Ion Source Removal - Inficon Transpector MPH Operating Manual

6
Tighten the washers (A).
7
Insert the filament leads back into the clamps and tighten.
8
Using an ohmmeter, check that the filament is not shorted to ground and that
the filament shows a resistance of approximately 0.8  at the feedthrough.

6.5.4 Ion Source Removal

Proceed as follows to remove the ion source.
NOTE: See
1
While holding the clamps with pliers, use the flat blade screwdriver to loosen
the clamps holding the filament leads (A) and ion source leads (B - one is
hidden in the figure). There are a total of six leads that need to be loosened.
Figure 6-6 Detach leads
section 6.5.1.2, Tools for Replacing the Ion Source, on page 6-4
before continuing.
A
B
Transpector MPH Operating Manual
6 - 9