Foreline hose assembly
Hose clamp
Dry pump
Figure 57
Dry foreline pump and related parts
Diffusion pump and related parts
Table 19
5975 Series MSD Troubleshooting and Maintenance Manual
Diffusion pump MSD vacuum system components
Item
Description
Claw clamps for baffle adapter
1
Diffusion pump
120V
220/240V
Diffusion pump baffle adapter
Diffusion pump baffle adapter O-ring
Diffusion pump control cable
Parts
(Figure
58)
Part number
G3170-60590
G1099-80500
G1099-80501
G1099-20021
0905-1443
G3170-60437
245
9