Related Manuals for Inficon Gemini MAG500
Summary of Contents for Inficon Gemini MAG500
- Page 1 Cold Cathode Gauge Gemini MAG500, MAG504 Gemini MAG550, MAG554 Cold Cathode Pirani Gauge Gemini MPG500, MPG504 Gemini MPG550, MPG554 Operating Manual Incl. EU Declaration of Conformity tina83e1-d (2018-12)
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Page 2: Product Identification
Product Identification In all communications with INFICON, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. INFICON AG, LI-9496 Balzers Model: tina83e1-d (2018-12) -
Page 3: Validity
Validity This document applies to products of the MAG5xx and MPG5xx series: EtherCAT RS232/485 The part number (PN) can be taken from the product nameplate. tina83e1-d (2018-12) -
Page 4: Intended Use
1×10 … 1×10 mbar. Gauges with gauge identification can be operated in connection with an INFICON Vacuum Gauge Controller of the VGC40x / VGC50x series. Gemini MPG500, MPG504, MPG550, MPG554 The Cold Cathode Gauges Gemini MPG5xx have been designed for vacuum measurement of gases in the pressure range of 1×10... -
Page 5: Scope Of Delivery
Over the whole measurement range, the measuring signal is output as a logarithm of the pressure. Gemini MPG500, MPG504, MPG550, MPG554 The gauge consists of two separate measuring systems (the Pirani and the cold cathode system according to the inverted magnetron principle). -
Page 6: Table Of Contents
Contents Product Identification Validity Intended Use Functional Principle Scope of Delivery Safety Symbols Used Personnel Qualifications General Safety Instructions Liability and Warranty Technical Data Measuring Signal vs. Pressure Gas Type Dependence MAG5xx Gas Type Dependence MPG5xx Installation Vacuum Connection Power Connection 3.2.1 FCC 68, 8-pin Connector 3.2.2 D-sub, 9-pin Connector Operation... - Page 7 Returning the Product Disposal Options 10 Accessories 11 Spare Parts 11.1 Ignition aid for MAG5xx and MPG5xx 11.2 Ionization Chamber for MAG5xx and MPG5xx 11.3 Measuring Chamber Cpl. (Spare Sensor) 11.3.1 Measuring Chamber Cpl. for MAG5x0 11.3.2 Measuring Chamber Cpl. for MAG5x4 11.3.3 Measuring Chamber Cpl.
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Page 8: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Symbol printed on the product nameplate: Consultation of operating manual required Notice <…>... -
Page 9: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 10: Technical Data
Technical Data For further technical data for gauges with RS232C or RS485C interface→ [1], with EtherCAT interface → [2]. Measurement range (air, N 1×10 … 1×10 mbar 1×10 … 1000 mbar Accuracy MAG (N 1×10 … 1×10 mbar 30% of reading Accuracy MPG (N 1×10... - Page 11 2 × 4.7 Ω, short-circuit proof Output impedance ≥10 kΩ, short-circuit proof Load impedance Step response time pressure dependent <100 ms >1×10 mbar ≈ 1×10 … 1×10 mbar Gauge identification 3MAx-xxx-000N – 3MAx-xxx-000Q 100 kΩ referenced to supply common 3MBx-xxx-000P 85 kΩ...
- Page 12 8-pin, shielded D-sub connector 9-pin, shielded ≤50 m Cable length (FCC only) (0.14 mm /conductor) INFICON controllers fulfill this requirement. The minimum voltage of the power supply unit must be increased proportionally to the length of the sensor cable. tina83e1-d (2018-12)
- Page 13 → "Power Connection" Grounding concept Vacuum connection – signal connected via 10 kΩ (potential difference ≤16 V) common Supply common – signal conducted separately; common differential measurement is recommended Materials exposed to vacuum Vacuum connection stainless steel (1.4435) Measuring chamber stainless steel (1.4435) Pirani filament ( MPG5xx)
- Page 14 Permissible temperatures Operation +5 °C … +55 °C Pirani filament (MPG) 120 °C ≤150 °C Bakeout Storage –40 °C … +70 °C Relative humidity, year's mean during 30 days a year ≤70% (non-condensing) 1×10 … 1×10 mbar ≤95% (non-condensing) 1×10 …...
