To Reinstall The Diffusion Pump - Agilent Technologies 5975C TAD VL MSD Troubleshooting And Maintenance Manual

To Reinstall the Diffusion Pump

Materials needed
• Gloves, oil-resistant
• Vacuum cleaner, non-ESD generating (92175V or equivalent)
This procedure works best with two people, one to hold the pump and one to
install the clamp.
Procedure
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5975 Series MSD Troubleshooting and Maintenance Manual
Vacuum the fan that cools the diffusion pump.
Keeping the fan clean helps ensure maximum cooling. This is one of the
few times you will have convenient access to the pump side of the fan.
Slide the diffusion pump into the MSD.
You may have to tilt the pump slightly to get it into the MSD. Do not tilt it
past 45 degrees.
Install the O-ring assembly on the diffusion pump. See
Lift the diffusion pump into its normal position.
Install the KF50 clamp.
Reconnect the diffusion pump temperature sensor wires to the wiring
harness.
Reconnect the high vacuum power cable to the HIVAC POWER connector
on the back panel of the MSD. This is the thick black cable that emerges
near the bottom of the pump.
Reconnect the foreline gauge fitting to the outlet of the diffusion pump.
If you disconnected the foreline gauge cable, reconnect it to the foreline
gauge.
Move the MSD back to its normal position.
General Maintenance
Figure 19.
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