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Inficon Transpector MPH Operating Manual

Gas analysis system
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Transpector MPH
®
Gas Analysis System
PN 074-555-P1C

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Summary of Contents for Inficon Transpector MPH

  • Page 1 Cover Page Transpector MPH ® Gas Analysis System PN 074-555-P1C...
  • Page 2 The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
  • Page 3 Declaration Of Conformity Page 1...
  • Page 4 Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer. This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.

  • Page 5: Table Of Contents

    1.3.1 Returning Your Transpector MPH to INFICON ..... . 1-3 Quick Start ..........1-4 Purpose of the Transpector MPH Gas Analysis System .
  • Page 6 Transpector MPH IP Address........2-3...
  • Page 7 Windows XP Instructions ........2-11 Connecting Transpector MPH ........2-14 2.4.1...
  • Page 8 Tuning Transpector MPH ........
  • Page 9 Transpector MPH Operating Manual 5.6.1 When to Use Transpector Web UI ....... 5-27 5.6.1.1...
  • Page 10 10.3 Transpector MPH Spare Parts ........10-2 10.3.1...
  • Page 11 Transpector MPH Operating Manual 11.17 Inputs ........... . . 11-4 11.18...

  • Page 12: Getting Started

    Transpector Web UI onboard web server. This chapter provides an overview of the Transpector MPH Gas Analysis System. Topics include: the purpose of Transpector MPH, its specifications, a list of supplied items, installation instructions and customer support contact information.

  • Page 13: Using This Manual

    Transpector MPH Operating Manual 1.2 Using This Manual Please read this Operating Manual before operating Transpector MPH. 1.2.1 Note and Hint Paragraphs NOTE: This is a note paragraph. Notes provide additional information about the current topic. HINT: This is a hint paragraph. Hints provide insight into product usage.

  • Page 14: How To Contact Customer Support

    Sales and Customer Service   Technical Support  Repair Service If you are experiencing a problem with Transpector MPH, please have the following information readily available:  the Transpector MPH serial number  a description of the problem ...

  • Page 15: Quick Start

    Transpector MPH Operating Manual 1.4 Quick Start Read this operating manual in full prior to operating Transpector MPH. Then, follow the steps below to quickly start using Transpector MPH. Ensure that all supplied items have been received. See Chapter Supplied Items.

  • Page 16: General Description Of The Transpector Mph

    Transpector MPH Operating Manual 1.6 General Description of the Transpector MPH Gas Analysis System The Transpector MPH Gas Analysis System is comprised of three parts: Sensor The sensor functions only in a high-vacuum environment with pressures below 5 x 10 Torr (6.7 x 10...

  • Page 17: Physical Requirements

    50 mm 421.6 mm MPH300M (7.83 in.) (1.98 in.) (16.60 in.) 1.9.2 Weight The Transpector MPH electronics module weighs 1.53 kg (3 lb. 6 oz.). The Transpector MPH systems total weight depends on which sensors are used. 1 - 6...

  • Page 18: Mounting Requirements

    The electronics module attaches to and is supported by the sensor. Transpector MPH can be mounted in any position. 1.9.4 Ventilation Requirements At least 25.4 mm (1 in.) of open space around the Transpector MPH electronics module must be maintained for proper ventilation. 1.9.5 Maintenance Access Easy access to Transpector MPH should be maintained for installation and maintenance activities.

  • Page 19: Overvoltage Category

    Transpector MPH. 1.13.1 Use Transpector MPH is designed for indoor use only. 1.13.2 Altitude Range Transpector MPH can be used up to a maximum altitude range of 2000 m (6561 ft.). 1.13.3 Pollution Degree Pollution Degree 2 (per EN61010-1) 1.13.4 Operating Temperature...

  • Page 20: Hardware Installation

    1.16.3 on page 1-15. If the optional extension tube heater was purchased with Transpector MPH, see section 1.20, Installing the Heater Jacket Mount Kit (Optional), on page 1-25 installation instructions. If the optional Pirani Interlock was purchased with Transpector MPH, see section 1.17, Installing the Pirani Interlock (Optional), on page 1-16...

  • Page 21: Conflat Flanges

    Transpector MPH Operating Manual 1.16.1.1 ConFlat Flanges The sensor is installed on a vacuum system with a 2.75 in. DN40 ConFlat flange. ConFlat flanges, and similar compatible types made by other manufacturers, are used for attaching devices to ports on high vacuum systems. If there are no concerns with the installation of this type of flange, proceed to section 1.16.1.2,...
  • Page 22 Transpector MPH Operating Manual Bring the two flanges together making sure that the gasket fits in the recess in both flanges. Flange faces should be parallel. If the gasket is properly seated, it should not be possible to slide the two flanges laterally with respect to each other.
  • Page 23 Otherwise, there may be interference between the black INFICON Transpector mounting nut and sensor mounting hardware. 1 - 12...
  • Page 24 MPH100M/200M/300M 150°C 300°C CAUTION The Transpector MPH electronics module must be removed prior to bakeout at temperatures greater than 200°C (FC). Do not turn on the Electron Multiplier (EM) at sensor temperatures above 150°C. Turning on the EM at elevated temperature could result in permanent damage to the detector.

  • Page 25: Electronics Module Installation

    Transpector MPH Operating Manual 1.16.2 Electronics Module Installation The Transpector MPH electronics module must be mounted in an area where the ambient temperature does not exceed 50°C and there is free air circulation around the electronics module. Best performance will be achieved if the electronics module is not located close to major heat sources where it is subjected to wide temperature variations.

  • Page 26: Installing Ethernet Communications

    90-260 V(ac), 40 W maximum, 47-63 Hz. Plug the AC line cord into an appropriate AC outlet. Verify that the green power indicator on the Transpector MPH back panel is illuminated. If the green indicator is not illuminated, check the power connections.

