Olympus BX53M Instructions Manual page 105

2
3
a
2
Attaching U-WHP64, U-SPG64 or U-SP64
Following units can be attached to the right hand control 150 mm x
100 mm stage (U-SIC64).
· Wafer holder plate (U-WHP64)
1
· Stage glass plate (U-SPG64)
· Stage plate (U-SP64)
1
Turn the coarse focusing knob to lower the stage sufficiently.
2
Fit the stage plate or the holder plate in the concave area in the center
of the stage.
3
Tighten the clamping knob on the left side of the stage to secure the
stage plate.
Attaching BH2-WHR43, BH2-WHR54 or BH2-WHR65
Following units can be attached to the wafer holder (U-WHP2) and the
wafer holder plate (U-WHP64).
· Rotary wafer holder (BH2-WHR43)
1
· Rotary wafer holder (BH2-WHR54)
· Rotary wafer holder (BH2-WHR65)
1
Turn the coarse focusing knob to lower the stage sufficiently.
2
Place the wafer holder on the wafer holder plate.
TIP
When attaching the rotary wafer holder (BH2-WHR65) to the
wafer holder plate (U-WHP64), remove the axis part a of the
wafer holder plate using the commercially-available flathead
screwdriver and put it in the screw hole on the front side.
BX53M
99