Related Manuals for Inficon CDG025D2
Summary of Contents for Inficon CDG025D2
- Page 1 Communication Protocol ® EtherCAT for Capacitance Diaphragm Gauges CDG025D2 CDG045D CDG045D2 CDG045Dhs CDG100D CDG100D2 CDG100Dhs CDG160D CDG160Dhs CDG200D CDG200Dhs tirb45e1 (2019-02)
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Page 2: General Information
This file can be downloaded from our web- site. Product Identification In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below. -
Page 3: Validity
Validity This document applies to products of the CDG025D2, CDG045D, CDG045D2, CDG045Dhs, CDG100D, CDG100D2, CDG100Dhs, CDG160D, CDG160Dhs, CDG200D and CDG200Dhs series with EtherCAT interface. This manual is based on firmware version 1.3.0.0. If your unit does not work as described in this document, please check that it is equipped with the above firmware version: •... -
Page 4: Trademarks
® Trademarks EtherCAT Beckhoff Automation GmbH, Deutschland Edge™ INFICON GmbH Stripe™ INFICON GmbH Patents EP 1070239 B1, 1040333 B1 US Patents 6528008, 6591687, 7107855, 7140085 tirb45e1 (2019-02) CDGxxxDxx.cp... -
Page 5: Table Of Contents
3.3.2 <ERR> LED 3.3.3 <LA> LED (<IN> Port) 3.3.4 <LA> LED (<OUT> Port) 3.3.5 Device Address Switch 4 Object Structure CDG025D2, CDG045D, CDG045D2, CDG100D, CDG100D2, CDG160D, CDG200D 4.1 Object Dictionary structure 4.2 Communication Profile Objects (0x1000…0x1FFF) 4.2.1 Process Data Objects (PDO's) 4.3 Manufacturer-specific Profile Objects (0x2000...0x5FFF) - Page 6 4.7.20 Configure Device 4.7.21 Information Device 4.7.22 Command Zero Adjust 4.7.23 Full Scale Adjust 4.7.24 Device Reset Command 4.7.25 Exception Reset Command 4.7.26 Store Parameters Command 4.7.27 Calculate Checksum Command 4.7.28 Load Parameters Command 5 Object Structure CDG045Dhs, CDG100Dhs, CDG160Dhs, CDG200Dhs 5.1 Object Dictionary structure 5.2 Communication Profile Objects (0x1000…0x1FFF) 5.2.1 Process Data Objects (PDO's)
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Page 7: Technical Data
1 Technical Data For further technical data refer to the appropriate documents: → [4] → [3] CDG025D2 CDG160D → [1] → [8] CDG045D CDG160Dhs → [5] → [3] CDG045D2 CDG200D → [6] → [8]... -
Page 8: Interface Connection
2 Interface Connection Making an EtherCAT interface For operating the temperature controlled CDGxxxD gauge via EtherCAT, two cable interface cables conforming to the EtherCAT standard are required. If no such cables are available, make two according to the following indications. Cable type Ethernet Patch Cable Cable (CAT5e quality) with FCC68 connector. - Page 9 Plug the EtherCAT (and sensor) cables connector into the gauge: From the previous device the cable connected to OUT port has to be connected to the CDGxxxD <IN> port. And the cable from the CDGxxxD <OUT> port has to be connected to the next device's <IN> port. tirb45e1 (2019-02) CDGxxxDxx.cp...