- Page 15 Dimensions MxG50x [mm] FCC 68 D-Sub 8-pin 9-pin HV-ST HV-ST DN 25 ISO-KF DN 40 CF-R DN 40 ISO-KF DN 40 CF-F Dimensions MxG55x → [2]. tina83e1-d (2018-12)
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Page 16: Measuring Signal Vs. Pressure
Measuring Signal vs. Pressure Measurement range 1.5 … 8.5 V (3MAx-xxx-xxxN) Pressure p 1E+00 1E–01 mbar 1E–02 torr 1E–03 1E–04 1E–05 1E–06 1E–07 1E–08 1E–09 1E–10 0.0 0.5 1.0 1.5 10.0 Measurement signal U [V] (U-c) ⇔ p = 10 U = c + log valid in the range 1×10... - Page 17 Measurement range 0.667 … 10 V (3MAx-xxx-xxxQ) Pressure p 1E+00 1E–01 mbar 1E–02 torr 1E–03 1E–04 1E–05 1E–06 1E–07 1E–08 1E–09 1E–10 0.0 0.5 1.0 1.5 10.0 10.5 0.667 Measurement signal U [V] (U-c)/1.33 ⇔ p = 10 U = c + 1.33 log p valid in the range 1×10 mbar <...
- Page 18 Measurement range 1.398 … 8.6 V (3MBx-xxx-xxxP) Pressure p 1E+04 mbar 1E+02 torr 1E+00 1E–02 1E–04 1E–06 1E–08 1E–09 0.0 0.5 10.5 1.217 1.397 Measurement signal U [V] 1.667U-d ⇔ p = 10 U = c + 0.6 log p valid in the range 1×10 mbar <...
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Page 19: Gas Type Dependence Mag5Xx
Gas Type Dependence MAG5xx Indicated pressure (gauge calibrated for air) p [mbar] Xe Kr Ne He –3 –4 –5 –6 –7 –7 –6 –5 –4 –3 –2 [mbar] Indication range below 10 mbar In the range below 10 the pressure indication is linear. For gases other than air, the pressure can be determined by means of a simple conversion formula: = K ×... - Page 20 where: Gas type Air (N , CO) These conversion factors are average values. A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer. tina83e1-d (2018-12)
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Page 21: Gas Type Dependence Mpg5Xx
Gas Type Dependence MPG5xx Indication range from 10 … 10 mbar (Pirani-only operation) Indicated pressure (gauge calibrated for air) p [mbar] Indication range above 10 mbar Freon 12 –1 Water vapor –2 –3 –2 –1 4 6 8 4 6 8 4 6 8 4 6 8 [mbar]... - Page 22 Indication range 10 … 0.1 mbar Indicated pressure (gauge calibrated for air) p (mbar) –1 Indication range ... 10 mbar –2 –3 –4 –5 –6 –6 –5 –4 –3 –2 –1 4 6 8 (mbar) Indication range below 10 mbar In the range below 10 the pressure indication is linear.
- Page 23 where: Gas type Air (N , CO) These conversion factors are average values. A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer. tina83e1-d (2018-12)
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Page 24: Installation
Installation Vacuum Connection DANGER Overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. - Page 25 DANGER Protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 26 Mount the gauge so that no vibrations occur. Vibrations at the gauge cause a deviation of the measured values. The gauge may be mounted in any orientation. To keep conden- sates and particles from getting into the measuring chamber preferably choose a horizontal to upright position. For potentially contaminating applications and to protect the measurement system against contamination, installation of the optional seal with centering ring and filter is recommended...