  • Page 27: Installing The Pirani Interlock (Optional)

    Transpector MPH Operating Manual 1.17 Installing the Pirani Interlock (Optional) Transpector MPH has an optional Pirani Interlock. Transpector MPH with the Pirani Interlock kit adds the following parts to all standard Transpector MPH shipped items (see Figure 1-7): (1) Special extension flange with a 4-VCR fitting (and installed sensor)

  • Page 28: Installing The Pirani Gauge On To The Extension Flange

    Figure 1-8 Connecting the Pirani to the flange 1.17.2 Installing the Extension Flange and Sensor onto the Vacuum System Installation instructions for the extension flange, sensor and electronics module are identical to the instructions for a standard Transpector MPH. Refer to Hardware Installation on page 1-9.

  • Page 29: Connecting The Pirani Interlock Cable

    The Pirani gauge is fully powered by the Transpector MPH Auxilliary I/O connection. Install the RJ-45 connection of the interlock cable into the gauge and connect the 15-pin D-Sub connection to the Auxilliary I/O port of Transpector MPH. Figure 1-9.

  • Page 30: Installing The Hpr Calibration Reference (Optional)

    Transpector MPH Operating Manual 1.18 Installing the HPR Calibration Reference (Optional) Transpector MPH has an optional calibration reference, with a choice of argon or a standard gas mixture (selected impurities in argon). This calibration reference provides:  a means to tune the RGA ...

  • Page 31: Installing The Calibration Reference On To The Extension Flange

    Transpector MPH Operating Manual 1.18.1 Installing the Calibration Reference on to the Extension Flange Install the VCR gasket into the female port of the extension flange. Connect the 4-VCR male connection of the calibration reference to the 4-VCR female connection of the extension flange. See Figure 1-11.
  • Page 32 Transpector MPH Operating Manual Connect the supplied 1/8 in. nylon hose into the 1/8 in. connection of the solenoid. Connect the other end of the 1/8 in. nylon hose into the 1/8 in. gas connection of the HPR valve. See Figure 1-13.

  • Page 33: Installing The Extension Flange, Sensor, And Electronics Module

    Hardware Installation, section 1.16 on page 1-9. 1.18.3 Connecting the HPR Valve Control Cable The HPR solenoid is powered by the Transpector MPH Auxilliary I/O connection. Connect the 15-Pin D-Sub connection to the Aux I/O port of the Transpector MPH electronics module. 1 - 22...

  • Page 34: Input/Output (I/O)

    Transpector MPH Operating Manual 1.19 Input/Output (I/O) This section describes the input and output (I/O) for Transpector MPH. The Transpector MPH electronics module supports the following I/O functions through the AUX I/O connector located on the back panel. See Figure 1-16.
  • Page 35 Transpector MPH Operating Manual 1 - 24...

  • Page 36: One Analog Input

    NOTE: The analog input is supported through FabGuard software. 1.20 Installing the Heater Jacket Mount Kit (Optional) The Transpector MPH Heater Jacket Mount Kit (961-433-G1) provided with Heating Jacket Kit (961-029) is intended to inhibit the movement of the Manifold Heater.
  • Page 37 Transpector MPH Operating Manual Figure 1-17 Heater jacket mount kit installation Internal Heater Bracket provided in kit 961-433-G1 Sensor Flange Snap in Manifold Heater Transpector MPH Hex head fastener provided in kit 961-433-G1 Manifold Heater 961-416-P1 provided in kit 961-029...

  • Page 38: Introduction

     Dynamic (automatic) IP addresses are automatically set by a Host INFICON recommends using Static IP addresses for Transpector MPH but allows for Dynamic IP addresses set through DHCP (Dynamic Host Communication Protocol). NOTE: When using Static IP addresses, a block of addresses should be reserved for Static use and prohibited from being assigned by the DHCP server (Host).
  • Page 39 Static IP addresses help protect Transpector MPH from losing communication and data. Transpector MPH uses IPv4 IP addresses. IPv4 IP addresses consist of 32 bits that are traditionally displayed in dot-decimal notation which consists of four decimal numbers each ranging from 0 to 255 separated by dots. An example of an IP address in dot-decimal notation would be 192.168.1.100.
  • Page 40 2.3 Transpector MPH IP Address By default, Transpector MPH ships with an IP address of 192.168.1.100 with a subnet mask of 255.255.0.0. NOTE: When connecting Transpector MPH to an existing local network, there must be a static IP address for each Transpector MPH being installed.
  • Page 41 Transpector MPH Operating Manual 2.3.1.1 Using the INFICON Mass Spectrometer Search Utility to Change the IP Address The alternative method of changing the Transpector MPH IP address employs the INFICON Mass Spectrometer Search Utility (IMSSU), a standalone executable found on the software installation disk and the RGA Manuals CD that ships with each Transpector MPH.
  • Page 42  the current Transpector MPH IP address  a Change To text box, to enter the new Transpector MPH IP address  a selection of either DHCP On or DHCP Off To change the IP address, type the new IP address in the Change To box and click Apply.
  • Page 43 Find Device On. Show Settings Click Show Settings to open a display on the right-side of the IMSSU that will display multiple settings of Transpector MPH. This is an excellent tool for troubleshooting. The following settings are displayed:  Serial Number ...
  • Page 44 Transpector MPH Operating Manual 2.3.1.2 Changing the Computer IP Address An alternative to changing the Transpector MPH IP address is to change the host computer’s IP address to allow for communication between the host computer and Transpector MPH. To change the computer’s IP address, follow these instructions: 2.3.1.2.1 Windows 7 Instructions...
  • Page 45 On the network status and tasks window, click Change adapter settings. Figure 2-6 Change adapter settings If the host computer is connected to Transpector MPH through the Ethernet port of the computer, right-click Local Area Connection and select Properties. See Figure 2-7.
  • Page 46 Transpector MPH Operating Manual Select Internet Protocol Version 4 (TCP/IPv4), then click Properties. Figure 2-8. Figure 2-8 TCP/IPv4 In the TCP/IPv4 properties menu, select Use the following IP address. Figure 2-9. Figure 2-9 Use the following IP address 2 - 9...
  • Page 47 The IP address will now be set to the manual IP address chosen in step 7. Exit all of the menus and then connect to Transpector MPH. To change the IP address back to its default settings, follow steps 1 through 6 and return the IPv4 properties to their original settings.
  • Page 48 Transpector MPH Operating Manual 2.3.1.2.2 Windows XP Instructions Click Start to display the Start menu, then click Control Panel. Start is located on the taskbar on the Windows XP desktop. See Figure 2-11. Figure 2-11 XP Start Menu On the Control Panel, click Network and Internet Connections.
  • Page 49 Transpector MPH Operating Manual In the Network and Internet Connections window, click Network Connections. See Figure 2-13. Figure 2-13 Network and Internet Connections Double-click the Local Area Connection icon. See Figure 2-14. NOTE: The icon may have a number after it if more than one connection has been installed.
  • Page 50 Transpector MPH Operating Manual Click Properties. See Figure 2-15. Figure 2-15 Local Area Connection Status Select Internet Protocol (TCP/IP), then click Properties. Figure 2-16 Local Area Connection Properties Select Use the Following IP Address and enter in the desired IP address.

