User Manuals: Inficon Transpector SPS Analysis System

Manuals and User Guides for Inficon Transpector SPS Analysis System. We have 1 Inficon Transpector SPS Analysis System manual available for free PDF download: Operating Manual

Inficon Transpector SPS Operating Manual (174 pages)

Gas Analysis System

Brand: Inficon | Category: Measuring Instruments | Size: 13 MB

Table of Contents
5
Getting Started
12
General Safety Information
12
Using this Operating Manual
12
Purpose of Transpector SPS
13
Description of the Transpector SPS
13
How to Contact INFICON
14
Returning Transpector SPS to INFICON
14
Transpector SPS Performance Specifications
15
General Specifications
15
Orifice Sampling Inlet
16
Atmospheric Pressure (Capillary) Sampling
16
Physical Requirements
17
Physical Dimensions
17
Weight
18
Ventilation Requirements
18
Electrical Power Requirements
18
Required Supply Voltage
18
Acceptable Supply Voltage Range
18
Required Frequency
18
Power Rating
18
Fuse Rating
19
Overvoltage Category
19
Electrical Connections
19
Nitrogen Purge Gas (Corrosive System Only)
19
Exhaust Gas
20
Air Pressure Requirements
21
Required Air Pressure
21
Air Pressure Range
21
Moisture Content of Compressed Air Supply
21
Air Pressure Connections
21
Vacuum Requirements
22
Required Vacuum
22
Acceptable Range of Vacuum
22
Environmental Requirements
22
Use
22
Altitude Range
22
Maximum Humidity
22
Pollution Degree
22
Maximum Operating Temperature
22
Minimum Operating Temperatures
22
Clean Room Requirements
23
Anti-Static Conditions
23
Computer System Requirements
23
Operating System
23
Installation
24
Installation Overview
24
Cable Box Installation
24
Attach Transpector Electronics Module
24
Attach Heat Guard
25
Attach Cable Box
26
Pumping System Cover Installation
27
Hardware
27
Install the Cover on SPS Housing
28
Sniffer Installation
29
Mounting the Pumping System
29
Installing the Support Kit
30
Atmospheric Support Frame
32
SPS Controller Installation
33
Transpector Cable Box Connections
34
SPS Foreline Pump Installation
36
Software Installation
36
Connecting Transpector SPS
37
Introduction
37
General Networking Information
37
IP Addresses
37
Subnetworking
38
Transpector SPS IP Address
38
Using the INFICON Mass Spectrometer Search Utility to Change the Transpector SPS IP Address
39
Change IP Address
40
Launch Web UI
41
Find Device
41
Show Settings
41
Connecting Transpector SPS
42
Connecting a Single Transpector SPS
42
Single Transpector SPS Direct Connection Installation
42
Installing a Single Transpector SPS on an Existing Local Network
42
Installing Multiple Transpector SPS Sensors
43
Installing Multiple Transpector SPS Directly to a Host Computer
43
Installing Multiple Transpector SPS on an Existing Local Network
43
Changing the Computer IP Address
44
Windows 7
44
How the SPS System Works
48
SPS Components
48
Theory of Operation
49
Instrument Overview
49
Input/Output (Aux I/O)
49
SPS Aux I/O Connector
50
Two Digital Inputs
50
One Status Relay Output
50
One Analog Input
51
Ultra-High Vacuum System
51
Foreline Subsystem
52
Heater Subsystem
52
SPS Controller Subsystem
52
Solenoid Valves
53
Sensor and Transpector Electronics Module Subsystem
54
Application
54
Sample Inlet Systems and Examples of Use
55
Inlet System
55
High Pressure Sampling: Orifice Bypass (V4)
56
Advice and Tips
57
Theory and Application Guide
58
Theory of Operation
58
Sensors
58
The Ion Source
59
The Quadrupole Mass Filter
61
Scanning Characteristics
63
The Zero Blast
64
The Ion Detector
65
The Electron Multiplier (EM) Detector
65
The Continuous Dynode Electron Multiplier/Faraday Cup Detector
66
How to Interpret the Result
68
Qualitative Interpretation of Mass Spectra
68
Ionization Process
70
Isotope Ratios
72
Electron Energy Effects
74
A Qualitative Interpretation Guide
76
Dry Etching Chemistries
79
Tungsten CVD
81
Copper MOCVD
82
Quantitative Interpretation of Mass Spectra
83
(Calculating Partial Pressures)
83
Additional Information for Interpreting Mass Spectra
89
Ion Source Characteristics
89
Scanning Characteristics
90
Fragmentation Factors
90
Operation
91
Single Inlet
91
Single Inlet Ports
91
Single Inlet Process Connections
92
Calibration Option
92
High Mass FC5311 Tuning Reference
93
Process Gauge (CDG)
94
Heaters
95
Pumping System
95
Foreline Pump
95
Foreline Pirani Gauge
96
Turbo Molecular Pump
96
Turbo Molecular Pump Status
97
Nitrogen Purge Valve for the Turbo Molecular Pump on Corrosive Pumping Systems
97
Filament Control
97
Interlock
97
Total Pressure Calibration
97
Filament Lifetime
98
Pneumatic Digital Pressure Switch and Pressure Gauge
100
Setup Procedure
101
How to Test for Proper Settings
103
How to Lock and Unlock the Settings
104
Maintenance
105
Introduction
105
Safety Considerations
105
Toxic Material
106
Radiation
106
Electrical Voltages
106
Maintenance Procedures
107
Bakeout of Quadrupole
107
Spare Heating Jacket
107
General Instructions for All Repair Procedures
108
Required Tools, Materials, or Parts
108
Tools for Replacing the Filament Kit
108
Tools for Replacing the Ion Source
108
Tools for Replacing the Electron Multiplier
108
Parts Required for Maintenance
109
Changing Diaphragms in the Foreline Pump
109
Replacement Interval
109
Diaphragm Kit PN 923-418-G1
109
Procedure
110
Transpector Sensor Maintenance
119
How to Determine if a Filament Kit Replacement Is Required
120
Transpector Sensor Filament Replacement
121
Transpector Sensor Ion Source Replacement
123
Electron Multiplier Replacement
126
Diagnosing Problems
131
Introduction
131
Communication Problems
131
SPS Symptom-Cause-Remedy Chart
132
If You Cannot Resolve Your Problem
139
Event Log Files
139
Recommended Parts List
140
Ordering Information
140
SPS Consumable Parts
140
Preventative Maintenance Parts
141
Replacement Spare Parts
141
Fabguard Explorer Operation
142
Operation (Fabguard Explorer)
142
Introduction
142
Connecting to Transpector SPS
143
Valves and Orifices Pane
145
Inlet Calibration
145
Process Gauge
145
SPS Configuration Monitor
146
SPS Sensor Acquisition Defaults
149
What to Acquire (Rgas)
149
Spectrum Mode Acquisition Parameters
151
Selected Masses Mode
152
Existing Masses
153
Adding Masses
154
How to Acquire (SPS)
157
Ionizer Presets
158
Start Parameters
158
Start Mode Type
158
Data Threshold
159
Emission
159
Multiplier
159
Stop Parameters
160
Stop Mode Type
160
Data Threshold
160
Maximum Duration
161
Emission
161
Multiplier
161
Relay 1
162
Dwell
162
Dwell Mode
163
Dwell Time
163
Delay
163
Delay Mode
163
Time between Scans
164
Stabilization Time
164
Baseline
164
Peak Lock
165
Inlet
165
Close after
165
Duty Cycle
166
Heater
166
Off after
166

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User Manuals: Inficon Transpector SPS Analysis System

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