- Page 27 When making a CF flange connection, it may be ad- vantageous to temporarily remove the electronics unit. Hexagon socket AF 2 Protective lid Keep the protective lid. tina83e1-d (2018-12)
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Page 28: Power Connection
• Connect the supply common with protective ground directly at the power. • Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤6 V (overvoltage protection). INFICON controllers fulfill these requirements. tina83e1-d (2018-12) -
Page 29: Fcc 68, 8-Pin Connector
3.2.1 FCC 68, 8-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. HV on High active Low active – HV on Signal – Ident – Electrical connection Pin 1 Supply (14.5 … 30 V (dc)) Pin 2 Supply common GND Pin 3... -
Page 30: D-Sub, 9-Pin Connector
3.2.2 D-sub, 9-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. Electrical connection Pin 1 High voltage on/off (low active) Pin 2 Supply common GND Pin 3 Signal output (measuring signal) Pin 4 Supply (14.5 …... -
Page 31: Operation
Operation Status Indication MAG50x Supply voltage Error High voltage HV-ST cold cathode Calibration For factory value setting only Meaning <ST> <HV-ST> No supply voltage lit solid Supply voltage = ok, green no high voltage in the measuring chamber lit solid blinking Supply voltage = ok, green... -
Page 32: Status Indication Mpg50X
Status Indication MPG50x Supply voltage Error High voltage HV-ST cold cathode Calibration For factory value setting only Meaning <ST> <HV-ST> No supply voltage lit solid Supply voltage = ok, Pirani active, no green high voltage in the measuring chamber lit solid blinking Supply voltage = ok, green... -
Page 33: Put Mag5Xx Into Operation
Turn on the gauge/high voltage only at pressures <10 mbar to prevent excessive contamination. If you are using an INFICON measurement unit for Compact Gauges with at least two gauge connec- tions, the cold cathode gauge can be controlled, for example, by a Pirani gauge. -
Page 34: Gas Type Dependence
. For other gases, it has to be corrected: • (MAG5xx → 19) • (MPG5xx → 21). If the gauge is operated with an INFICON controller, a calibration factor for correction of the actual reading can be applied (→ the corresponding controller). -
Page 35: Ignition Delay
Ignition Delay An ignition delay occurs when cold cathode gauges are switched on. The delay time increases at low pressures and for clean, degassed gauges it is typically: 1×10 … 1×10 mbar < 1 second 1×10 … 1×10 mbar <20 seconds 5×10 …... - Page 36 Gauge contamination is influenced by the process media used as well as any existing or new contaminants and their respective partial pressures. Continuous operation in the range of mbar ... 10 mbar can cause severe contamination as well as reduced up-time. Contamination of the gauge generally causes a deviation of the measured values: •...
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Page 37: Deinstallation
Deinstallation DANGER Contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Vacuum component Dirt and damages impair the function of the vac- uum component. - Page 38 Remove gauge from the vacuum system and install the protective lid. When deinstalling the CF flange connection, it may be advantageous to temporarily remove the elec- tronics unit (→ 27). Seal with centering ring Protective lid Clamp tina83e1-d (2018-12)
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Page 39: Maintenance, Repair
(e.g. ionization chamber, ignition aid, Pirani filament (MPG5xx)), are not covered by the warranty. INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. - Page 40 For adjusting the zero, operate the gauge under the same con- stant ambient conditions and in the same mounting orientation as normally. The zero can be adjusted via • the <ADJ> button on the gauge, • the diagnostic port (→ [1]), •...
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Page 41: Cleaning The Gauge / Replacing Parts
If the pressure value 1000 mbar is output at the measurement value output, the adjustment has been successful. Otherwise, repeat the adjustment proce- dure. Evacuate the vacuum system to p < 10 mbar and wait at least 2 minutes. ... -
Page 42: Troubleshooting (Measuring Chamber)
Caution Vacuum component Dirt and damages impair the function of the vac- uum component. When handling vacuum components, take appro- priate measures to ensure cleanliness and prevent damages. Caution Dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. - Page 43 Tools / material required • Allen wrench AF 2 • Pliers for retaining ring • Ohmmeter Unfasten the hexagon socket set screw (4) and remove the complete measuring chamber (3) from the electronics unit (5). Remove the retaining ring (1) as well as the ionization chamber (2) from the measuring chamber (3).
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Page 44: Replacing Ionization Chamber And Ignition Aid
Using an ohmmeter, make following measurements on the contact pins. Measurement Possible cause between pins 39.5 … 40.5 Ω 1 + 4 Values Pirani filament (at 20 °C) outside of rupture the range 1000 … 1100 Ω 1 + 2 Values Pirani tempera- (at 20 °C) - Page 45 Due to contamination remove the ignition aid with the 57). → removing tool (Accessories Insert e.g. a Scotch-Brite into the mounting tool … tina83e1-d (2018-12)
- Page 46 … and carefully rub the anode to a bright finish. Do not bend the anode. Insert e.g. a Scotch-Brite into the mounting tool … tina83e1-d (2018-12)
- Page 47 … and carefully rub the measuring chamber to a bright finish. Do not bend the anode. We recommend to rub the inside walls of the measuring chamber up to the groove for the retaining ring to a bright finish using a polishing cloth. •...