  • Page 51: Connecting A Single Transpector Mph

    Transpector MPH has a different network prefix than Transpector MPH. The network prefix of Transpector MPH is 192.168.x.x. The IP address of the host computer used to control Transpector MPH must have a subnet mask of 255.255.0.0 and a network prefix of 192.168.x.x.

  • Page 52: Installing Multiple Transpector Mph Sensors

    2.4.2 Installing Multiple Transpector MPH Sensors Since each Transpector MPH is shipped with the same default IP address, the IP address of each Transpector MPH must be changed one at a time so that each sensor has a unique IP address. See section 2.3.1, Changing Transpector MPH...

  • Page 53: How The Instrument Works

    Chapter 4, Applications Guide. 3.2 Overview Transpector MPH Gas Analysis System is a quadrupole based Residual Gas Analyzer which analyzes the presence and relative abundance of gases in a mixture. Transpector MPH Gas Analysis System consists of three parts: ...

  • Page 54: The Ion Source

    3.3 The Ion Source The ion source of Transpector MPH is optimized for detecting residual gases in a vacuum system. The sensor has an open construction that facilitates the flow of gas species into the ionization region.
  • Page 55 Transpector MPH Operating Manual Figure 3-2 Sensor’s ion source Electron Repeller Filament (Cathode) Anode (with Cage) Focus Lens Source Exit Lens 3 - 3...
  • Page 56 Transpector MPH Operating Manual Transpector MPH offers two different types of filaments:  Dual Yttria-coated Iridium filament  Dual Tungsten filament (option) Emission current refers to the stream of electrons emitted by the filament. The filament is heated with a DC current from the emission regulator circuit, with the resulting temperature of the filament used as the means of controlling the emission current.

  • Page 57: Choosing The Proper Filament

    3.3.1 Choosing the Proper Filament Dual Yttria-coated Iridium and the optional Dual Tungsten filaments are available for Transpector MPH. Determining which one should be used for a specific application can be difficult. This section will detail the different scenarios wherein one filament type is preferred over the other.

  • Page 58: The Quadrupole Mass Filter

    Most ions contain only one unit of charge. In Transpector MPH, the mass filter is a quadrupole type, to which a combination of RF and DC potentials is applied. The RF frequency and amplitude determine the mass/charge ratio, and the RF/DC ratio determines the filter sensitivity.
  • Page 59 Transpector MPH Operating Manual The applied potentials consist of an RF component and a DC component. The RF potential on one set of rods is out of phase by 180° with respect to the RF potential on the other set of rods, but of the same amplitude. For one pair of rods, the “X”...

  • Page 60: Scanning Characteristics

    Transpector MPH Operating Manual The mass of ions transmitted ( ) is directly proportional to the RF amplitude (provided is constant). As the RF amplitude is increased, progressively higher mass ions will be made to oscillate in phase with the RF field and thus gain sufficient energy to strike the poles.

  • Page 61: The Zero Blast

    1 and 2 when significant quantities of higher-mass ions are present. In some instruments, the magnitude of the zero blast is concealed by preventing the voltages from reaching zero. With Transpector MPH, the zero blast only produces parts-per-million interference to masses 1 and 2.

  • Page 62: The Ion Detector

    Ions strike the detector and are neutralized, thus drawing a current from the circuitry connected to the electrode. Usually, the current flow that results is exactly equal to the incident ion current. In Transpector MPH instruments, the Faraday Cup is at ground potential.

  • Page 63: The Electron Multiplier (Em) Detector

    500 amps/Torr), thus making it possible to measure partial pressures as low as 2 x 10 Torr for a 100 AMU Transpector MPH sensor. A typical Faraday Cup sensor of the same mass range would have a sensitivity of only 6 x 10...

  • Page 64: The Continuous Dynode Electron Multiplier/Faraday Cup Detector

    In CDEM/FC detectors, the EM cone amplifies the electron pulse, significantly increasing the analyzer’s sensitivity. The Transpector MPH CDEM/FC detector uses a continuous dynode element made of a special type of glass, rather than discrete dynode EMs, which are made from a copper-beryllium alloy.
  • Page 65 Transpector MPH Operating Manual CAUTION Do not operate the CDEM at temperatures above 150°C. Permanent damage may result. Also, avoid output currents in excess of 1 x 10 amps; either decrease the high voltage or, if possible, decrease the pressure.

  • Page 66: Applications Guide

    Works. 4.1.1 Qualitative Interpretation of Mass Spectra The basic graphical output of a Transpector MPH is the mass spectrum. A mass spectrum is a plot of ion intensity as a function of ion mass-to-charge ratio. Each chemical substance has a characteristic mass spectrum. Different instruments will give slightly different spectra for the same substance.

