Turbo Pump And Related Parts - Agilent Technologies 5975C TAD VL MSD Troubleshooting And Maintenance Manual

3
2
1
Figure 58 Diffusion pump and related parts

Turbo pump and related parts

Table 20
Item
5975 Series MSD Troubleshooting and Maintenance Manual
Turbo pump MSD vacuum system components
Description
Claw clamps for baffle adapter, standard turbo
Clamp for vacuum gauging
1 Fan (for high vacuum pump)
KF25 clamp (for turbo pump outlet)
Parts
(Figure 59)
Part number
G3170-60590
0100-1397
G1099-60564
0100-0549
9
247