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Page 10: Operation
3 Operation Via the EtherCAT interface, the following and further data are exchanged in the 3.1 Introduction standardized EtherCAT protocol: • Pressure reading • Pressure unit (Torr, mbar, Pa) • Zero adjustment • Status and error messages • Status of the switching functions •... -
Page 11: Indicators And Switches
3.3 Indicators and Switches 3.3.1 <RUN> LED Displays the operating status. Color LED State Description INIT (initialization status) or no power applied to device. blinking PREOP (pre-operational status). (200 ms on 200 ms off) single flash SAFEOP (safe-operational status). green (200 ms on Communication of cyclic data transfer running. -
Page 12: Device Address Switch
3.3.5 Device Address Switch During device initialization, the device address switches are read by the device firmware. This device address is supported to the master as Explicit Device x100 Identification. Example: Value of the Explicit Device ID = 0xDDD (dec 3549): 0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD (dec 13) x100 tirb45e1... -
Page 13: Object Structure Cdg025D2, Cdg045D, Cdg045D2, Cdg100D, Cdg100D2, Cdg160D, Cdg200D
Object Structure CDG025D2, CDG045D, CDG045D2, CDG100D, CDG100D2, CDG160D, CDG200D This chapter describes the CANopen over EtherCAT (CoE) Object Dictionary. 4.1 Object Dictionary The objects in the CoE Object Dictionary can be accessed with SDO services, and many of the dictionary objects can be mapped for cyclic communication in PDO's. -
Page 14: Communication Profile Objects (0X1000
4.2 Communication Profile The objects of the communication profile describe the basic EtherCAT properties of the CDGxxxD and are common to all EtherCAT slaves using the CoE communi- Objects cation protocol. The objects are described in following table: (0x1000…0x1FFF) Index DataType Access PM Name... -
Page 15: Manufacturer-Specific Profile Objects (0X2000
TxPDO's Index DataType Access PM Name 1A00 TxPDO Transmit PDO Mapping 0x01 Reading Valid (Module 1) 0x02 Overrange Exceeded (Module 1) 0x03 Underrange Exceeded (Module 1) 0x04 Padding Bits 1 (5 bit) 0x05 REAL Sensor Value (Module 1) 1A01 TxPDO Transmit PDO Mapping, User Mapping 1A02 TxPDO Transmit PDO... -
Page 16: Manufacturer Configuration (Module 1)
4.3.2 Manufacturer Index DataType Access PM Name Configuration (Module 1) 4000 0x01 BYTE Safe State 0x02 REAL Safe Value 0x03 BOOL Alarm Enable 0x04 BOOL Warning Enable 0x05 REAL Alarm Trip Point High 0x06 REAL Alarm Trip Point Low 0x07 REAL Alarm Hysteresis 0x08... -
Page 17: Manufacturer Configuration (Module 2)
4.3.3 Manufacturer Index DataType Access PM Name Configuration (Module 2) 4010 0x01 BYTE Safe State 0x02 REAL Safe Value Subindex 0x01 Specifies the behavior for the Value for states other than Valid. Safe State Zero Full Scale Hold last value Use safe value Subindex 0x02 Safe Value: The value to be used for Safe State = Safe Value. -
Page 18: Input Common
Subindex 0x03 Indicates whether the Value parameter contains a value in under range. Reading Valid No Underrange Exceeded Underrange Exceeded 4.4.3 Input Common Index DataType Access PM Name 6010 0x0E BOOL TxPdoState 0x11 REAL Sensor Value Subindex 0x0E Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid) TxPdoState Invalid Valid... -
Page 19: Configuration Area (0X8000
Subindex 0x01 Status High Trip High Trip not assert High Trip assert Subindex 0x02 Status Low Trip Low Trip not assert Low Trip assert 4.4.6 Input Trip Point 2 Index DataType Access PM Name 600F 0x01 BOOL Status High Trip 0x02 BOOL Status Low Trip... - Page 20 The Low Trip Point is a fixed value: The value defined in Low Trip Point Limit is compared with the pressure value referenced by the Source Index parameter. Measurement signal (Pressure p) High Trip Hysteresis High Trip Point Low Trip Hysteresis Low Trip Point Time t...
