9
Parts
Consumables and Maintenance Supplies
This section (Tables
maintaining your MSD.
Table 28
Description
Abrasive paper, 30 µm
Alumina powder, 1 kg
Cloths, clean (qty 300)
Cloths, cleaning (qty 300)
Cotton swabs (qty 100)
Diffusion pump fluid (2 required)
Foreline pump oil, P3, 0.5 L
Gloves, clean – Large
Gloves, clean – Small
Grease, Apiezon L, high vacuum
260
28
through 31) lists parts available for cleaning and
EI maintenance supplies
5975 Series MSD Troubleshooting and Maintenance Manual
Part number
5061-5896
8660-0791
05980-60051
9310-4828
5080-5400
6040-0809
6040-0621
8650-0030
8650-0029
6040-0289