Introduction; 5975 Series Msd Version - Agilent Technologies 5975C TAD VL MSD Troubleshooting And Maintenance Manual

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Introduction

5975 Series MSD Version

5975 Series MSDs are equipped with a diffusion pump or one of two
turbomolecular (turbo) pumps. The serial number label displays a product
number
Table 1 Available high vacuum pumps
Model name
5975C TAD VL MSD
5975C TAD inert MSD
5975C TAD inert XL MSD
5975C TAD inert XL EI/CI
MSD
7820 VL MSD
7820 MSD
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(Table 1) that indicates what kind of MSD you have.
Product number Description
G3170A Diffusion Pump MSD
G3171A Standard Turbo MSD
G3172A Performance Turbo MSD
G3174A CI Performance Turbo Pump
G3175A Diffusion Pump MSD
G3176A Standard Turbo MSD
Ionization modes
Electron impact (EI)
Electron impact (EI)
Electron impact (EI)
Electron impact (EI)
Negative chemical ionization (NCI)
Positive chemical ionization (PCI)
Electron impact (EI)
Electron impact (EI)
5975 Series MSD Troubleshooting and Maintenance Manual