7
Foreline gauge assembly
KF50 clamp
O-ring assembly
Diffusion pump
Diffusion pump outlet
Figure 17
Removing the diffusion pump
8
9
10 Remove the diffusion pump through the side of the MSD.
5975 Series MSD Troubleshooting and Maintenance Manual
Remove the KF50 clamp. See
Lower the diffusion pump.
Remove the O-ring assembly from the top of the diffusion pump.
The O-ring will have diffusion pump fluid on it and will be very sticky.
Place the O-ring on clean aluminum foil (shiny side down) to keep your lab
bench and the O-ring clean.
You may have to tilt the pump slightly to remove it. Do not tilt the pump
past 45 ° if the pump is warm.
Figure
17.
General Maintenance
4
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