Agilent Technologies 5975C TAD VL MSD Troubleshooting And Maintenance Manual page 246

9
Parts
Table 19
246
Diffusion pump MSD vacuum system components
Item Description
Diffusion pump packaging cap
2 Fan (for high vacuum pump)
3 Foreline gauge assembly
Foreline gauge seal
KF10/16 clamp (diffusion pump outlet)
KF10/16 seal (diffusion pump outlet)
KF50 clamp
KF50 seal (foreline pump to baffle adapter)
Side plate (includes feedthroughs and thumbscrews)
Analyzer chamber
5975 Series MSD Troubleshooting and Maintenance Manual
(Figure 58) (continued)
Part number
G3170-40540
3160-1037
G1099-60545
0905-1463
0100-1397
0905-1463
0100-1395
0100-1884
G1099-60021
G3170-20549