  • Page 67: Ionization Process

    Transpector MPH Operating Manual Figure 4-1 Example mass spectrum The bottom graph is a trend analysis showing the most important masses versus time. The top graph shows the data taken during the scan and shows the air spectra over a six decade y-axis. The prominent peaks for air are mass 28 from Nitrogen, mass 32 from Oxygen, mass 40 from Argon and mass 18 from water vapor.

  • Page 68: Isotope Ratios

    There are some situations when it is difficult to determine whether the ion is singly or multiply charged. When a molecule is composed of two atoms of the same element, Transpector MPH has difficulty distinguishing between the singly-charged one atom fragment ion and the doubly-charged two atom molecular ion; which will both have the same mass-to-charge ratio.
  • Page 69 Transpector MPH Operating Manual Some elements have many intense isotopes (e.g., xenon is 0.096% mass 124, 0.090% mass 126, 1.92% mass 128, 26.44% mass 129, 4.08% mass 130, 21.18% mass 131, 26.89% mass 132, 10.44% mass 134, and 8.87% mass 136).

  • Page 70: Electron Energy Effects

    Transpector MPH Operating Manual Table 4-2 Isotope ratios (continued) Isotope Ratios Relative Element Mass No. Abundance 4.18 0.016 75.4 24.6 0.337 0.063 99.600 4.1.1.3 Electron Energy Effects The exact fragmentation pattern observed will depend on the energy of the bombarding electrons.

  • Page 71: A Qualitative Interpretation Guide

    100 eV. The appearance potential for is approximately 85 eV, while the appearance potential for Ar is over 200 eV. 4.1.1.4 A Qualitative Interpretation Guide To use Transpector MPH to identify unknown substances, three characteristics must be recognized:  fragmentation patterns ...
  • Page 72 Transpector MPH Operating Manual Table 4-3 Spectrum Interpretation Guide (continued) Spectrum Interpretation Guide AMU # Chemical Symbol Sources methane F or Note 1 O, CH , NH oxygen or carbon monoxide F, ammonia OH, NH water F, ammonia F water...

  • Page 73: Quantitative Interpretation Of Mass Spectra

    By Dalton’s Law, the sum of all the partial pressures is the total pressure. Transpector MPH is designed so that the height of a peak in a mass spectrum is proportional to the number of ions giving rise to that peak. Also by design, the number of ions is more or less proportional to the partial pressure of the substance giving rise to that peak (over some specified operating pressure range).
  • Page 74 Transpector MPH Operating Manual The proportionality constant, K , depends on the nature of the substance being detected and on the characteristics of Transpector MPH. The substance dependent part is called the material factor, M . The instrument dependent part is called the analyzer factor, A , and depends primarily on the ion mass, b.
  • Page 75 Transpector MPH Operating Manual Table 4-4 Typical fragmentation factors for the major peaks of some common substances Mass Mass Mass acetone (CH helium He oxygen O 0.63 1.00 0.95 0.23 0.05 0.04 hydrogen H 0.03 1.00 toulene C 0.46 argon Ar 0.34...
  • Page 76 Transpector MPH Operating Manual Ionization probability factors can be approximated by substituting the relative ion gauge sensitivities for various gases. Table 4-5 gives relative ion gauge sensitivities for some common gases. NOTE: The data was compiled from Empirical Observations on the Sensitivity of Hot Cathode Ionization Type Vacuum Gauges by R.
  • Page 77 Transpector MPH Operating Manual Table 4-5 Ionization Probabilities for some Common Substances (continued) Relative Relative Ionization Ionization Substance Formula Substance Formula Gauge Gauge Sensitivity Sensitivity cyclohexane propane deuterium 0.35 silver perchlorate AgClO dichlorodifluormethane stannic iodide dichloromethane sulfur dioxide dintrobenzene sulfur hexafluoride...
  • Page 78 Transpector MPH Operating Manual The overall relation between partial pressure and ion current, given in equation [5], is quite general. The constants for this equation can be obtained from various tables, but for the best accuracy, they should be measured for each instrument.

  • Page 79: Additional Information For Interpreting Mass Spectra

    Vacuum Technology, has a brief discussion (in Chapter 8, Section 2) of some of these concerns. When using Transpector MPH as a residual gas analyzer, the sensor should be installed such that the conductance between the ion source and the vacuum region to be analyzed is maximized.

  • Page 80: Scanning Characteristics

    Pressure Analyzers and Analysis by Drinkwine and Lichtman for more information on EID/ESD. Transpector MPH is also characterized by varying degrees of mass discrimination; that is, the sensitivity of the instrument is a function of mass. Ion sources show mass discrimination because various substances offer different degrees of difficulty of ionization.

  • Page 81: Fragmentation Factors

    Transpector MPH Operating Manual spectrum, but results in an ion transmission efficiency (i.e., the fraction of all ions of the selected mass entering the mass filter which are transmitted through it) that decreases as mass increases. The way the mass scale is calibrated or tuned (i.e., the way the peak positions and widths are adjusted) can have a significant effect on the transmission efficiency of the mass filter across the mass spectrum.

  • Page 82: Using Transpector Web Ui

    Using Transpector Web UI 5.1 Introduction Transpector MPH includes Transpector Web UI, an onboard, browser-based user interface (UI) that provides remote Transpector MPH control and monitoring from network connected devices. This chapter will discuss the purpose of the requirements for running and instructions for operating Transpector Web UI.

  • Page 83: System Requirements

    **Windows XP does not support Internet Explorer 9. Firefox or Chrome are recommended for use with Windows XP. † To use Wi-Fi, Transpector MPH must be connected to a Wi-Fi equipped router. 5.2.2 Using Transpector Web UI on Mobile Devices Transpector Web UI is optimized for 10.1 in.

