Inficon SKY CDG100D Operating Manual
  1. Manuals
  2. Brands
  3. Inficon Manuals
  4. Measuring Instruments
  5. CDG100D
  6. Operating manual

Inficon SKY CDG100D Operating Manual

Capacitance diaphragm gauge
Hide thumbs Also See for SKY CDG100D:
Table of Contents

Advertisement

Quick Links

Download this manual
Operating Manual
Incl. EU Declaration of Conformity
®
SKY
CDG100D
Capacitance Diaphragm Gauge
tina52e1-h
(2024-09)

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the SKY CDG100D and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for Inficon SKY CDG100D

Summary of Contents for Inficon SKY CDG100D

  • Page 1 Operating Manual Incl. EU Declaration of Conformity ® CDG100D Capacitance Diaphragm Gauge tina52e1-h (2024-09)

  • Page 2: Table Of Contents

    Table of Contents INFICON Table of Contents 1 General..................Product Identification ............Validity ................. Intended Use................ Functional Principle.............. Trademarks................Patents................. Scope of Delivery..............2 Safety .................... Symbols Used..............Personnel Qualifications ............General Safety Instructions..........Liability and Warranty ............3 Technical Data................
  • Page 3 INFICON Table of Contents 9 Disposal ..................10 Accessories .................. Literature .................... ETL Certification................EU Declaration of Conformity ............UKCA Declaration of Conformity ............. Symbol for cross-references within this docu- ment: ® 2 XY Symbol for references to literature list:  [Z] ® ...

  • Page 4: General

    1 | General INFICON General Product Identification In all communications with INFICON, please specify the informa- tion on the product nameplate. INFICON AG, LI-9496 Balzers Model: W ; LPS 3103457 Validity ® This document applies to products of the SKY CDG100D se- ries.
  • Page 5 INFICON General | 1 Switching function 0 Ÿ None 2 switching functions 2 Ÿ Interface 0 Ÿ None(analog) 1 Ÿ DeviceNet 2 Ÿ PROFIBUS 8 Ÿ EtherCAT *) PROFINET A Ÿ G Ÿ EtherCAT **) 3CD1-xxx-xxxx Filter 0 Ÿ Standard B Ÿ...

  • Page 6: Intended Use

    ® The gauges belong to the SKY Smart Sensors family and can be operated in connection with an INFICON Vacuum Gauge Controller (VGC series) or another appropriate controller. Functional Principle A ceramic diaphragm is deflected by pressure. The deflection is measured capacitively and converted into an analog linear out- put signal by the digital electronics.

  • Page 7: Patents

    INFICON Safety | 2 Patents EP 1070239 B1, 1040333 B1 US Patents 6528008, 6591687, 7107855, 7140085 Scope of Delivery 1× Gauge 1× Protection shield mounted 1× Pin for adjusting settings via buttons 1× Calibration Test Report Safety Symbols Used DANGER Information on preventing any kind of physical injury.

  • Page 8: Personnel Qualifications

    2 | Safety INFICON Personnel Qualifications All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product. General Safety Instructions ·...

  • Page 9: Liability And Warranty

    INFICON Safety | 2 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties · disregard the information in this document · use the product in a non-conforming manner · make any kind of interventions (modifications, alterations etc.) on the product ·...

  • Page 10: Technical Data

    3 | Technical Data INFICON Technical Data Further technical data for gauges with serial interface see respective Communication Protocol in the "Litera- ture" chapter. Measurement range ® "Validity"" Accuracy ≤0.5 Torr/mbar (FS) 0.4% of reading ≥1 Torr/mbar (FS) 0.2% of reading Temperature effect on zero ≤0.5 Torr/mbar (FS)
  • Page 11 INFICON Technical Data | 3 Identification Resistance R 13.2 kΩ referenced to sup- Ident ply common Voltage ≤5 V Remote Zero Adjust digital input for zero adjust- ment with external switch- ing contact External switching contact 30 V (dc) / <5 mA (dc) Puls >1 s …...
  • Page 12 ≤4 m (0.14 mm /conductor), ≤7 m (0.25 mm /conductor) ≤20 m (0.14 mm /conductor), Supply voltage 24 V ≤35 m (0.25 mm /conductor) Supply voltage 30 V ≤40 m (0.14 mm²/conductor), ≤70 m (0.25 mm²/conductor) INFICON controllers fulfill these requirements. tina52e1-h (2024-09)
  • Page 13 INFICON Technical Data | 3 For longer cables, larger conductor cross-sections are required ≤1.0 W). cable Grounding concept → "Power Connection" Materials exposed to vacuum ceramics (Al ≥99.5%), stainless steel AISI 316L Internal volume ≤6.8 cm Leak rate <1×10 mbar l/s Admissible pressure (absolute) 200 …...
  • Page 14 3 | Technical Data INFICON Dimensions [mm] DN 16 ISO-KF DN 16 CF-R ½" * 4 VCR female 8 VCR female 8 VCR long 4 VCR long female outer diameter male Weight 892 g … 964 g tina52e1-h (2024-09)
  • Page 15 INFICON Technical Data | 3 Analog Measurement Signal vs. Pressure Pressure p 1.1×FS 1.0×FS 0.9×FS 0.8×FS 0.7×FS 0.6×FS 0.5×FS 0.4×FS 0.3×FS 0.2×FS 0.1×FS 0.0×FS Measurement signal U p = (U / 10 V) × p(FS) Conversion Torr ↔ Pascal Torr mbar  Pa  1:00 1013.25 / 760 = 101325 / 760 = 1.3332…...

