Analyzer Chamber
The analyzer chamber
manifold is extruded and machined from an aluminum alloy. Large openings
in the side, front, and rear of the analyzer chamber are closed by plates.
O-rings provide the seals between the plates and the manifold. Ports in the
manifold and the plates provide attachment points for the Micro-Ion vacuum
gauge, calibration valve, vent valve, GC/MSD interface, and high vacuum
pump.
Diffusion pump version
The diffusion pump attaches with a KF50 seal to a baffle adapter that is
clamped to the bottom of the manifold. A vapor baffle helps prevent migration
of pump fluid vapor into the manifold. Cooling fins on the bottom of the
manifold keep the baffle cool so the vapor will condense on it.
Turbo pump version
The turbo pump and the mounting bracket for the turbo controller are
clamped directly to the manifold.
Observation window
Calibration and
vent valves
CI flow control
Vacuum gauge baffle
GC/MSD interface
To high vacuum pump
Side plate O-ring
Figure 36
Analyzer chamber
5975 Series MSD Troubleshooting and Maintenance Manual
(Figure
36) is where the analyzer operates. The
6
Vacuum System
179