Compliance With Semi-F47 Standard; Setting Method; Behavior; Requirements Of The Semi-F47 Standard - Mitsubishi Electric MELSERVO-J5 MR-J5 Series User Manual

4.2

Compliance with SEMI-F47 standard

This function complies with "SEMI-F47 semiconductor process equipment voltage sag immunity test". With this function, even
when an instantaneous power failure occurs during operation, the occurrence of [AL. 010 Undervoltage] can be avoided by
using the electrical energy charged in the capacitor.
• Use a 3-phase power supply for the input power supply of the servo amplifier. Using a 1-phase 200 V AC for
the input power supply will not comply with SEMI-F47 standard.
Precautions
• Although the control circuit power supply of the servo amplifier can comply with SEMI-F47 standard, depending on the
power supply impedance and operating situation, a back-up capacitor may be required for instantaneous power failure in
the main circuit power supply.
• The external dynamic brake cannot be used when complying with the SEMI-F47 standard. Do not assign DB (Dynamic
brake interlock) to the output device. If DB is assigned, the servo amplifier switches to servo-off status when an
instantaneous power failure occurs.
• Perform an actual machine test and a detailed check of the equipment for the SEMI-F47 power instantaneous power failure
standard.

Setting method

Setting [Pr. PA20.2 SEMI-F47 function selection] to "1" (enabled), and [Pr. PF25 SEMI-F47 function - Instantaneous power
failure detection time (instantaneous power failure tough drive - detection time)] to "200" [ms] enables the SEMI-F47 standard
compliant function.
Servo Symbol
parameter
PA20.2 *TDS
PF25 CVAT

Behavior

When the SEMI-F47 standard compliant function is enabled, the operation will be as follows:
• When the control circuit power supply voltage continues for 200 ms at the rated voltage × 50 % or less, [AL. 010.1 Control
circuit supply voltage drop] occurs.
• [AL. 010.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Servo amplifier
MR-J5-10_ to MR-J5-700_
MR-J5W_-_G_
• MBR (Electromagnetic brake interlock) turns off when [AL. 010.1 Voltage drop in the control circuit power] occurs.

Requirements of the SEMI-F47 standard

The following table shows the permissible instantaneous power failure time for the instantaneous power failure voltage.
Instantaneous power failure voltage
Rated voltage × 80 %
Rated voltage × 70 %
Rated voltage × 50 %
4 APPLICABLE FUNCTIONS
154
4.2 Compliance with SEMI-F47 standard
Name
SEMI-F47 function selection
SEMI-F47 function -
Instantaneous power failure
detection time (instantaneous
power failure tough drive
detection time)
Permissible time for instantaneous power failure [s]
1
0.5
0.2
Outline
Enable or disable the SEMI-F47 function.
0: Disabled (initial value)
1: Enabled
Set the time until the occurrence of [AL. 010.1 Voltage drop in the control circuit
power].
Initial setting: 200 [ms]
Bus voltage which triggers alarm
158 V DC