Analyzer - Agilent Technologies 5975C TAD VL MSD Troubleshooting And Maintenance Manual

9
Parts

Analyzer

Table 21
Table 21
250
and Figure 60
Analyzer chamber and related parts
Item Description
1 Shield/plate for ion gauge port
Micro-Ion Vacuum Gauge Baffle
• M3X12 TX T10 PN SQ Cone SS (qty 2)
2 EI Calibration valve assembly
Turbo pump MSDs
Diffusion pump MSDs
3 Calibration vial
4 End plate front glass
4 End plate front acrylic
5 End plate front frame
End plate rear cap
Shield/plate for ion gauge port
Side plate (includes feedthrough and thumbscrews)
6 Vent valve knob
show the analyzer chamber and associated parts.
5975 Series MSD Troubleshooting and Maintenance Manual
(Figure 60)
Part number
G3170-00003
G3170-00015
0515-0664
G3170-60204
G3170-60201
G3170-80002
G3170-20552
G3170-20022
G3170-00001
G3170-20553
G3170-00003
G3170-60021
G3170-20554