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Page 21: Configuration Trip Point
Subindex 0x18 Low Trip Hysteresis: Hysteresis value for Low Trip Point. Subindex 0x1A Object index of active source of (I 0x900E SI 0x01) Input Value. Source Index Bit 16…31 Index Bit 08…15 Subindex Bit 00…07 Reserved 4.5.4 Configuration Trip Calculating the High Trip Point and Low Trip Point → chapter 4.5.2. Point 2 Index DataType... -
Page 22: Information Area (0X9000
4.6 Information Area The Information Data object defines the input process data. (0x9000…0x9FFF) Highest / lowest measurement Indicated value pressure Error Overrange Measurement range Underrange Error Real pressure p0 p1 p2 p3 The "measurement range" is the range between minimum and maximum pressure, where the reading of the gauge is within the specified measurement uncertainty limits. -
Page 23: Information Capacitance Diaphragm
Subindex 0x05 Lowest Informational Measurement Value: Lowest value that the gauge can measure without a specified accuracy. 4.6.2 Information Capacitance Index DataType Access PM Name Diaphragm 9001 0x01 UINT Sensor Warning 0x02 UINT Sensor Error Subindex 0x01 Sensor Warnings Bit 0 Not at temperature Bit 1…8 Bit 9... -
Page 24: Information Piezo
4.6.4 Information Piezo Index DataType Access PM Name 9012 0x01 UINT Sensor Error 0x02 UINT Sensor Error Subindex 0x01 Sensor Warnings Bit 0…15 Subindex 0x02 Sensor Errors Bit 0…15 4.6.5 Information Trip Point 1 / Index DataType Access PM Name 900E 0x01 REAL... -
Page 25: Exceptions
4.7.3 Exceptions 4.7.4 Active Exception Status Index DataType Access PM Name F380 USINT ActiveException Status Active Exception Status Active Exception Status Bit 0 Device Warning Bit 1 Manufacturer Warning Bit 2 Device Error Bit 3 Manufacturer Error Bit 4…7 4.7.5 Active Device Warning The "active device warning details"... -
Page 26: Active Device Error Details
4.7.6 Active Device Error The "active device error details" parameter describes the error state of the Details complete device. Index DataType Access PM Name F383 0x01 UDINT Active Device Error Details 0x02 UDINT Active Device Error Details F384 0x01 UDINT Active Manufacturer Error Details 0x02... -
Page 27: Active Global Device Error Details
4.7.8 Active Global Device The "active device error details" parameter describes the error state of the Error Details complete device. Index DataType Access PM Name F387 0x01 UDINT Active Global Device Error Details F388 0x01 UDINT Active Global Manufacturer Error Details Subindex 0x01 (F387) Active Global Device Error Details (Index F387) Bit 0…2... -
Page 28: Latched Global Device Warning Details
Subindex 0x01 (F393) Latched Device Error Details: Latched version of 0xF383:01. Subindex 0x02 (F393) Latched Device Error Details: Latched version of 0xF383:02. Subindex 0x01 (F394) Latched Manufacturer Error Details: Latched version of 0xF384:01. Subindex 0x02 (F394) Latched Manufacturer Error Details: Latched version of 0xF384:02. 4.7.11 Latched Global Device Index DataType... -
Page 29: Device Error Mask
4.7.14 Device Error Mask Index DataType Access PM Name F3A3 0x01 UDINT Device Error Mask 0x02 UDINT Device Error Mask F3A4 0x01 UDINT Manufacturer Error Mask 0x02 UDINT Manufacturer Error Mask Subindex 0x01 (F3A3) Device Error Mask: Mask bits for 0xF383:01 and 0xF393:01. Subindex 0x02 (F3A3) Device Error Mask: Mask bits for 0xF383:02 and 0xF393:02. -
Page 30: Input Latch Local Timestamp
Subindex 0x01 Status of Trip Point instances. Trip Point Output All Instance Bit 0 Status High Trip (I 0x600E, SI 0x01) Bit 1 Status Low Trip (I 0x600E S,I 0x02) Bit 2 Status High Trip (I 0x600F, SI 0x01) Bit 3 Status Low Trip (I 0x600F, SI 0x02) Bit 4…31 not used = 0... -
Page 31: Information Device
4.7.21 Information Device Index DataType Access PM Name F940 0x01 UDINT Measurement Principle 0x02 BYTE Number of Sensors 0x04 V_STRING SW Version VPG PCB F9F0 V_STRING Manufacturer Serial Number F9F1 0x01 UDINT CDP Functional Generation Number F9F2 0x01 UDINT SDP Functional Generation Number (Module 1) 0x02... -
Page 32: Command Zero Adjust
