9 Glossary Anode The anode is the structure in the ion source in which ions are created by electron impact. It can be formed from a mesh, such as in the open ion source, or from a solid tube, such as in the closed ion source. Its electrical potential is positive with respect to the filament, focus lens, total pressure plate, pole zero, exit aperture and Faraday cup.
  • Page 129 Transpector MPS Operating Manual Detection Factor The detection factor is the ratio of the detected signal for a given ion current from a certain substance to the detected signal for the same ion current of nitrogen ions as measured at mass 28. For Faraday cup detectors, the detection factor is usually 1.
  • Page 130 Transpector MPS Operating Manual Focus Lens The focus lens is a conductive aperture located next to, and usually biased negatively with respect to, the anode. Its purpose is to draw the ions out of the anode, form them into a beam, and focus them into the next lens element.
  • Page 131 Transpector MPS Operating Manual Ionization Probability The ionization probability for a chemical substance is the ratio of the total ion current (at all masses) produced from a given partial pressure of that substance, to the total ion current produced from nitrogen at the same partial pressure.
  • Page 132 Transpector MPS Operating Manual Material Factor The material factor for a chemical substance is that part of the proportionality constant between the partial pressure of that substance and the resulting mass filtered ion current which depends on the chemical nature of that substance but not the particular instrument used for that measurement.
  • Page 133 Transpector MPS Operating Manual Partial Pressure The partial pressure is the pressure of a specific chemical component of a gas mixture. The sum of all the partial pressures is the total pressure. Pole Zero See Center Voltage. Quadrupole A quadrupole is a mass filter consisting of four parallel electrodes or poles (hence quadrupole) arranged in a square array.
  • Page 134 Transpector MPS Operating Manual Total Pressure Plate The total pressure plate, or collector, is an electrode in the ion source on which at least a part of the ion beam impinges. The current striking this plate is a function of the total pressure in the ion source.

  • Page 135: Transpector Mps Accessories And Spare Parts

    Transpector MPS Operating Manual Chapter 10 Transpector MPS Accessories and Spare Parts 10.1 Introduction Transpector MPS has several accessories and spare parts for purchase. This section lists these parts and provides their INFICON part numbers. 10.2 MPS Accessories Table 10-1 Transpector MPS accessories...

  • Page 136: Replacement Spare Parts

    10.3.3 Spare Transpector MPS Electronics Boxes Table 10-4 Spare Transpector MPS electronics boxes Part Number Description MP-S10S Transpector MPS 100 AMU FC or EM/FC (MPS100F, MPS100M) w/ Ethernet MP-S20S Transpector MPS 200 AMU FC or EM/FC (MPS200F, MPS200M) w/ Ethernet...

  • Page 137: Spare Transpector Mps Sensors

    Transpector MPS Operating Manual 10.3.4 Spare Transpector MPS Sensors Table 10-5 Spare Transpector MPS sensors Part Number Description 961-S1FAS Transpector MPS 100 AMU FC (MPS100F) Y /Ir Filaments 961-S1MAS Transpector MPS 100 AMU EM/FC (MPS100M) Y /Ir Filaments 961-S2FAS Transpector MPS 200 AMU FC (MPS200F) Y...

  • Page 138: Specifications

    Chapter 11 Specifications 11.1 Introduction The following sections detail the specifications for the Transpector MPS Gas Analysis System. As a result of INFICON continuing product improvement and quality assurance programs, these specifications are subject to change without notice or obligation.

  • Page 139: Temperature Coefficient

    Transpector MPS Operating Manual 11.6 Temperature Coefficient During an eight hour period, after thirty minutes of warm up MPS100F MPS100M MPS200F MPS200M For FC Only—Less than 1% of peak height per °C 11.7 Sensitivity Amps/Torr [mbar] (Pa) MPS100F MPS100M MPS200F...

  • Page 140: Maximum Operating Pressure

    Transpector MPS Operating Manual 11.10 Maximum Operating Pressure Torr [mbar] (Pa) MPS100F MPS100M MPS200F MPS200M 5x10 [6.7x10 (6.7x10 11.11 Maximum Sensor Operating Temperature Degrees C MPS100F MPS100M MPS200F MPS200M 200°C 200°C 200°C 200°C 150°C 150°C 11.12 Maximum Bakeout Temperature Degrees C — with electronics removed...

  • Page 141: Ethernet Communication Interface

    Transpector MPS Operating Manual 11.15 Ethernet Communication Interface MPS100F MPS100M MPS200F MPS200M Standard: Cat5e Ethernet Cable Connection 11.16 Relay Outputs MPS100F MPS100M MPS200F MPS200M 1 relay, 24 V at 0.5 amps 11.17 Inputs MPS100F MPS100M MPS200F MPS200M 1 Analog Input, 2 Digital Inputs 11.18 LED Indicators (Green)

  • Page 142: Supplied Items

    Transpector MPS Operating Manual Chapter 12 Supplied Items 12.1 Introduction You will receive the following:  A Ship Kit. See section 12.1.1 on page 12-1.  An Electronics Module. See section 12.1.2 on page 12-2. A Sensor. See section 12.1.4 on page 12-2.

  • Page 143: Electronics Module

    Table 12-2 Electronics module (one of the following) Part Number Description MP-S10P Transpector MPS 100 AMU FC and EM/FC Electronics Box MP-S20P Transpector MPS 200 AMU FC and EM/FC Electronics Box 12.1.3 Power Supply Table 12-3 Power supply Part Number...

  • Page 144: Extension Kit

    12.1.7 Heating Jacket System (Optional) Table 12-7 Heating jacket system (optional) (one of the following) (optional) 961-029-G1 Transpector MPS Heater Kit - 120 V (ac) 961-029-G2 Transpector MPS Heater Kit - 230 V (ac) 12.1.8 Angle Valve (Optional) Table 12-8 Angle valve (optional)
  • Page 145 Transpector MPS Operating Manual Index doubly charged ion altitude range analyzer factor 4-8, 4-12 electron energy 3-4, anode electron multiplier error electron stimulated desorption 4-15 voltage electronics enclosure 11-4 anti-seize compound 1-11 electronics module 1-5, 12-2 appearance potential physical dimensions...
  • Page 146 Transpector MPS Operating Manual cage pass band width current 3-10, peak height detector 3-10 peak shape, poor doubly charged perimeter for maintenance access energy 3-7, pole zero 3-7, intensity pollution degree low mass power mass-to-charge ratio input 11-3 multiply charged...
  • Page 147 Transpector MPS Operating Manual spinning rotor gauge 4-11 supply voltage surface film 3-13 temperature bakeout 11-3 coefficient 11-2 error max operating 11-3 operating 11-3 operating range total pressure total pressure plate transition flow transmission factor 4-12, 4-13, tuned 4-16 tungsten hexafluoride...
  • Page 148 Transpector MPS Operating Manual ® www.inficon.com re achus@inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. All trademarks are the property of their respective owners. PN 074-603-P1B © 2016 INFICON...

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