  • Page 16: Installation

    4 | Installation INFICON Installation WARNING Fragile components The ceramic sensor may be damaged by impacts. · Do not drop the product and prevent shocks and impacts. DANGER Leaking process media High-intensity mechanical, chemical or thermal impacts can cause leaks in the measuring sensor. Process media can thus leak and possibly cause hazards, if overpressure is in the vac- uum system.
  • Page 17 INFICON Installation | 4 DANGER Overpressure in the vacuum system >2.5 bar KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health. · Use O-rings provided with an outer centering ring.
  • Page 18 4 | Installation INFICON Caution Dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. · Always wear clean, lint-free gloves and use clean tools when working in this area. Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation.
  • Page 19 INFICON Installation | 4 Mount the protection shield. Protection shield tina52e1-h (2024-09)

  • Page 20: Power Connection

    · Connect the supply common with protective ground directly at the power. · Use differential measurement input (signal common and supply common conducted separately). · Potential difference between supply common and housing ≤18 V (overvoltage protection). INFICON controllers fulfill these requirements. tina52e1-h (2024-09)

  • Page 21: D-Sub, 9-Pin Connector

    INFICON Installation | 4 4.2.1 D-sub, 9-pin Connector If no sensor cable is available, make one according to the follow- ing diagram. Connect the sensor cable. Remote Zero Adjust Ident 10 : 15 V 14...30 V 15 V case Pin 1 Signal output (measurement signal) Pin 2 n.c.

  • Page 22: D-Sub, 15-Pin Connector

    4 | Installation INFICON 4.2.2 D-sub, 15-pin Connector If no sensor cable is available, make one according to the follow- ing diagram. Connect the sensor cable. Status Remote Zero Adjust Ident 10 : 15 V 14...30 V 15 V case...

  • Page 23: Operation

    INFICON Operation | 5 Operation Put the gauge into operation. If you are using an INFICON con- troller (VGC032 or VGC40x series), define the measurement range. Warm-up time 1 hour · for general purpose reading (within specifi- cations) 2 hours * · for precision measurement and zero ad- 4 hours **...

  • Page 24: Zeroing The Gauge

    5 | Operation INFICON LED status Meaning <SP1> lit green p ≤ setpoint 1 blinking green waiting for setpoint 1 input p > setpoint 1 <SP2> lit solid green p ≤ setpoint 2 blinking green waiting for setpoint 2 input p > setpoint 2 Zeroing the Gauge The gauge is factory calibrated while "standing upright" (® "Cali- bration Test Report").

  • Page 25: Zero> Adjustment

    10 (15-pin) or to pin 7 (9-pin), pulse >1 s … <5 s · the RS232C interface · an INFICON Vacuum Gauge Controller (VGC se- ries) While the gauge is being heated and/or under atmo- spheric pressure, the zeroing function is locked in or- der for operating errors to be prevented.
  • Page 26 5 | Operation INFICON If the final pressure is too high for zero adjustment (>25% of the FS), the zero cannot be reached and the <STATUS> LED blinks green. If this is the case, activate the factory set- ting and adjust the zero again (® 2 32).

  • Page 27: Zero> Adjustment With Ramp Function

    INFICON Operation | 5 5.2.2 <ZERO> Adjustment with Ramp Function The ramp function allows to adjust the zero at a known reference pressure within the measurement range of the gauge. It also permits to adjust an offset of the characteristic curve in or- der to ·...
  • Page 28 5 | Operation INFICON Keep the button depressed max. ø1.1 mm · Fine adjustment of the zero adjustment value: Release the button. Briefly press it again within 3 s. The value changes by one unit (push <ZERO> button in intervals of 1 s).