  • Page 84: Connecting To Transpector Web Ui

    To connect to Transpector Web UI, the device that is being used for operating Transpector Web UI must be connected to the same network as Transpector MPH. If the device is not connected to the same network as Transpector MPH, Transpector Web UI will not work.
  • Page 85 Transpector MPH Operating Manual Figure 5-2 STATUS webpage If the Transpector Web UI STATUS webpage does not display, refresh the browser. If Transpector Web UI STATUS webpage still does not display, verify that the IP address was not changed from the factory default IP address. If the IP address...

  • Page 86: Connecting To Transpector Web Ui With A User-Defined Ip Address

    If the IP address has been changed from the default factory IP address, the new user-defined IP address must be entered into the browser. If the IP address was changed and the new address has been lost, contact INFICON. 5.4 Navigating Transpector Web UI Transpector Web UI functionality is split between several different windows.
  • Page 87 The STATUS window allows for changing IP address, Port Number, Sensor ID and Description. For more information, see section 5.5.2.4, Changing the Transpector MPH IP Address and Port Number, on page 5-23 section 5.5.2.5, Changing the Sensor ID and Description, on page 5-26.

  • Page 88: Monitor

    Transpector MPH Operating Manual 5.4.2 MONITOR The MONITOR window, see Figure 5-5, is the data acquisition window of Transpector Web UI. For instructions on using the MONITOR window, see section 5.5.2.1, Data Acquisition, on page 5-11. Figure 5-5 MONITOR window 5.4.3 LEAKCHECK...

  • Page 89: Diagnostics

    Transpector MPH Operating Manual 5.4.4 DIAGNOSTICS The DIAGNOSTICS window, see Figure 5-7, includes System Status and other diagnostic tools useful when contacting INFICON for assistance. Figure 5-7 DIAGNOSTICS window 5 - 8...

  • Page 90: Tune

    Transpector MPH Operating Manual 5.4.5 TUNE The TUNE window, see Figure 5-8, is password locked. It allows for tuning Transpector MPH. For tuning instructions, see section 5.5.2.3, Tune Mode, on page 5-17. Figure 5-8 TUNE window 5.4.6 HELP Click HELP to display the Transpector Web UI Operating Manual in a separate browser tab.

  • Page 91: Using Transpector Web Ui

    Transpector Web UI. This is the Default setting inside of FabGuard. If Stopped: Only if the Chamber is Stopped FabGuard will give control of the Transpector MPH sensor only if the chamber on which the sensor is installed is stopped.

  • Page 92: Standalone Transpector Web Ui Operation

    Transpector MPH has editable scan parameters that affect how data is acquired. The editable parameters are: Emission On/Off ... Turns the filament in the Transpector MPH ion source on or off. Emission must be ON to collect data.

  • Page 93: How To Change Scan Parameters

    Transpector MPH Operating Manual Dwell ..... The amount of time that Transpector MPH averages data for each collected point. Longer dwell times will decrease noise and increase scan time while shorter dwell times will be noisier and decrease scan time.
  • Page 94 Transpector MPH Operating Manual The Electron Multiplier is controlled the same way as the emission. To turn the Electron Multiplier on or off, click EM. There are only two different EM states: OFF (Black) and ON (Green). See Figure 5-11.

  • Page 95: Leak Checking

    Transpector MPH Operating Manual 5.5.2.2 Leak Checking Transpector MPH is commonly used as a leak check tool by:  determining leaks by detecting helium that is being sprayed and then monitoring the change in helium concentration  indicating the presence of a leak by showing increased levels of nitrogen, oxygen and carbon dioxide Click LEAKCHECK to display the LEAKCHECK window.

  • Page 96: Leak Check Components

    To manually set alarm levels, highlight the alarm level of interest, type the desired alarm level, then click SET. Transpector MPH Scan Parameters—Transpector MPH can use any mass for leak detection. To change the mass, highlight the mass shown in the MASS box, type the new desired mass, then click SET.
  • Page 97 Transpector MPH Operating Manual NOTE: ALARM/WARNING SETTINGS and Transpector MPH Scan Parameters each have a SET button next to the changeable parameters. The SET buttons are not interchangeable.  To change alarm and warning settings, click SET next to the ALARM and WARNING group.

  • Page 98: Using The Leak Check Mode

    5.5.2.3 Tune Mode Transpector Web UI allows for mass-scale tuning of Transpector MPH. Since tuning can alter the quality of data recorded by Transpector MPH, the TUNE window is password locked. To enter the TUNE window, click TUNE and type the password: Admin.

  • Page 99: Tune Mode Components

    Figure 5-14 Tune Mode components CHANGE TUNE MASSES—Click CHANGE TUNE MASSES to change the masses used for Transpector MPH tuning. The Tune Table Editor will display, which allows for editing the tune masses. See Figure 5-15.
  • Page 100 Transpector MPH scan. Click SET to send the parameters to Transpector MPH. DWELL....The amount of time that Transpector MPH averages data for each collected point.
  • Page 101 Transpector MPH to produce optimum tune quality. Do not alter this setting unless directed by INFICON. FILAMENT NUMBER..Transpector MPH has dual filaments. This allows for switching from one filament to the other.

  • Page 102: Default Tune Mode Parameters

    Transpector MPH Operating Manual 5.5.2.3.2 Default Tune Mode Parameters When first entering the TUNE window, Transpector Web UI is set with the default parameters displayed in Table 5-4. Table 5-4 Default Tune Mode parameters Parameter Value Dwell 32 ms ppAMU...

  • Page 103: Tuning Transpector Mph

    0.9 ±0.05 0.9 ±0.05 0.9 ±0.05 Ensure that the emission has been on and the RGA has been scanning for 30 minutes prior to tuning. Transpector MPH can be tuned either with the EM on or off. 5 - 22...

  • Page 104: Changing The Transpector Mph Ip Address And Port Number

    Once Transpector MPH is tuned, click SUBMIT to store the new tune file into Transpector MPH. 5.5.2.4 Changing the Transpector MPH IP Address and Port Number The Transpector MPH IP address and Port Number are set on the STATUS window.

