4
General Maintenance
To Remove the Diffusion Pump
The diffusion pump fluid may contain traces of toxic chemicals.
WARNING
Materials needed
• Aluminum foil, clean
• Gloves, oil-resistant
Procedure
1
2
3
4
5
6
122
Vent the MSD.
Separate the MSD from the GC. See
page 103.
Disconnect the foreline gauge assembly from the diffusion pump outlet.
The foreline gauge cable can be disconnected or can remain connected to
the foreline gauge.
Disconnect the diffusion pump temperature sensor wires from the wiring
harness.
Disconnect high vacuum power (HIVAC POWER) cable from the back panel
of the MSD. (This is the thick black cable that emerges near the bottom of
the pump.)
Support the diffusion pump with one hand.
"To Separate the MSD from the GC"
5975 Series MSD Troubleshooting and Maintenance Manual
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