Source body
Setscrew
Repeller
Repeller insulator
Filament (1 of 2)
Source heater assembly
Repeller insulator
Washer
Repeller nut
(do not over-tighten)
Interface socket
Ion focus lens
Drawout cylinder
Drawout plate
Lens insulator (1 of 2)
Entrance lens
Figure 22
Assembling the ion source
5975 Series MSD Troubleshooting and Maintenance Manual
General Maintenance
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