Pressure-Related Symptoms - Agilent Technologies 5975C TAD VL MSD Troubleshooting And Maintenance Manual

3
CI Troubleshooting

Pressure-Related Symptoms

The following symptoms are all related to high vacuum pressure. Each
symptom is discussed in more detail in the following pages.
The mass flow controller is calibrated for methane and the high vacuum gauge
controller is calibrated for nitrogen, so these measurements are not accurate
in absolute terms
readings. They were taken with the following set of conditions:
Source temperature
Quad temperature
Interface temperature
Helium carrier gas flow
Table 7
MFC
(%)
10
15
20
25
30
35
40
64
(Table 7). They are intended as a guide to typical observed
250 °C
150 °C
280 °C
1 mL/min
Pressure measurements
Pressure (Torr)
Methane
Performance turbo pump
–5
×
5.5 10
–5
×
8.0 10
–4
×
1.0 10
–4
×
1.2 10
–4
×
1.5 10
–4
×
2.0 10
–4
×
2.5 10
5975 Series MSD Troubleshooting and Maintenance Manual
Ammonia
Performance turbo pump
–5
×
5.0 10
–5
×
7.0 10
–5
×
8.5 10
–4
×
1.0 10
–4
×
1.2 10
–4
×
1.5 10
–4
×
2.0 10