  • Page 105: Manually Changing The Ip Address

    Type the new IP ADDRESS. Click SET. A notification is displayed, see Figure 5-17. Click OK. Transpector MPH will reboot automatically and will use the new IP ADDRESS. Figure 5-16 IP address Figure 5-17 Rebooting Transpector MPH 5 - 24...

  • Page 106: Using Dhcp To Allow The Network To Assign An Ip Address

    Transpector MPH. 5.5.2.4.3 Changing the Port Number of Transpector MPH Transpector MPH is set with a default port number of 80. If this port is blocked by the network that Transpector MPH is installed on, the port number must be changed.

  • Page 107: Changing The Subnet Mask Of Transpector Mph

    5.5.2.4.5 Changing the Gateway of Transpector MPH Transpector MPH is set with a default gateway of 0.0.0.0. If the network on which Transpector MPH is connected requires a gateway: Connect Transpector MPH to a computer with a gateway of 0.0.0.0.

  • Page 108: Transpector Web Ui Best Known Methods

    To perform vacuum diagnostics, enter the MONITOR window of Transpector Web UI. After choosing the settings that are appropriate for the application, Transpector MPH will scan through the indicated mass range. A quick qualitative analysis can then be performed to determine what is present inside of the system.

  • Page 109: Generating Shortcuts For Quick Access

    Since Transpector Web UI is browser based, shortcuts can be generated that will open a browser and direct it to the attached webpage address. In this manner, remembering the IP address for one (or multiple) Transpector MPH sensors is not necessary. Creating shortcuts also allows for differentiating between different Transpector MPH when more than one is present on the network.
  • Page 110 Transpector MPH Operating Manual In the Create Shortcut window, paste the webpage address of Transpector Web UI. See Figure 5-20. Figure 5-20 Paste webpage address Click NEXT. See Figure 5-21. Figure 5-21 Next 5 - 29...

  • Page 111: Creating Bookmarks

    Figure 5-24. Figure 5-24 Shortcut icon CAUTION If the IP address of Transpector MPH is changed, the shortcuts will not work. 5.6.3 Creating Bookmarks In addition to creating shortcuts on the computer desktop, bookmarks can also be generated inside of the internet browser. To set a bookmark, press Ctrl+d when at the intended webpage address.

  • Page 112: Using Wi-Fi

    Does Transpector MPH have 24 V (dc) power supplied to it? If yes, try resetting the power. Is the Ethernet cable connected to Transpector MPH and the network? Try clearing the web browser chache.

  • Page 113: Maintenance

    Transpector MPH Operating Manual Chapter 6 Maintenance 6.1 Introduction The Transpector MPH sensor is subject to aging in normal use and some of its components will eventually require repair or replacement. The Transpector MPH electronics module does not normally require repair or maintenance.

  • Page 114: Electrical Voltages

    Transpector MPH Operating Manual 6.2.3 Electrical Voltages Transpector MPH does not present electrical hazards when enclosed and grounded according to the specifications given in the installation instructions. WARNING - Risk Of Electric Shock If the Transpector MPH electronics module is operated while open, hazardous electrical voltages may be present.

  • Page 115: Maintenance Procedures

    6.4.2 Spare Heating Jacket Part Numbers INFICON offers several heating jackets to help in baking a sensor. These heating  jackets operate at a maximum temperature of 150 Heating jacket part numbers are shown in Table 10-1 on page 10-1.

  • Page 116: Repair Procedures

    Transpector MPH Operating Manual 6.5 Repair Procedures 6.5.1 Tools Required 6.5.1.1 Tools for Replacing the Filament Kit  3 mm Nut Driver 1/16 in. Flat Blade Screwdriver  6.5.1.2 Tools for Replacing the Ion Source  1/16 in. Flat Blade Screwdriver #2 Phillips Head Screwdriver ...

  • Page 117: How To Determine If A Filament Kit Replacement Is Required

    6.5.2 How to Determine if a Filament Kit Replacement is Required Follow these steps to determine if a filament replacement is required. Remember that Transpector MPH has dual filaments, so if one filament is blown, but the second filament is intact, Transpector MPH can still be used with the second filament.

  • Page 118: Filament Kit Replacement

    6.5.3 Filament Kit Replacement A filament replacement kit can be purchased from INFICON. This kit contains a new filament assembly mounted on a shipping fixture and a small Allen wrench. Perform the following steps to replace the filament.
  • Page 119 Transpector MPH Operating Manual While holding the clamps with the pliers, use the flat blade screwdriver to loosen the clamps holding the filament leads (B). Gently pull the leads away from the filament assembly. Figure 6-3 Remove the leads Carefully pull the filament assembly from the ion source.
  • Page 120 Transpector MPH Operating Manual Carefully remove the new filament assembly from its packaging and place it on the ion source standoffs. CAUTION The new filament assembly must be carefully placed onto the ion source. Excessive horizontal movement will cause the damage to the anode.

  • Page 121: Ion Source Removal

    Transpector MPH Operating Manual Tighten the washers (A). Insert the filament leads back into the clamps and tighten. Using an ohmmeter, check that the filament is not shorted to ground and that the filament shows a resistance of approximately 0.8  at the feedthrough.
  • Page 122 Transpector MPH Operating Manual Pull the electrical leads away from the sensor. CAUTION Do not bend the leads. Using the Phillips head screwdriver, remove the gold screws (C - one is hidden in the figure) that hold the ion source onto the quadrupole. There are three screws.