  • Page 29: Switching Functions

    INFICON Operation | 5 Switching Functions The two setpoints can be set to any pressure within the mea- surement range of the gauge. The current setpoint setting · can be read/written via the diagnostic port · is output at the D-sub connector instead of the measurement signal and can be measured with a voltmeter after the <SP>...
  • Page 30 5 | Operation INFICON DANGER Malfunction If processes are controlled via the signal output, keep in mind that by pushing the <SP> button the measurement signal is sup- pressed and the corresponding threshold value is output instead. This can cause malfunctions.
  • Page 31 INFICON Operation | 5 Keep the button depressed max. ø1.1 mm · Change of direction (inverse ramp): Release the button. Press and keep it depressed again within 3...5 s (the flashing frequency of the <STATUS> indicator changes briefly). · Fine adjustment of the threshold value: Release the but- ton.

  • Page 32: Activating The Factory Setting (Factory Reset)

    5 | Operation INFICON Activating the Factory Setting (Factory Reset) All user defined parameters (e.g. zero, filter) are restored to their default values. Loading of the default parameters is irreversible. Loading the default parameters: Put the gauge out of operation.

  • Page 33: Deinstallation

    INFICON Deinstallation | 6 Accessories Deinstallation Preconditions: · Vacuum system vented · Vacuum system cooled to <50 °C Power Connection Put the gauge out of operation. Unfasten the lock screws and disconnect the sensor cable. tina52e1-h (2024-09)

  • Page 34: Vacuum Connection

    6 | Deinstallation INFICON Vacuum connection DANGER Hot surface Touching the hot surface (>50 °C) can cause burns. · Put the product out of operation and allow it to cool down. WARNING Fragile components The ceramic sensor may be damaged by impacts.
  • Page 35 INFICON Deinstallation | 6 Caution Dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. · Always wear clean, lint-free gloves and use clean tools when working in this area. Remove the protection shield.

  • Page 36: Maintenance, Repair

    Gauge failures due to contamination are not covered by the warranty. · We recommend checking the zero at regular inter- vals. INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. tina52e1-h...

  • Page 37: Returning The Product

    INFICON Returning the Product | 8 Returning the Product WARNING Forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or biologi- cal hazard) can be detrimental to health and environment. · Products returned should preferably be free of harmful sub- stances.

  • Page 38: Accessories

    10 | Accessories INFICON WARNING Substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment. · Dispose of such substances in accordance with the relevant local regulations. Separating the components...

  • Page 39: Literature

    INFICON Literature Literature Operating Manual & Vacuum Gauge Controller VGC032 tinb02e1 INFICON AG, LI-9496 Balzers, Liechtenstein Operating Manual & Single-Channel Controller VGC401 tinb01e1 INFICON AG, LI-9496 Balzers, Liechtenstein Operating Manual & Two- & Three-Channel Measurement and Control Unit VGC402, VGC403...

  • Page 40: Etl Certification

    ETL Certification INFICON Communication Protocol & ® ® EtherCAT CDG100D (ETG.5003.2080 S (R) V1.0.0) tira68e1 INFICON AG, LI-9496 Balzers, Liechtenstein Communication Protocol & ® ® EtherCAT CDG100D (ETG.5003.2080 S (R) V1.3.0) tirb45e1 INFICON AG, LI-9496 Balzers, Liechtenstein [10] Communication Protocol &...

  • Page 41: Eu Declaration Of Conformity

    INFICON EU Declaration of Conformity EU Declaration of Conformity Manufacturer: INFICON AG, Alte Landstraße 6, LI-9496 Balzers This declaration of conformity is issued under the sole responsibility of the manufacturer. ® Product: CDG100D The product of the declaration described above is in conformity with fol- lowing Union harmonization legislation: ·...

  • Page 42: Ukca Declaration Of Conformity

    UKCA Declaration of Conformity INFICON UKCA Declaration of Conformity Manufacturer: INFICON AG, Alte Landstraße 6, LI-9496 Balzers This declaration of conformity is issued under the sole responsibility of the manufacturer. ® Product: CDG100D The product of the declaration described above is in conformity with the relevant UK Statutory Instruments: ·...
  • Page 43 INFICON Notes tina52e1-h (2024-09)
  • Page 44 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 reachus@inficon.com www.inficon.com Original: German tina52d1-h (2024-09) TINA52E1-H...

Table of Contents