2
Functional Description
Mass Spectrometer
Figure 22. Functional block diagram of the vacuum system
Nitrogen
gas port
Sheath
gas valve
Aux
gas valve
Sample
Sample tube
inlet device
28
LTQ Series Hardware Manual
Sweep
gas valve
Atmospheric
Source
pressure
region
region
Convectron
gauge
Exhaust
Forepump
Foreline
MP00
MP0
rf lens
ion guide
region
region
Triple-inlet
turbomolecular pump
Vent
valve
Helium
gas port
Damping gas
restrictor
Analyzer
region
Ion
gauge
Air filter
Thermo Scientific