  • Page 123: Electron Multiplier Replacement

    Transpector MPH Operating Manual 6.5.5 Electron Multiplier Replacement The following steps should be performed to remove the ion source: NOTE: Refer to section 6.5.1.3, Tools for Replacing the Electron Multiplier, on page 6-4 before continuing. While holding the clamps with the pliers, use the flat blade screwdriver to loosen the clamps holding the filament leads (A) and ion source leads (B - one is hidden in the figure).
  • Page 124 Transpector MPH Operating Manual Using the 2.0 mm x 75 mm hex driver, unscrew the three screws (D - one is hidden in the figure) holding the sensor assembly to the feedthrough. Gently remove the sensor assembly from the feedthrough.
  • Page 125 Transpector MPH Operating Manual Using the Phillips head screwdriver, remove the three gold screws (E - one is hidden in the figure) holding the EM assembly inside of the sensor assembly. Figure 6-10 Removing the screws holding the EM Gripping the bottom of the EM assembly, gently remove the EM from the sensor assembly.
  • Page 126 When installing the sensor back into the feedthrough, ensure that the two pins on the bottom of the detector align with the two pins shown in Figure 6-13. Figure 6-13 Pin location Detector Pins Reverse steps 1-4 to reassemble the Transpector MPH sensor. 6 - 14...

  • Page 127: Calibration

    6.6 Calibration 6.6.1 Mass Alignment Transpector MPH is tuned such that it generates a known RF/DC ratio that allows one mass to exit the quadrupole at a time. When tuning the mass scale of Transpector MPH, the RF/DC ratio is fine tuned to each tune mass.

  • Page 128: Selecting Tune Masses

    6.6.1.2.2, Selecting Masses for Tuning with an Argon Standard Calibration Reference, on page 6-17. If Transpector MPH does not have an optional calibration standard, there are three different methods of tuning.  To tune using a user-supplied test mixture, continue to section 6.6.1.2.3,...

  • Page 129: Selecting Masses For Tuning With An Argon Standard Calibration Reference

    In some applications, it can be useful to have a test mix manufactured by a gas supplier. The ideal mix would include the factory tune masses for the mass range of Transpector MPH to be tuned. The factory tune masses can be found in section 6.6.1.1 on page...

  • Page 130: Tuning With Background Gases

    Transpector MPH Operating Manual 6.6.1.2.5 Tuning with Background Gases Mass 4 must be calibrated for proper leak detection. If Transpector MPH is used as a leak detector, make sure that helium is available for tuning. If Transpector MPH is only used for leak checking, mass 4 is the only mass to tune. To tune mass 4, find a way to introduce helium into the vacuum chamber.

  • Page 131: Diagnosing Problems

    7.1 Introduction If you are experiencing trouble with your Transpector MPH, first look at Table 7-1 and see if your problem is listed there. If not, contact INFICON (refer to section 1.3, How To Contact Customer Support, on page 1-3).
  • Page 132 Transpector MPH Operating Manual Table 7-1 Symptom—Cause—Remedy chart (continued) SYMPTOM CAUSE REMEDY EMISSION error (Cold Defective sensor filament Check sensor with OHM Start, Warm Start) open, shorted meter. Replace sensor or filament. Electronics failure Return to INFICON for repair. Insufficient vacuum Verify pressure is less than 5E-4 Torr.
  • Page 133 Transpector MPH Operating Manual Table 7-1 Symptom—Cause—Remedy chart (continued) SYMPTOM CAUSE REMEDY Temperature error Transpector MPH internal Verify unit is installed ambient temp >70°C properly, ambient temp <50°C. Verify that there are no heat sources in local proximity. Verify that internal fan is running.
  • Page 134 Transpector MPH Operating Manual Table 7-1 Symptom—Cause—Remedy chart (continued) SYMPTOM CAUSE REMEDY Peakfind Error No peak at target mass Upload original configuration file. Return electronics box to INFICON for repair. Filament Potential Insufficient vacuum Verify pressure is less than Error 5E-4 Torr.
  • Page 135 Transpector MPH Operating Manual Table 7-1 Symptom—Cause—Remedy chart (continued) SYMPTOM CAUSE REMEDY Poor Sensor contaminated Degas sensor. sensitivity Bake-out sensor. Service sensor. System pressure too low Increase sample pressure, if possible. Mass calibration (resolution) Adjust Mass Calibration, increase peak width.

  • Page 136: Communication Problems

    Is the Ethernet cable connected to Transpector MPH and the host computer (either directly or through a router/switch)?  Does the Transpector MPH IP address have the same network prefix as the host computer?  Is Port 80 open on the host computer? Is there an IP address conflict between Transpector MPH and another network ...
  • Page 137 Transpector MPH Operating Manual Chapter 8 Bibliography For further information on partial pressure analyzers, see Partial Pressure Analyzers and Analysis, M. J. Drinkwine and D. Lichtman, American Vacuum Society Monograph Series, or A User’s Guide to Vacuum Technology, J. F.

  • Page 138: Glossary

    Transpector MPH Operating Manual Chapter 9 Glossary Anode The anode is the structure in the ion source in which ions are created by electron impact. It can be formed from a mesh, such as in the open ion source, or from a solid tube, such as in the closed ion source. Its electrical potential is positive with respect to the filament, focus lens, total pressure plate, pole zero, exit aperture and Faraday cup.
  • Page 139 Transpector MPH Operating Manual Detection Factor The detection factor is the ratio of the detected signal for a given ion current from a certain substance to the detected signal for the same ion current of nitrogen ions as measured at mass 28. For Faraday cup detectors, the detection factor is usually 1.
  • Page 140 Transpector MPH Operating Manual Focus Lens The focus lens is a conductive aperture located next to, and usually biased negatively with respect to, the anode. Its purpose is to draw the ions out of the anode, form them into a beam, and focus them into the next lens element.
  • Page 141 Transpector MPH Operating Manual Ionization Probability The ionization probability for a chemical substance is the ratio of the total ion current (at all masses) produced from a given partial pressure of that substance, to the total ion current produced from nitrogen at the same partial pressure.
  • Page 142 Transpector MPH Operating Manual Material Factor The material factor for a chemical substance is that part of the proportionality constant between the partial pressure of that substance and the resulting mass filtered ion current which depends on the chemical nature of that substance but not the particular instrument used for that measurement.
  • Page 143 Transpector MPH Operating Manual Partial Pressure The partial pressure is the pressure of a specific chemical component of a gas mixture. The sum of all the partial pressures is the total pressure. Pole Zero See Center Voltage. Quadrupole A quadrupole is a mass filter consisting of four parallel electrodes or poles (hence quadrupole) arranged in a square array.
  • Page 144 Transpector MPH Operating Manual Total Pressure Plate The total pressure plate, or collector, is an electrode in the ion source on which at least a part of the ion beam impinges. The current striking this plate is a function of the total pressure in the ion source.

