Vacuum System - Thermo Scientific Surveyor MSQ Plus Hardware Manual

Vacuum System

Thermo Scientific
The vacuum system evacuates the region around the ion optics, mass analyzer, and ion
detection system. The principal components of the vacuum system include the following:
• Vacuum Manifold
• Turbomolecular Pump
• Forepump
• Pirani Gauge
• Vent Valve
A functional block diagram of the vacuum system is shown in
Figure 21. Functional block diagram of the vacuum system
LC
(or other
Sample tube
sample input
device)
Atmospheric M-Path
pressure region
region
(1 Torr)
Exhaust
Forepump
2
Functional Description
Figure 21.
Air filter
Vent
valve
RF/dc Analyzer
prefilter region
region
-
(10 -6 Torr)
3
(10 Torr)
Split flow
turbomolecular
pump
Foreline
Surveyor MSQ Plus Hardware Manual
MS Detector
Pirani
gauge
31