4.7.22 Command Zero Adjust Execution of this command will start a Zero Adjust operation. The zeroing function is locked in order for operating errors to be prevented, therefore see the operation instructions of the vacuum gauges, refer to the appropriate documents (→ [1] … [8]). Index DataType Access... -
Page 33: Device Reset Command
Subindex 0x03 Response Byte 0 See Subindex 0x02 Byte 1 Unused Byte 2 0: Full Scale Adjust successful 1: Full Scale Adjust failed: out-of-range 254: No previous Full Scale Adjust command issued 4.7.24 Device Reset Command Execution of this command causes the device to emulate a complete power cycle. This includes an ESC reset. -
Page 34: Store Parameters Command
Subindex 0x01 A device reset is initiated when the following byte sequence is sent. Command Byte 0 0x74 Byte 1 0x65 Byte 2 0x73 Byte 3 0x65 Byte 4 0x72 Subindex 0x02 Status (supported values) Last command completed, no error, no response Reserved Last command completed, error, no response Reserved... -
Page 35: Calculate Checksum Command
Subindex 0x03 Response Byte 0 See Subindex 0x02 Byte 1 not used = 0x00 4.7.27 Calculate Checksum Execution of this command will calculate a checksum for all writable, non-volatile Command parameters as currently stored in non-volatile memory. Index DataType Access PM Name FBF3 0x01... -
Page 36: Load Parameters Command
4.7.28 Load Parameters Execution of this command will load all parameters from non-volatile memory. Command Index DataType Access PM Name FBF4 0x01 V_STRING(4) Command 0x02 BYTE Status 0x03 V_STRING(2) Response Subindex 0x01 A device reset is initiated when the following byte sequence is sent. Read: Command: Read Byte 0... -
Page 37: Object Structure Cdg045Dhs, Cdg100Dhs, Cdg160Dhs, Cdg200Dhs
5 Object Structure CDG045Dhs, CDG100Dhs, CDG160Dhs, CDG200Dhs This chapter describes the CANopen over EtherCAT (CoE) Object Dictionary. 5.1 Object Dictionary The objects in the CoE Object Dictionary can be accessed with SDO services, and many of the dictionary objects can be mapped for cyclic communication in PDO's. structure Each object is addressed using a 16-bit index and an 8-bit subindex. -
Page 38: Communication Profile Objects (0X1000
5.2 Communication Profile The objects of the communication profile describe the basic EtherCAT properties of the CDGxxxD and are common to all EtherCAT slaves using the CoE communi- Objects cation protocol. The objects are described in following table: (0x1000…0x1FFF) Index DataType Access PM Name... -
Page 39: Manufacturer-Specific Profile Objects (0X2000
TxPDO's Index DataType Access PM Name 1A00 TxPDO Transmit PDO Mapping 0x01 Reading Valid (Module 1) 0x02 Overrange Exceeded (Module 1) 0x03 Underrange Exceeded (Module 1) 0x04 Padding Bits 1 (5 bit) 0x05 REAL Sensor Value (Module 1) 1A01 TxPDO Transmit PDO Mapping, User Mapping 1A02 TxPDO Transmit PDO... -
Page 40: Manufacturer Configuration (Module 1)
5.3.2 Manufacturer Index DataType Access PM Name Configuration (Module 1) 4000 0x01 BYTE Safe State 0x02 REAL Safe Value 0x03 BOOL Alarm Enable 0x04 BOOL Warning Enable 0x05 REAL Alarm Trip Point High 0x06 REAL Alarm Trip Point Low 0x07 REAL Alarm Hysteresis 0x08... -
Page 41: Input Area (0X6000
Subindex 0x01 Specifies the behavior for the Value for states other than Valid. Safe State Zero Full Scale Hold last value Use safe value Subindex 0x02 Safe Value: The value to be used for Safe State = Safe Value. 5.4 Input Area (0x6000…0x6FFF) 5.4.1 Input Common Index... -
Page 42: Input Common
5.4.3 Input Common Index DataType Access PM Name 6010 0x0E BOOL TxPdoState 0x11 REAL Sensor Value Subindex 0x0E Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid) TxPdoState Invalid Valid Subindex 0x11 The corrected, converted, calibrated final analog input value of the sensor. -
Page 43: Configuration Area (0X8000
5.4.6 Input Trip Point 2 Index DataType Access PM Name 600E 0x01 BOOL Status High Trip 0x02 BOOL Status Low Trip 600F 0x01 BOOL Status High Trip 0x02 BOOL Status Low Trip Subindex 0x01 Status High Trip High Trip not assert High Trip assert Subindex 0x02 Status Low Trip... - Page 44 Measurement signal (Pressure p) High Trip Hysteresis High Trip Point Low Trip Hysteresis Low Trip Point Time t active active active active active 5.5.3 Configuration Trip Calculating the High Trip Point and Low Trip Point → chapter 5.5.2. Point 1 Index DataType Access...