  • Page 145: Transpector Mph Accessories And Spare Parts

    Transpector MPH Operating Manual Chapter 10 Transpector MPH Accessories and Spare Parts 10.1 Introduction Transpector MPH has several accessories and spare parts for purchase. This section lists these parts and provides their INFICON part numbers. 10.2 MPH Accessories Table 10-1 MPH accessories...

  • Page 146: Transpector Mph Spare Parts

    Table 10-3 Transpector MPH replacement spare parts Part Number Description 961-022-G1 Spare O-ring and Nut Kit (for connection between box and sensor) 961-206-G2 Transpector MPH EM/FC Extension Tube Kit (including nuts/bolts) 924-200-G1 Transpector MPH HPR/Interlock Extension Tube Kit (Including nuts/bolts) 600-1190-P8 Communications Cable Ethernet 7 m...

  • Page 147: Spare Transpector Mph Electronics Boxes

    10.3.3 Spare Transpector MPH Electronics Boxes Table 10-4 Spare Transpector MPH electronics boxes Part Number Description MP-H10S Transpector MPH 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet MP-H20S Transpector MPH 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet...

  • Page 148: Specifications

    Chapter 11 Specifications 11.1 Introduction The following sections detail the specifications for the Transpector MPH Gas Analysis System. As a result of INFICON continuing product improvement and quality assurance programs, these specifications are subject to change without notice or obligation.

  • Page 149: Resolution

    Transpector MPH Operating Manual 11.5 Resolution Peak Width (AMU) at 10% of peak height MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 0.9 AMU 11.6 Temperature Coefficient During an eight hour period, after thirty minutes of warm up MPH100F MPH100M MPH200F MPH200M...

  • Page 150: Maximum Operating Pressure

    Transpector MPH Operating Manual 11.10 Maximum Operating Pressure Torr [mbar] (Pa) MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 5x10 [6.7x10 (6.7x10 11.11 Maximum Sensor Operating Temperature Degrees C MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 200°C 200°C 200°C 200°C 200°C 200°C 150°C 150°C...

  • Page 151: Ethernet Communication Interface

    Transpector MPH Operating Manual 11.15 Ethernet Communication Interface MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M Standard: Cat5e Ethernet Cable Connection 11.16 Relay Outputs MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 1 relay, 24 V at 0.5 amps 11.17 Inputs MPH100F MPH100M MPH200F...

  • Page 152: Introduction

    Transpector MPH Operating Manual Chapter 12 Supplied Items 12.1 Introduction You will receive the following:  A Ship Kit. See section 12.1.1 on page 12-1.  An Electronics Module. See section 12.1.2 on page 12-2. A Sensor. See section 12.1.4 on page 12-2.

  • Page 153: Electronics Module

    Table 12-2 Electronics module (one of the following) Part Number Description MP-H10P Transpector MPH 100 AMU FC and EM/FC Electronics Box MP-H20P Transpector MPH 200 AMU FC and EM/FC Electronics Box MP-H30P Transpector MPH 300 AMU FC and EM/FC Electronics Box 12.1.3 Power Supply...

  • Page 154: Extension Kit

    Transpector MPH300 HPR Tungsten Filaments 961-H3PBP Transpector MPH300 Interlock Tungsten Filaments 12.1.5 Extension Kit Table 12-5 Extension kit (one of the following) Part Number Description 961-206-G2 Transpector MPH Sensor Extension Kit 961-205-G2 Transpector MPH HPR/Interlock Sensor Extension Kit 12 - 3...

  • Page 155: Software

    Table 12-7 Heating jacket system (optional) (one of the following) (optional) Part Number Description 961-029-G1 Transpector MPH Heater Kit - 120 V(ac) 961-029-G2 Transpector MPH Heater Kit - 230 V(ac) 12.1.8 Calibration Reference (Optional) Table 12-8 Calibration reference (optional) (one of the following) (optional)

  • Page 156: Angle Valve (Optional)

    Transpector MPH Operating Manual 12.1.10 Angle Valve (Optional) Table 12-10 Angle valve (optional) (optional) Part Number Description 914-024-G1 Angle Valve Kit, Manual (includes Heater) 12 - 5...
  • Page 157 Transpector MPH Operating Manual Index doubly charged ion altitude range analyzer factor 4-9, 4-12 electron energy 3-4, anode electron multiplier error electron stimulated desorption 4-15 voltage electronics enclosure 11-4 anti-seize compound 1-11 electronics module 1-5, 12-2 appearance potential physical dimensions...
  • Page 158 Transpector MPH Operating Manual beam focus analyzer cage pass band width current 3-10, peak height detector 3-10 peak shape, poor doubly charged perimeter for maintenance access energy 3-7, pole zero 3-7, intensity pollution degree low mass power mass-to-charge ratio input...
  • Page 159 Transpector MPH Operating Manual none spinning rotor gauge 4-11 ultrahigh vacuum 4-14 supply voltage user configured switches 11-4 surface film 3-13 vacuum region 4-14 temperature vacuum system 4-14 bakeout 11-3 ventilation requirements coefficient 11-2 viscous flow error max operating 11-3...
  • Page 160 Transpector MPH Operating Manual ® www.inficon.com re achus@inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. All trademarks are the property of their respective owners. PN 074-555-P1C ©2016 INFICON...

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