To Monitor High Vacuum Pressure - Agilent Technologies 5977B Series Operating Manual

To Monitor High Vacuum Pressure

Pressure monitoring requires an optional G3397B Micro-Ion vacuum gauge.
If you are using hydrogen as a carrier gas or for the JetClean system, the hydrogen
WA R N I N G
gas flow must be off before turning off the MSD power. If the foreline pump is off,
hydrogen will accumulate in the MSD and an explosion may occur. Read
Safety"
Procedure
1 Ensure that the hydrogen supply shutoff valves are closed if you are using
2 Start up and pumpdown the MSD. (See
3 In the Tune and Vacuum Control view, select Turn Vacuum Gauge on/off from the
4 Select Manual Tune from the Parameters menu to display the Manual Tune
5 Select the Values tab to view the HiVac reading. (See
5977B Series MSD Operating Manual
on page 23 before operating the MSD with hydrogen gas.
hydrogen as a carrier gas or for the JetClean system.
page 116.)
Vacuum menu.
dialog.
Operating in EI Mode
"To Pumpdown the MSD"
Figure 31
4
"Hydrogen
on
on page 102.)
101