Figure 3
Table 6
Flow module valve state diagram
Result
Gas A flow
Gas A
Open
Gas B
Closed
MFC
On (at
setpoint)
Shutoff valve
Open
5975 Series MSD Troubleshooting and Maintenance Manual
Gas A
(methane)
supply
Gas A
select valve
Gas B
(other gas)
supply
Gas B
select valve
Schematic of CI flow control module
Gas B flow
Closed
Open
On (at
setpoint)
Open
Mass
flow
controller
Calibration
valve
Restrictor
Calibration
vial
Purge
Purge
with Gas A
with Gas B
Open
Closed
Closed
Open
On (at 100%)
On (at 100%)
Open
Open
CI Troubleshooting
CI ion
source
Shutoff valve
GC/MSD
interface
GC column
Pump out
Standby,
flow module
vented, or
EI mode
Closed
Closed
Closed
Closed
On (at 100%)
Off (at 0%)
Open
Closed
3
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