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6
Vacuum System
High Vacuum Pump
Diffusion pump system
The diffusion pump supports a maximum flow rate into the MSD of
1.5 mL/min. The diffusion pump uses baffling to prevent vapor from migrating
into the analyzer chamber. Foreline pressure is monitored by the foreline
gauge. The AC board controls the diffusion pump heater.
Turbo pump system
The 5975 Series MSD can have one of two turbo pumps. Both pumps are
referred to as turbo pumps.
Both turbo pumps have screens to keep debris out of the pump, but no baffle is
necessary. Pump speed is controlled by the turbo controller; there is no
foreline gauge.
178
5975 Series MSD Troubleshooting and Maintenance Manual
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Troubleshooting