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Page 45: Configuration Trip Point
Subindex 0x13 Percentage of High Trip Source: Percentage of Piezo Sensor Value (I 0x6010, SI 0x11) in [%]. Subindex 0x14 Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900E, SI 0x01) is below this limit. Subindex 0x15 Object index of Low Trip Point Value source. - Page 46 Subindex 0x02 Low Trip Point Disable Enable Subindex 0x11 High Trip Point limit: High limit to trigger trip point condition if Input Value (I 0x900F, SI 0x01) is above this limit. Subindex 0x12 Object index of High Trip Point Value source. Index of High Trip Point Limit (I 0x800F, SI 0x11) Bit 16…31: Index Bit 08…15: Subindex...
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Page 47: Information Area (0X9000
5.6 Information Area The Information Data object defines the input process data. (0x9000…0x9FFF) Highest / lowest measurement Indicated value pressure Error Overrange Measurement range Underrange Error Real pressure p0 p1 p2 p3 The "measurement range" is the range between minimum and maximum pressure, where the reading of the gauge is within the specified measurement uncertainty limits. -
Page 48: Information Capacitance Diaphragm
5.6.2 Information Capacitance Index DataType Access PM Name Diaphragm 9001 0x01 UINT Sensor Warning 0x02 UINT Sensor Error Subindex 0x01 Sensor Warnings Bit 0 Not at temperature Bit 1…13 Bit 14 Low Warning Exception Bit 15 High Warning Exception Subindex 0x02 Sensor Errors Bit 0 Diaphragm Failure... -
Page 49: Device Area (0Xf000
5.6.5 Information Trip Point 1 / Index DataType Access PM Name 900E 0x01 REAL Input Value Trip Point 1 900F 0x01 REAL Input Value Trip Point 2 Subindex 0x01 (900E) Input Value Trip Point 1: Trip Point Input value as referenced by Source Index (I 0x800E, SI 0x0E). -
Page 50: Active Device Warning Details
5.7.5 Active Device Warning The "active device warning details" parameter describes the warning state of the Details complete device. Index DataType Access PM Name F381 0x01 UDINT Active Device Warning Details 0x02 UDINT Active Device Warning Details F382 0x01 UDINT Active Manufacturer Warning Details 0x02... -
Page 51: Active Global Device Warning Details
Subindex 0x01 (F384) Active Manufacturer Error Details (Index F384, Module 1) Bit 0..31 Subindex 0x02 (F384) Active Manufacturer Error Details (Index F384, Module 2) Bit 0..31 5.7.7 Active Global Device The "active device warning details" parameter describes the warning state of the Warning Details complete device. -
Page 52: Latched Device Warning Details
Subindex 0x01 (F388) Active Global Manufacturer Error Details (Index F388) Bit 0 Internal Communication Exception (between EtherCAT-Protocol and Device-Application) Bit 1 Bit 2 Over temperature board Bit 3 Zero adjust value lager than error limit Bit 4 Communication with AD-Converter for heat temperature is not possible Bit 5 No meaningful temperature value from PT1000... -
Page 53: Latched Global Device Warning Details
5.7.11 Latched Global Device Index DataType Access PM Name Warning Details F395 0x01 UDINT Latched Global Device Warning Details F396 0x01 UDINT Latched Global Manufacturer Warning Details Subindex 0x01 (F395) Latched Global Device Warning Details: Latched version of 0xF385:01. Subindex 0x01 (F396) Latched Global Manufacturer Warning Details: Latched version of 0xF386:01. -
Page 54: Global Device Warning Mask
Subindex 0x02 (F3A4) Manufacturer Error Mask: Mask bits for 0xF384:02 and 0xF394:02. 5.7.15 Global Device Warning Index DataType Access PM Name Mask F3A5 0x01 UDINT Global Device Warning Mask F3A6 0x01 UDINT Global Manufacturer Warning Mask Subindex 0x01 (F3A5) Global Device Warning Mask: Mask bits for 0xF385:01 and 0xF395:01. Subindex 0x01 (F3A6) Global Manufacturer Warning Mask: Mask bits for 0xF386:01 and 0xF396:01. -
Page 55: Configure Device