- Page 48 Insert the new ignition aid into the mounting tool with the flat side upwards … … and carefully slide it onto the anode until the stop position is reached. tina83e1-d (2018-12)
- Page 49 Remove particles in the measuring chamber by blowing with dry nitrogen (while the vacuum flange of the measur- ing chamber is pointing downward). Slide a new ionization chamber (2) into the measuring chamber (3) until the mechanical stop is reached and ...
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Page 50: Replacing Measuring Chamber
… and fasten it by means of the hexagon socket set screw (4). 6.2.3 Replacing Measuring Chamber Precondition 42). → Troubleshooting (measuring chamber) performed ( Set the calibration value of the spare sensor with the <CAL> switch on the electronics unit (5). HV-ST Calibration value spare sensor... - Page 51 Carefully slide the measuring chamber cpl. (3) into the electronics unit (5) until the mechanical stop is reached. Pins aligned straight. Fasten the measuring chamber (3) by means of the hexagon socket set screw (4). MPG5xx gauge only: Perform an ATM and HV adjustment of the Pirani measuring circuit via the <ADJ>...
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Page 52: Troubleshooting
Troubleshooting In case of an error, it may be helpful to just turn off the mains supply and turn it on again after 5 s. tina83e1-d (2018-12) - Page 53 tina83e1-d (2018-12)
- Page 54 tina83e1-d (2018-12)
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Page 55: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to INFICON should preferably be free of harmful substances. Adhere to the forward- ing regulations of all involved countries and for-... -
Page 56: Disposal
Disposal DANGER Contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING Substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimen-... -
Page 57: Options
Options Ordering No. Seal with centering ring and fine filter, 211-098 DN 25 ISO-KF (stainless steel) Baffle (optical tight) with centering ring and seal, DN 25 ISO-KF 211-113 Baffle, DN 25 ISO-KF, DN 40 ISO-KF, DN 40 CF-x 353-512 Accessories Ordering No. -
Page 58: Ignition Aid For Mag5Xx And Mpg5Xx
11.1 Ignition aid for MAG5xx and MPG5xx Ordering No. ignition aid (set of 10 pieces) 351-995 11.2 Ionization Chamber for MAG5xx and MPG5xx Ordering No. Ionization chamber stainless steel 351-555 Ionization chamber Titanium 351-556 11.3 Measuring Chamber Cpl. (Spare Sensor) Measuring chamber Ionization chamber Retaining ring... -
Page 59: 11.3.2 Measuring Chamber Cpl. For Mag5X4
Ionization chamber made of Titanium Ordering No. 3MA0-116-xxxx 351-502 DN 25 ISO-KF 3MA0-117-xxxx 351-514 DN 40 ISO-KF 3MA0-118-xxxx 351-538 DN 40 CF-R 3MA0-11Q-xxxx 351-526 DN 40 CF-F 11.3.2 Measuring Chamber Cpl. for MAG5x4 Ionization chamber made of stainless steel, Ordering No. coated 3MA3-006-xxxx 351-501... -
Page 60: 11.3.4 Measuring Chamber Cpl. For Mpg5X4
Ionization chamber made of Titanium Ordering No. 3MB0-116-xxxx 351-508 DN 25 ISO-KF 3MB0-117-xxxx 351-520 DN 40 ISO-KF 3MB0-118-xxxx 351-544 DN 40 CF-R 3MB0-11Q-xxxx 351-532 DN 40 CF-F 11.3.4 Measuring Chamber Cpl. for MPG5x4 Ionization chamber made of stainless steel, Ordering No. coated 3MB3-006-xxxx 351-507... -
Page 61: Literature
Literature www.inficon.com Communication Protocol RS232C / RS485C MAG500, MAG504, MPG500, MPG504 tira83e1 (English only) INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com Communication Protocol EtherCAT MAG550, MAG554, MPG550, MPG554 tirb38e1 (English only) INFICON AG, LI–9496 Balzers, Liechtenstein ETL Certification RECOGNIZED... -
Page 62: Eu Declaration Of Conformity
EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the following Directives: • 2014/30/EU, OJ L 96/79, 29.3.2014 (EMC Directive; Directive relating to electromagnetic compatibility) • 2011/65/EU, OJ L 174/88, 1.7.2011 (RoHS Directive;... - Page 63 Notes tina83e1-d (2018-12)
- Page 64 LI–9496 Balzers Liechtenstein +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina83d1-d (2018-12) www.inficon.com t i na83e1- d...