Vacuum System; O-Rings And Seals - Agilent Technologies 5975C TAD VL MSD Troubleshooting And Maintenance Manual

9
Parts

Vacuum System

This section lists replacement parts available for the vacuum system. It
includes clamps, O-rings and seals
related components
components
(Table 19
(Table 20

O-rings and seals

Table 16
Description
Calibration valve O-ring (1/4-inch)
End plate O-ring (for front and rear end plates)
GC/MSD interface O-ring
HED feedthrough
HED feedthrough O-ring
KF10/16 seal (foreline pump inlet and diffusion pump
outlet), Micro-Ion vacuum gauge
KF50 seal (diffusion pump inlet)
KF25 O-ring assembly (turbo pump outlet)
KF elbow adapter for standard turbo pump outlet
O-ring for standard turbo pump inlet or diffusion pump
baffle adapter
Seal, performance turbo pump inlet
Side plate O-ring
Vent valve O-ring (1/4-inch)
240
(Table 17
(Table 18 and Figure
and Figure 58), and turbo pump vacuum system components
and Figure 59).
O-rings and seals
5975 Series MSD Troubleshooting and Maintenance Manual
(Table 16), standard foreline pump and
and Figure 56), dry foreline pump and related
57), diffusion pump and related components
Part number
5180-4182
0905-1441
0905-1405
G1099-80012
0905-0490
0905-1463
0100-1884
0100-1551
G2589-20041
0905-1443
0100-1879
0905-1442
5180-4182