Agilent Technologies 5975C TAD VL MSD Troubleshooting And Maintenance Manual page 248

9
Parts
Table 20
Item
248
Turbo pump MSD vacuum system components
Description
KF25 O-ring assembly (for turbo pump outlet)
4 Micro-Ion Vacuum Gauge vacuum gauging electronics
2 Performance turbomolecular pump
2 Standard turbomolecular pump
Turbo pump seal with shield
3 Turbo power supply only
Turbo separate power supply-control wiring harness
5 Analyzer chamber (manifold)
Manifold EMC gasket
5975 Series MSD Troubleshooting and Maintenance Manual
(Figure 59) (continued)
Part number
0100-1551
G3170-80001
G3170-89062
G3170-89061
0905-1613
G3170-60600
G3170-60835
G3170-20560
G3170-80031