Subindex 0x01 Local controller time corresponding to the input latch time in microseconds. It starts at zero on device power-up. Mandatory if device has inputs. If device has no inputs defined, this corresponds the time immediately prior to writing to input SM. Subindex 0x02 Local controller time corresponding to the input latch time in microseconds. -
Page 56: Information Device
5.8.1 Information Device Index DataType Access PM Name F940 0x01 UDINT Measurement Principle 0x02 BYTE Number of Sensors 0x04 V_STRING SW Version VPG PCB F9F0 V_STRING Manufacturer Serial Number F9F1 0x01 UDINT CDP Functional Generation Number F9F2 0x01 UDINT SDP Functional Generation Number (Module 1) 0x02... -
Page 57: Command Zero Adjust
5.8.2 Command Zero Adjust Execution of this command will start a Zero Adjust operation. The zeroing function is locked in order for operating errors to be prevented, therefore see the operation instructions of the vacuum gauges, refer to the appropriate documents (→ [1] … [8]). Index DataType Access... -
Page 58: Device Reset Command
Subindex 0x03 Response Byte 0 See Subindex 0x02 Byte 1 Unused Byte 2 0: Full Scale Adjust successful 1: Full Scale Adjust failed: out-of-range 254: No previous Full Scale Adjust command issued 5.8.4 Device Reset Command Execution of this command causes the device to emulate a complete power cycle. This includes an ESC reset. -
Page 59: Store Parameters Command
Subindex 0x01 A device reset is initiated when the following byte sequence is sent. Command Byte 0 0x74 Byte 1 0x65 Byte 2 0x73 Byte 3 0x65 Byte 4 0x72 Subindex 0x02 Status (supported values) Last command completed, no error, no response Reserved Last command completed, error, no response Reserved... -
Page 60: Calculate Checksum Command
Subindex 0x03 Response Byte 0 See Subindex 0x02 Byte 1 not used = 0x00 5.8.7 Calculate Checksum Execution of this command will calculate a checksum for all writable, non-volatile Command parameters as currently stored in non-volatile memory. Index DataType Access PM Name FBF3 0x01... -
Page 61: Load Parameters Command
5.8.8 Load Parameters Execution of this command will load all parameters from non-volatile memory. Command Index DataType Access PM Name FBF4 0x01 V_STRING(4) Command 0x02 BYTE Status 0x03 V_STRING(2) Response Subindex 0x01 A device reset is initiated when the following byte sequence is sent. Read: Command: Read Byte 0... -
Page 62: Appendix
Appendix Overview Setting Trip Points Input Data Trip Point Index Object Data B/S PM Name Description Code Index Type cess Trip Point 1 / Trip Point 2 0x6nnx RECORD Input Trip Point 1 / 2 E = Trip Point 1 F = Trip Point 2 0x600E 0: High Trip not asserted... - Page 63 (Table "Trip Point Configuration" concluded) Index Object Data B/S PM Name Description Code Index Type cess Object index of Low Trip Point Value source. Bit 16…31: Index Bit 08…15: Subindex 0x800E Bit 00…07: reserved 0x15 UDINT RW Low Trip Source Index 0x800F It is possible to reference to "Low Trip Point Limit"...
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Page 64: B: Literature
→ 54 CDGxxxDhs Literature [1] www.inficon.com Operating Manual Sky CDG045D tina51d1 (German) tina51e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein [2] www.inficon.com Operating Manual Sky CDG100D tina52d1 (German) tina52e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein [3] www.inficon.com... - Page 65 [7] www.inficon.com Operating Manual Stripe CDG100Dhs tina95d1 (German) tina95e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein [8] www.inficon.com Operating Manual Stripe CDG160Dhs, CDG200Dhs tinb45d1 (German) tinb45e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein [9] ETG.1000.2: Physical Layer service definition and protocol specification ...
- Page 66 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: English www.inficon.com t i r b45e1...